Äîêóìåíò âçÿò èç êýøà ïîèñêîâîé ìàøèíû. Àäðåñ îðèãèíàëüíîãî äîêóìåíòà : http://www.spm.genebee.msu.ru/members/bolshakova/zachitmet-2009-1.pdf Äàòà èçìåíåíèÿ: Wed Sep 17 11:37:38 2008 Äàòà èíäåêñèðîâàíèÿ: Mon Oct 1 23:41:04 2012 Êîäèðîâêà: ISO8859-5

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ðÜâêÛêëê éÛÑÛ~ÒâÝãØ iÛßÛÛ Û ÞÒÝêãiÛßÛÛ Ûß. Ô.÷. þëßÝÛÜ úÔ÷ 119991, õãâÝ,, óÒÜÛÜâÝÛØ äãâä., 31 2 þÛÑÛ~ÒâÝÛØ éÝëÞÈêÒê õÙü Ûß. õ.×. óãßãÜãâã, 119992 õãâÝ,. óÒÜÛÜâÝÛÒ ,,ãÀ . 1 âê. 3 E-mail: emenshikov@gmail.com
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ðââÞÒã,Ü âêëÝêë êãÜÝÛi äÞÒÜãÝ äãÞÛâêÛãÞ-äãÞÛßÒêÝÛÞê-äãÞÛâêÛãÞ (ûõÔû) êÛÇÞãÝ-âãäãÞÛßÒ. úÑÇãêÜ ëÜÛ,ÒâÞÈÜÀØ Þ,,ãÛêß ÜÞÛÑ ÛÑãÇÚÒÜÛØ êãÜÝÛi äÞÒÜãÝ ÇÞãÝ-âãäãÞÛßÒã, äãÞë~ÒÜÜÀi ßÒêããß êãßÜã-âÛÞã,ãØ ßÛÝãâÝãäÛÛ (Ôûõ) PACS:

