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Instruments and Methods in Physics Research B xxx (2005) xxxxxx www.elsevier.com/locate/nimb Recent advances in R D of gas cluster ion beam processes and equipment Isao Yamada *, Noriaki Toyoda Laboratory of Advanced Science and Technology for Industry, University of Hyogo, 3-1-2 Kouto, Kamigori, Hyogo 678-1205, Japan Available online Abstract This report reviews a new field of ion beam ... General GCIB apparatus schematic. ... NEDO/METI Project on Gas Cluster Ion Beam Process Technology. ...
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