Mueller polarimetry as a tool for detecting asymmetry in diffraction grating profiles Tatiana Novikovaa) and Pavel Bulkin LPICM, CNRS, Ecole Polytechnique, Palaiseau 91128, France b) Vladimir Popov Skobeltsyn ... Ecole Polytechnique, Palaiseau 91128, France (Received 19 March 2011; accepted 19 July 2011; published 9 September 2011) Reflected Mueller matrix spectra were measured and simulated for asymmetrical photoresist master diffraction ... Parametric model of grating profile. ...
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