××æáæ÷ðæ øãÞÛßÒÀ Üiãflê ?Ûã~Ø?ÒÒ äÛßÒÜÒÜÛÒ , âßÀi ÑÞÛ~ÜÀi âéÒi ÚÛÑÜÛ Û ÒflêÒÞÈÜãâêÛ ~ÒÞã,Ò~Òâê,: , äãßÀ?ÞÒÜÜãâêÛ Û âÒÞÈâÝãß iãÑflØâê,Ò, , ÜëÝÒ Û êÒiÜÛÝÒ, ,ã ,âÒi ,Ûi êÜâäãê. ÷? äã,âÒÜÒ,ÜÀØ ÇÀê, ÜÒßÀâÞÛß ÇÒÑ ÛâäãÞÈÑã,ÜÛfl ?ÛãÝã,,ã Ýë,, äãÞÛßÒÜÀi ßêÒÛÞã,. ðâäãÞÈÑã,ÜÛÒ ÇÞãÝ-âãäãÞÛßÒã, ßãÚÒê äãßã~È , âãÑÜÛÛ Üã,Ài ßêÒÛÞã, â ÜÒãÇÀ~ÜÀßÛ êÒiÜãÞã,,Û~ÒâÝÛßÛ iÝêÒÛâêÛÝßÛ. ðÑë~ÒÜÛ êãÜÝÛi äÞÒÜãÝ ÇÞãÝ-âãäãÞÛßÒã, Û, , ~âêÜãâêÛ, äã^Òââ ßÛÝãéÑã,ã,,ã ââÞãÒÜÛfl (õþú) , ÜÛi, , ÜâêãflÒÒ ,Òßfl ëÒÞflÒêâfl äÛâêÞÈÜãÒ ,ÜÛßÜÛÒ, äãâÝãÞÈÝë Ûi ÛâäãÞÈÑã,ÜÛÒ äÒãâê,ÞflÒê ?ÛãÝÛÒ ,ãÑßãÚÜãâêÛ Þfl âãÑÜÛfl ÜÜãßêÒÛÞã,. õÛÝãéÑã,ãÒ ââÞãÒÜÛÒ , äÞÒÜÝi Òê ?ÛãÝÛÒ ,ãÑßãÚÜãâêÛ Þfl âãÑÜÛfl ÜÜãßÒßÇÜ. øã,Ò,,fl äÞÒÜÝÛ ÇÞãÝ-âãäãÞÛßÒã, éÛÑÛ~ÒâÝãØ ÛÞÛ iÛßÛ~ÒâÝãØ ãÇÇãêÝÒ, ,ãÑßãÚÜã ëÞÒÜÛÒ ãÜãØ ÛÑ éÑ â ãÇÑã,ÜÛÒß âéÒÛ~ÒâÝÛi ÛÞÛ ^ÛÞÛÜÛ~ÒâÝÛi äã [1, 2]. ñäãÞÜÒÜÛÒ ^ÛÞÛÜÛ~ÒâÝÛi äã éÒãß,,ÜÛêÜÀß ßêÒÛÞãß äãÑ,ãÞflÒê äãÞë~ÛêÈ ß,,ÜÛêÜÀÒ ÜãâÛêÒÞÛ ÛÜéãß^ÛÛ ëÞÈê,ÀâãÝãØ äÞãêÜãâêÛ, êÝ ÚÒ ÜÜãäã,ã [3, 4]. õÒßÇÜÀ Ü ãâÜã,Ò ÇÞãÝâãäãÞÛßÒã, äãÑ,ãÞflê âãÑ,êÈ ÑÞÛ~ÜÀÒ âÒÜâãÀ, ÑäãÞÜflfl äãÀ ã,,ÜÛ~ÒâÝÛßÛ ßêÒÛÞßÛ (äãÞÛÜÛÞÛÜ [5]) Û ÇÛãÞã,,Û~ÒâÝÛßÛ ãÇÒÝêßÛ (ÇÒÞÝÛ [6]). × ãßÒÜi ,ÜëêÛ äÞÒÜãÝ ÇÞãÝ-âãäãÞÛßÒã, ßãÚÜã ãâëÒâê,ÞflêÈ âÛÜêÒÑ ÜÜã~âêÛ^ [7]. ÷ÒãÇiãÛßãâêÈ âãÑÜÛfl ëÜÛ,ÒâÞÈÜã,,ã Þ,,ãÛêß ÜÞÛÑ âêëÝêëÀ äÞÒÜãÝ ÇÞãÝ-âãäãÞÛßÒã, ,ãÑÜÛÝÒê , â,flÑÛ âÛÞÈÜÀß âiãÚÒÜÛÒß ÑÜ~ÒÜÛØ ,ÒÞÛ~ÛÜ ßÛÝãéÑã,ã,,ã ââÞãÒÜÛfl, äãÞë~ÒßÀi ÑÞÛ~ÜÀßÛ ßÒêãÛÝßÛ â~Òê, êÝÚÒ ÜÒãÇiãÛßãâêÈ ãÇÇãêÝÛ ÇãÞÈ?ã,,ã ~ÛâÞ ÛÑßÒÒÜÛØ Þfl äãÞë~ÒÜÛfl âêêÛâêÛ~ÒâÝÛi iÝêÒÛâêÛÝ ßêÒÛÞã,.
1

