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21.09.2009
- . . . . . , . .


, - : «» CVD («»): 100 /,


( )

Atomic Layer Deposition (ALD) Atomic Layer Epitaxy (ALE)
("" CVD) ­ ~1 / «30 ALD", T.Suntola: http://www.sci.fi/~suntola/


-

: (-2), (M),
, B P -SIMS (Secondary Ion Mass Spectrometry = = -)

Mater. Sci. Eng. B 157 (2009) 6


-

:
- Solid Phase Epitaxy (SPE) = - ( ) ­ SiO2

O2



Surface Sci. 601 (2007) 2339



- NH4F+HF; HF


HCl + H2O2 ­

N2:

­
MgO, CeO2, Al2O3, ....


«»

BaTiO3

TiO2-terminated ( NH4F+HF)

Surface Sci. 601 (2007)1345


Frank-van der Merwe growth mode ( ) (lattice mismatch, crystallographic misfit): d1 (d1-d2)/d1



d2 J. Electrochem. Soc. 149 (2002) K47-K59


Stranski-Krastanov growth mode ( 3D 2D )

Volmer-Weber growth mode 3D

., // ., ,1986


Vapor-Liquid-Solid (VLS): MOCVD; - Au

InP Si(111), 300 ­ 375
() In, (In ­ ) +



Nano Lett 9 (2009) 2223


Vapor-Liquid-Solid (VLS): u Cu

Physica E 41 (2009) 963­965


­ ­

Surface Sci 601 (2007) 728


­



­ ( «»).

Phys. Rev. B 74 (2006) 153406


Adlayer enhanced surface diffusion (GaN): m.p. 2791 K, 1200 .

In

Ga N

Ga
N 0.5/1.3 Phys. Rev. Lett. 90 (2003) 056101


: ,

Ind. Eng. Chem. Res. 48 (2009) 3860


: ,

Surface & Coatings Technol. 202 (2008) 5659


: ()


2

J. Crystal Growth 310 (2008) 270


­

­ 25%!
Phys. Rev. B 78 (2008) 035305


:

800 20 : 0.23% 5%

17%

J. Crystal Growth 311 (2009) 2002


: «»

MgO(100) | Fe(100) | 2r0.6Fe0.4Al | AlOx 10 100 4

500

(Heusler alloys ­ ) ­ Fe o ­ Rolling-Assisted Biaxially Textured Substrate (RABiTS) ­ Ni,
57Fe

550

600

Appl. Phys. Lett. 92 (2008) 262501


Homopolymer ­ Co-polymer ­ Block co-polymers ­ : n ­ (polydispersity index, PDI) ­ c : - ( ) -


­ (TG) TG-DSC ­ ( )


Chemically amplified resist (CAR) Photoacid generator (PAG)

,

J. Fluorine Chem. 129 (2008) 607


PAG

­ - spin coating

Microelectronic Eng. 86 (2009) 796




- (nonbornene)

Macromolecules 36 (2003) 1534


: S-

193

+

Macromolecules 41 (2008) 5674


- : PS-b-PMMA ­ - (--) ( PS PMMA 1.5:1)

PS-b-PFS ­ - (--)

(Si,Fe)-

Thin Solid Films 517 (2009) 4474


< (10В120) K ­ («»)

. . 40 (1999) 312


// . , . (.). .: , 1979. ... . // : - , 2003.