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ARTICLE IN PRESS Nuclear Instruments and Methods in Physics Research B xxx (2005) xxx xxx www.elsevier.com/locate/nimb Development of a size -selected gas cluster ion beam system for low-damage processing Noriaki Toyoda *, Shingo Houzumi, Isao Yamada Laboratory of Advanced Science and Technology for Industry, University of Hyogo, 3-1-2 Kouto, Kamigori, Hyogo 678-1205, Japan Available online Abstract A high-current gaseous cluster ion ... MD simulations also indicated that Ar Fig. ...
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