õæýùáðôÔ ?ôûøæúðõæ÷ýÔ × ÇãêÒ ÛââÞÒã,ÞÛâÈ äÞÒÜÝÛ êÛÇÞãÝ-âãäãÞÛßÒ äãÞÛcêÛãÞ-äãÞÛßÒêÛÞÝÛÞê-äãÞÛâêÛãÞ (ûõÔû). áÞfl äãÞë~ÒÜÛfl ãÇÑ^ã, ÛâäãÞÈÑã,Þâfl ßÒêã äâÒ,ãÚÛ,ãØ ÛÝÞÈÜãØ äãÞÛßÒÛÑ^ÛÛ. ðâäãÞÈÑã,ÞÛâÈ ,Ò âÒÛÛ ãÇÑ^ã, Mn = 75000, [øû] : [øõÔ] = 1 : 2 Û Mn = 30000, [øû] : [øõÔ] = = 1 : 1 (øû : øõÔ 16 000 : 14 000). ñÜ~ÒÜÛÒ äãÞÛÛâäÒâêÜãâêÛ 1.4-1.5. ýãÜÝÛÒ äÞÒÜÝÛ ,,ãêã,ÛÞÛâÈ ÛÑ 1% âê,ã äãÞÛßÒ , iÞããéãßÒ ßÒêããß äflßãØ âãÇ^ÛÛ Ü â,ÒÚÒâÝãÞãêãØ âÞÒ. ðâäÒÜÛÒ âê,ãÛêÒÞfl äãÛÑ,ãÛÞãâÈ , ÜâÀÒÜÜÀi äi iÞããéãß Þfl äãÞë~ÒÜÛfl ÜÛÇãÞÒÒ ëâêãØ~Û,Ài âêëÝêë ßÛÝãéÑã,ã,,ã ââÞãÒÜÛfl. ÔêãßÜã-âÛÞã,ÀÒ ÛÑßÒÒÜÛfl äãÛÑ,ãÛÞÛâÈ Ü ßÛÝãâÝãäÒ ÷ÜãâÝãäÒ-3 (Digital Instruments, ûÜê-ÕÇ, û?Ô). áÜÜÀÒ Ôûõ ãÇÇêÀ,ÞÛâÈ â äãßãÈ äã,,ßßÜã,,ã ãÇÒâäÒ~ÒÜÛfl þÒßêãâÝÜ ùÜÞØÜ (åÒÜê äÒâäÒÝêÛ,ÜÀi êÒiÜãÞã,,ÛØ, õãâÝ,). áÞfl ,Àfl,ÞÒÜÛfl ÛÑßÒÜÒÜÛfl ßãéãÞã,,ÛÛ äÞÒÜãÝ äÛ âÝÜÛã,ÜÛÛ Ôûõ , ÝãÜêÝêÜãß ÒÚÛßÒ, âÜ~Þ äã,ãÛÞãâÈ âÝÜÛã,ÜÛÒ Ü ãÇÞâêÛ ãÇÑ^ ÑßÒãß 5 ç 5 ßÝß, ÑêÒß Ü ãÇÞâêÛ ÇãÞÈ?Ò,,ã ÑßÒ. × ÝãÜêÝêÜãß ÒÚÛßÒ âÝÜÛã,ÜÛfl ßãéãÞã,,Ûfl äÞÒÜãÝ ßÒÜflÞâÈ. ÷ Ûâ. 1 ÛÑãÇÚÒÜã iÝêÒÜãÒ "ÑßÑÀ,ÜÛÒ" ãÇÞâêÛ äÒ,Û~Üã,,ã âÝÜÛã,ÜÛfl. × ãêÞÛ~ÛÒ ãê ÝãÜêÝêÜã,,ã, äÛ ÒÑãÜÜâÜãß (äãÞëÝãÜêÝêÜãß) ÒÚÛßÒ âÝÜÛã,ÜÛfl, iÝêÒÛÑëÒ,,ãâfl ßÒÜÈ?Ûß âÛÞã,Àß ,ãÑÒØâê,ÛÒß Û,,ÞÀ Ü ãÇÑÒ^, ÛÑßÒÜÒÜÛfl ßãéãÞã,,ÛÛ ÜÒ ÜÇÞÞãâÈ, , â,flÑÛ â ~Òß ,âÒ ÞÈÜÒØ?ÛÒ ÛââÞÒã,ÜÛfl äã,ãÛÞÛâÈ , ÒÑãÜÜâÜãß ÒÚÛßÒ. × ÇãêÒ [8] ÇÀÞã äãÝÑÜã, ~êã ÒÞÈÒé äÞÒÜãÝ ÇÞãÝ-âãäãÞÛßÒã, äãÞë~ÒßÀØ Ü Ôûõ-ÛÑãÇÚÒøúù×æúæ÷ù
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2 Üß 8000 6000 4000 2000 0 0 4000 8000 Üß

õÒÜÈ?ÛÝã, Û .

