Nuclear Instruments and Methods in Physics Research B 237 (2005) 235239 www.elsevier.com/locate/nimb Gas cluster ion beams for wafer processing M.E. Mack * Epion Corporation, 37 Manning Road, Billerica, MA 01821, USA Available online 28 June 2005 Abstract Gas cluster ion beams (GCIB) represent a powerful new tool for wafer processing. ... Introduction Gas cluster ion beams (GCIB) have been demonstrated to be valuable for surface smoothing and etching [1]. ... Fig. ... This ionizer is shown in Fig. ...
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