Nuclear Instruments and Methods in Physics Research B 237 (2005) 235­239 www.elsevier.com/locate/nimb Gas cluster ion beams for wafer processing M.E. Mack * Epion Corporation, 37 Manning Road, Billerica, MA 01821, USA Available online 28 June 2005 Abstract Gas cluster ion beams (GCIB) represent a powerful new tool for wafer processing. ... Introduction Gas cluster ion beams (GCIB) have been demonstrated to be valuable for surface smoothing and etching [1]. ... Fig. ... This ionizer is shown in Fig. ...

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• Статьи, подготовленные для публикации в журнале Nuclear Instruments and Methods

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• Central Eurasian Studies Society Sixth Annual Conference (2005)

... 13, Moscow 119992, Russian Federation, e-mail: busarev@sai.msu.ru; 2 Research Institute Crimean Astrophysical Observatory, p/o Nauchnyi, Crimea 334413, Ukraine, e-mail: prok@crao.crimea.ua Summary: We propose a combined method of astronomical investigations of small or distant planets incorporating registration of a set of integral spectra of an object and their frequency analysis. ... An application of the method is shown on example of asteroid 21 Lutetia. ... 6] Busarev V. V. (2002), Solar Sys. ...

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... 5-я летняя школа по геометрическим методам математической физики, 23-26 июня 2015 г. new . ... Лаборатория "Геометрические методы математической физики" была создана в декабре 2010г. после объявления победителей гранта Правительства Российской Федерации для государственной поддержки научных исследований, проводимых под руководством ведущих ученых в российских образовательных учреждениях высшего профессионального образования. ... на семинаре "Геометрия и группы" состоится доклад: . ...

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... Sukhanov L.P. // Vestnik Moskovskogo Universiteta. Seriya 1. Matematika. Mekhanika. ...

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96. http://www.rsr-online.ru/doc/norm/521.pdf

97. Division of Applied Mathematics, Faculty of Physics, Lomonosov MSU