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Alexander V. Tikhonravov, Tatiana V. Amotchkina, Michael K. Trubetskov, Robert J. Francis, Vesna Janicki, Jordi Sancho-Parramon, Hrvoje Zorc, and Vladimir Pervak, "Optical characterization and reverse engineering based on multiangle spectroscopy," Appl. Opt. 51, 245-254 (2012)
We perform characterization of thin films and reverse engineering of multilayer coatings on the basis of multiangle spectral photometric data provided by a new advanced spectrophotometer accessory. Experimental samples of single thin films and multilayer coatings are produced by magnetron sputtering and electron-beam evaporation. Reflectance and transmittance data at two polarization states are measured at incidence angles from 7 to 40 deg. We demonstrate that multiangle reflectance and transmittance data provide reliable characterization and reverse-engineering results.
Ключевые слова:
Reverse engineering, characterization, optical parameters
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