âêÒê Û , ãÇÞâêÛ setpoint = 0.70 Á 0.05 ãâêÛ,,Òê ßÝâÛßÞÈÜã,,ã ÑÜ~ÒÜÛfl. áÞÈÜÒØ?ÒÒ ë,ÒÞÛ~ÒÜÛÒ âÛÞã,ã,,ã ,ãÑÒØâê,Ûfl äÛ,ãÛê Ý ÑßÀêÛ ÛÑãÇÚÒÜÛfl äÛ ÞÛêÒÞÈÜãß âÝÜÛã,ÜÛÛ. × Ý~Òâê,Ò ãäêÛßÞÈÜã,,ã äßÒê âÝÜÛã,ÜÛfl ÇÀÞ ,ÀÇÜ setpoint = 0.70 Á 0.05. úæñüó?ýÔý? ð ðÿ ùÕûüìáæ÷ðæ ÔêãßÜã-âÛÞã,ÀÒ ÛÑãÇÚÒÜÛfl êãÜÝÛi äÞÒÜãÝ ûõÔû äÛ,ÒÒÜÀ Ü Ûâ. 3. × äÞÒÜÝi Mn = 75000, [øû] : [øõÔ] = 1 : 2 ÜÇÞÒêâfl ãßÒÜÜfl âêëÝêë ßÛÝãéÑã,ã,,ã ââÞãÒÜÛfl. × äÞÒÜÝi Mn = = 30000, [øû] : [øõÔ] = 1 : 1 ÜÇÞÒêâfl ÞßÒÞÞflÜfl âêëÝêë. ÔÜÞÛÑ ãßÒÜÜãØ âêëÝêëÀ áÞfl ÝãÞÛ~Òâê,ÒÜÜã,,ã ãäÛâÜÛfl ééÒÝê ßÛÝãéÑã,ã,,ã ÑÒÞÒÜÛfl ÇÀÞ ÑÇãêÜ ëÜÛ,ÒâÞÈÜÀØ Þ,,ãÛêß Þfl äãâ~Òê âÒÜÒ,,ã ÑßÒ ãßÒÜã,. ÷ÒãÇiãÛßãâêÈ Ò,,ã âãÑÜÛfl ,ãÑÜÛÝÒê , â,flÑÛ â âÛÞÈÜÀß âiãÚÒÜÛÒß ÑÜ~ÒÜÛØ, äãÞë~ÒßÀi ÑÞÛ~ÜÀßÛ ßÒêãÛÝßÛ â~Òê. ÷ äÒ,ãß êäÒ Þfl ÜÞÛÑ Ôûõ ÛÑãÇÚÒÜÛØ ãßÒÜÜãØ âêëÝêëÀ ÜÒãÇiãÛßã ÛâÝÞ~ÛêÈ ÜÒã,ÜãâêÛ äã,ÒiÜãâêÛ äÞÒÜÝÛ (ßÝãÒÞÈÒé). áÞfl êã,,ã ÛâäãÞÈÑã,ÞâÈ ãÇÇãêÝ þëÈÒ âäÒÝê ÛÑãÇÚÒÜÛØ. ÙßãÜÛÝÛ ÜÛÑÝãØ ~âêãêÀ, âããê,Òêâê,ëÛÒ ßÝãÒÞÈÒéë ãÇÜëÞflÞÛâÈ, ,ÀâãÝãØ, ãÇÑëÛÒ ÝêÛÜë õþú, ãâê,ÞflÞÛ ÇÒÑ ÛÑßÒÜÒÜÛØ. áÞfl ãäÒÒÞÒÜÛfl ÑßÒã, ãßÒÜã, âÞÒëÒê ÑÒÞÛêÈ ãÇÞâêÈ âÜÛßÝ Ü ,Ò éÑÀ. ÷ äãÞë~ÒÜÜÀi ÛÑãÇÚÒÜÛfli éÑÒ äãÞÛßÒêÛÞÝÛÞê âããê,Òêâê,ëê ÇãÞÒÒ ,,ÞëÇãÝÛÒ (êÒßÜÀÒ) ë~âêÝÛ, éÑÒ äãÞÛâêÛãÞ ÇãÞÒÒ ,ÀâãÝÛÒ (â,ÒêÞÀÒ) ãÇÞâêÛ âÜÛßÝ, äãêãßë ßÀ ÛâäãÞÈÑã,ÞÛ ÑÒÞÒÜÛÒ éÑ äã ,ÀâãêÒ. ×ÀÇÛÞâfl ëã,ÒÜÈ, ãêÜãâÛêÒÞÈÜã Ýãêãã,,ã ,âÒ ãÇÞâêÛ ÜÛÚÒ â~ÛêÞÛâÈ "ßfl,,ÝãØ" éÑãØ Û ÑßÒÜflÞÛâÈ ÜëÞÒß ,ÀâãêÀ, ,âÒ ãÇÞâêÛ ,À?Ò âããê,Òêâê,ÒÜÜã "ê,ÒãØ" Û ÑßÒÜflÞÛâÈ ßÝâÛßÞÈÜÀß ëã,ÜÒß ,ÀâãêÀ (Ûâ. 4). ñêÒß, ÛâäãÞÈÑëfl ,âêãÒÜÜë éëÜÝ^Û EnumFeatures "þÒßêãûÝÜ ùÜÞØÜ", ßÀ äãÞë~ÛÞÛ ßââÛ, äÞãÒØ ãÇÞâêÒØ ê,ÒãØ éÑÀ, ÛÑ Ýãêãã,,ã ââ~ÛêÞÛ ÛßÒêÀ ãßÒÜã,, , äÒäãÞãÚÒÜÛÛ, ~êã ãÜÛ âéÒÛ~ÒâÝÛÒ. øãâêãÛ, ,,Ûâêã,,ßßë ÑßÒã, ãßÒÜã, Û âêêÛâêÛ~ÒâÝë ÝÛ,ë ÜãßÞÈÜã,,ã âäÒÒÞÒÜÛfl, äãÞë~ÛÞÛ âÒÜÛØ ÑßÒ ãßÒÜã, Û Ò,,ã ÛâäÒâÛ d = 25 Á 10nm. ÔÜÞÛÑ ÞßÒÞÞflÜãØ âêëÝêëÀ øÛ ,Üãß âãÒÚÜÛÛ éÑ ÜÇÞÒêâfl ÞßÒÞÞflÜfl âêëÝêë ßÛÝãéÑã,ã,,ã ÑÒÞÒÜÛfl, äÒâê,Þflfl âãÇãØ ~ÒÒã,ÜÛÒ ÞÛÜÒØÜÀi ë~âêÝã,, âãâêãflÛi ÛÑ ÑÞÛ~ÜÀi ÇÞãÝã,. ù^ÒÜÛêÈ äÒÛã ÞßÒÞÞflÜãØ âêëÝêëÀ ßãÚÜã ,ëßfl âäãâãÇßÛ. øÒ,ÀØ ÑÝÞ~Òêâfl , äflßãß ÛÑßÒÒÜÛÛ. õãÚÜã ââßãêÒêÈ äãäÒÒ~ÜãÒ âÒ~ÒÜÛÒ, Û ââ~ÛêêÈ ÞÛÜë, äÛiãflëâfl Ü ãÛÜ äÒÛã. ×êããØ âäãâãÇ ÑÝÞ~Òêâfl , ÛâäãÞÈÑã,ÜÛÛ þëÈÒ äÒãÇ-

