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... Data . ... MIR Station . ... Mir was the world's first consistently inhabited long-term research station in space, and the first 'third generation' type space station, constructed over a number of years with a modular design. ... Detectors of the instrument package allow observing fluxes of >0.1 MeV gamma-quants associated with bremstrahlung emission of high energy electrons of similar energies and with integral fluxes of high energy electrons (>5 MeV) and protons (>60 MeV). ... 60 MeV). ...
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ARTICLE IN PRESS N IM B Beam Interactions with Materials & Atoms Nuclear Instruments and Methods in Physics Research B xxx (2005) xxxxxx www.elsevier.com/locate/nimb Gas cluster ion beam infusion processing of semiconductors R. MacCrimmon *, J. Hautala, M. Gwinn, S. Sherman Epion Corporation, 37 Manning Road, Billerica, MA 01821, United States Available online Abstract The application of gas cluster ion beam (GCIB) infusion in advanced IC fabrication is described. ... B xxx (2005) xxxxxx Fig. ...
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Ссылки http://danp.sinp.msu.ru/Articles_GSIB/nimb_gasclasterionbeam_aplications.pdf -- 311.1 Кб -- 07.10.2005 Похожие документы
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