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H, nm 3.0 2.5 2.0 1.5 1.0 0.5 0 1.0 0.9 0.8 0.7 serpoint A/A0 0.6 0.5

úÛâ. 2. ñ,ÛâÛßãâêÈ ÝãÜêâê ãê âÛÞã,ã,,ã ,ãÑÒØâê,Ûfl.

Üß 1600 1200 800 400 0 0 800 1600 Üß 0 800 1600 Üß

úÛâ. 3. õãéãÞã,,ÛÛ äÞÒÜãÝ ûõÔû. áãßÒÜÜfl âêëÝêë (âÞÒ,) óßÒÞÞflÜfl âêëÝêë (âä,).

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þðñðôùÿðõð? øù×æúÿ÷ùûýð ð ñÔ?ðýÔ õÔýæúðÔóù× êãß 45 < 1 2009


õæýùá? Ô÷ÔóðñÔ Ôûõ-ðñùÕúÔìæ÷ðò ýù÷ôðÿ øóæ÷ùô Üß 240 180 120 60 0 0 60 120 180 240 Üß Üß 240 180 120 60 0 0 60 120 180 240 Üß Üß 240 180 120 60 16
3 8 19 2 1 14 9 4 6 15 10

3

0 17 0 60 120 180 240 Üß Üß 1.2 0.6 0

13 11 12 Total: 19

Üß 1.0 0.6 0.2 2800 2940 3000 3060 Üß
Line: 97 dX: 50.55 nm dY: 0.01724 nm

Üß 1.2 0.9 0.6 0.3 0

2800 2940 3000 3060

Üß

2800 2940 3000 3060

Üß

Line: 97 dX: 50.55 nm dY: - 0.146 nm

Line: 97 dX: 50.55 nm dY: 0 nm

úÛâ. 4. ðÞÞâê^Ûfl ßÒêã ÑÒÞÒÜÛfl ãÇÞâêÛ âÜÛßÝ Ü ,Ò éÑÀ.

Üß 1600 1200 800 400 0 Üß 2.4 1.8 1.2 0.6 0



Üß 1600 1200 800 400 0 Üß 1.6 0.8

Ç

0

400

800

1200

1600

Üß

0

400

800

1200

1600

Üß

200
dX: 44.29 Üß A: 2.188

400

600

800

Üß

0

200
dX: 44.29 Üß

400

600

800

Üß

dY: 0.06173 Üß R^2: 0.3331 SD: 0.5771

dY: 0.1321 Üß

B: - 0.001427

A: 0.214 B: - 0.0001496 R^2: 0.007885 SD: 0.4796

0.8 0.6 0.4 0.2 0

0.01 0.02 0.03 0.04 0.05 0.06 1/Üß
X: 44.91 Üß S: 0.971 Phase: - 80.56

0.8 0.6 0.4 0.2 0

0.01 0.02 0.03 0.04 0.05 0.06 1/Üß
X: 44.91 Üß S: 0.971 Phase: - 80.9

úÛâ. 5. óßÒÞÞflÜfl âêëÝêë () Û äãäÒÒ~ÜãÒ âÒ~ÒÜÛÒ (Ç) äã,ÒiÜãâêÛ.

Ñã,ÜÛfl. øãäÒÒ~ÜãÒ âÒ~ÒÜÛÒ äÒâê,ÞflÒê âãÇãØ äÒÛãÛ~ÒâÝÛØ âÛ,,ÜÞ. æ,,ã ÇÀâêë ãâ^ÛÞÞfl^Û ãÇÑëÒê äÒÛã ÞßÒÞÞflÜãØ âêëÝêëÀ, ßÒÞÒÜ-

Üë - ßÝãÒÞÈÒé. ýÝÛß ãÇÑãß, Ü þëÈÒ-ãÇÑÒ äÒÛãë ÞßÒÞÞflÜãØ âêëÝêëÀ ÇëÒê âããê,Òêâê,ã,êÈ ,,ßãÜÛÝ â äÒÛããß 45 Üß (Ûâ. 5).

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õÒÜÈ?ÛÝã, Û .

ùäÛâÜÜÀÒ , ÜÜãØ ÇãêÒ Þ,,ãÛêßÀ äãÑ,ãÞflê äãÞë~êÈ âêêÛâêÛ~ÒâÝÛÒ iÝêÒÛâêÛÝÛ ÛââÞÒëÒßÀi ßêÒÛÞã, äãâÒâê,ãß ãÇÇãêÝÛ ÇãÞÈ?Ûi ,ÀÇããÝ, ~êã äãÑ,ãÞflÒê ãäÛâÀ,êÈ ãÇÛÒ â,ãØâê, ÛââÞÒëÒßÀi ßêÒÛÞã,. ôãßÒ êã,,ã, Þ,,ãÛêßÀ ÜÞÛÑ Ôûõ-ÛÑãÇÚÒÜÛØ äÞÒÜãÝ ÇÞãÝ-âãäãÞÛßÒã,, äÒâê,ÞÒÜÜÀÒ , ÜÜãØ ÇãêÒ, fl,Þflêâfl ëÜÛ,ÒâÞÈÜÀßÛ Û ßã,,ëê ÇÀêÈ äÛßÒÜÒÜÀ Þfl ãÇÇãêÝÛ ÛÑãÇÚÒÜÛØ , ,êãßêÛ~ÒâÝãß ÒÚÛßÒ äÛ äãßãÛ äã,,ßßÜã,,ã ãÇÒâäÒ~ÒÜÛfl, ~êã äãÑ,ãÞÛê âÛÞÈÜã âãÝêÛêÈ ,Òßfl äãÞë~ÒÜÛfl âêêÛâêÛ~ÒâÝÛi iÝêÒÛâêÛÝ ÛââÞÒëÒßÀi ßêÒÛÞã,. ñÔôó??æ÷ðæ ýÝÛß ãÇÑãß ÑÇãêÜÀ Û äãÒßãÜâêÛã,ÜÀ Þ,,ãÛêßÀ ÜÞÛÑ âêëÝêëÀ äÞÒÜãÝ ÇÞãÝâãäãÞÛßÒã, äÛ äãßãÛ êãßÜã-âÛÞã,ãØ ßÛÝãâÝãäÛÛ. ùäÒÒÞÒÜÀ âÒÜÛØ ÑßÒ ãßÒÜã, äãÞÛâêÛãÞ ([øû] : [øõÔ] = 1 : 2), êÝÚÒ äÒÛã Þ-

ßÒÞÞflÜãØ âêëÝêëÀ ([øû] : [øõÔ] = 1 : 1) , äÞÒÜÝi êÛÇÞãÝ-âãäãÞÛßÒ äãÞÛâÛãÞ-äãÞÛßÒêÛÞÝÛÞê-äãÞÛâêÛãÞ. ûøðûùô óðýæúÔýüú?
1. Hayakawa T., Yokoyama H. // Langmuir. 2005. V. 21. P. 10288. 2. Ho R.-M., Tseng W.-H., Fan H.-W. et al. // Polymer. 2005. V. 46. P. 9362. 3. Bal M., Ursache A., Tuominen M.T. et al. // Appl. Phys. Lett. 2002. V. 81. P. 3479. 4. Darling S.B., Bader S.D. // J. Mater. Chem. 2005. V. 15. P. 4189. 5. Li X., Tian S., Ping Y. et al. // Langmuir. 2005. V. 21. P. 9393. 6. Jung J.-M., Kwon K.Y., Ha T.-H. et al. // Small. 2006. V. 2. P. 1010. 7. Cohen R.E. // Curr. Opin. Solid. State Mater. Sci. 1999. V. 4. P. 587. 8. Knoll A., Magerle R., Krausch G. // Macromolecules. 2001. V. 34. P. 4159.

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