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. ..
- . ..

XVII
( 29 31 2007 .)

2007

539.1.01.08 22.37. 29 ... : .. , .. ., .. , .. , ..

29

XVI / . . .. . .: , 2007. 178 . , .

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I 1 29 , , 1030 1200 .. ..

.
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.. , .. , .. , Y. Yamazaki, T. Ikeda, Y. Kanai, T. Kambara, Y. Iwai. . (15 ) .. , .. , .. . (15 ) .. , .. , .. , .. . . (15 )

19

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29 , , 1230 1400 .. 1. 2. 3. II

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3

.. , .. , .. . 240 .. , .. , .. . , .. , .. , .. . .. , .. . guiding .. , .. . .. , .. . .. , .. . .. , .. , .. . Zr-He .. , .. , . , . , . . U, Ni Be, C, Al, Ag, Au 40-200 / .. , .. . .. . .., ... .. , .. , .. , .. . .. , .. . .. , .. . 4

26 27 28 29 30 31 32 33

34 35 36

37 38 39

. .. , .. . .. , .. . .., ... .. . - .. . G. V. Kovalev. The metrics of natural coordinate system for channeling with a variable curvature and torsion G. V. Kovalev. The volume capture in structures with variable curvature .. , .. . . . , . . . Ar17+ .. , .. , .. , .. . 450 .. , .. , . . .. . II

40

41 42 43 44 45 46 47 48 49 50 51 52

I 29 , , 1500 1630 .. 1. .. , .. , .. , .. , .. . (15 )

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45

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59

60 61

62

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:
6

5. .. , .. , .. . (1 1 1 ) - (110) Si (15 ) 6. .. , .. , .. , .. . , (15 ) 7. .. . .. , .. . C.. , .. . C.. , .. . .. , .. . .. , .. , .. . . . . L- .. , . . . .. , .. , .. , .. , .. , .. , .. . , 5,7 , L .. .
7

65

66

67

68

69

70 71

72 73 74

75 76

.. , .. , .. . (100) (111) Si .. . .. , .. . A.. , .. , .. . , .. , .. , .. , .. , .. , .. . - 1.2 .. , .. , .. . .. , .. , .. . .. , .. , .. , .. , .. . III

77 78 79

80

81 82 83

84

, 30 , , 1000 - 11
30

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.. 1. .. , .. . , (001) Ni, (15 ) 2. ... Au c 38 (15 )
8

87 88

3. .. . Be, Al, Zr He+ Ar+ (15 ) 4. .. , .. , .. . (15 ) 5. .. . , (15 ) 1130 1215 30 , , 1215 14
00

89

90 91

II

.. 1. .. , .. , .. , ., .. , .. (15 ) 2. .., ... InP GaAs Ar+ (15 ) 3. .. . Al (15 ) 4. .. , .. (15 ) 5. .. , .. , .. . ZnO (15 ) 6. .. , .. , .. . ZnO (15 )

92 93 94

95 96 97

9

.. , .. , . . Ar G.V. Kornich, G. Betz. Energy distributions of sputtered atoms of surface metal nanoclusters by low energy ions .. . - Ni(110) .. , .. , .. , .. . Al-, Ti-, Fe-, Cu- Mo Ar+ .. , .. , .. , .. . .. , .. . .. , .. . .. , .. , .. , .. , .. , .. , .. . 30 .. , .. , .. , .. , .. , .. , .. . .. , .. , .. , .. . - .. , .. , .. , .. , .. . .. , .. . «» .. , .. . .
10

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101

102 103 104 105

106 107 108 109 110

IV 30 , , 1500 16
30

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.. 1.
.. , .. , .. , . . . In Sb, -- (15 )

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2.

3.

4. 5.

.. , .. , .. , .. . (15 ) .. , .. , .. , .. , .. , .. . IV III , (15 ) .. , .. . GaAs p-n- .. , .. , .. , .. , .. , .. . , (15 )

114

115 116

117

1630 1715 - . 30 , , 1715 18 1. 2. 3.
15

II

.. .. , .. . Ba1-xSrx TiO3/Si (100) (15 ) .. , .. . (15 ) .. , .. , .. , .. , .. . (15 )
11

118 119

120

4. 5.

.. -, .. , .. . Al-Fe (15 ) .. , .. , .. , .. , .. , .. , .. , .. , .. . . (15 )

121

122

.. , .. , .. , .. , .. , .. , .. . .. , .. , .. , . . .. , .. , .. , .. . - , .. , .. . C .. , .. , .. , .. , .. , .. , .. , .. , .. . - .. , .. , .. , .. , .. , .. , .. , .. . Al-Al2O3 .. , .. , .. . Ti-B-C .. , .. , .. . ,
12

123

124

125 126

127

128 129 130

.. , .. , .. , .. . . . .. , .. , .. , .. , .. , .. , .. . .. , .. , .. , .. , .. , .. . .. , .. , .. , .. , .. , .. . c - .. , .. , .. . - .. , .. , .. , .. , .. , .. , .. , .. , .. . «» .. , .. , M. Voelskow. --- 31 , , 1000 11
30

131

132 133

134 135

136

137

I

.. 1. .. , .. , .. , .. . (20 ) 2. .. , .. , .. , .. . 3. .. , .. , .. , .. . 121810 (15 ) 4. .. , .. , .. , .. , .. , .. , .. . - Al, Fe, Mo, Y ZrO2 (15 )
13

138 139 140

141

5. .. , .. . (15 ) 1130 1215 . 31 , , 1215 14
00

142

II

.. 1. .. , .. , .. Y. Pei, D. Vainshtein, J.Th.M. De Hosson. - nc-TiC/a-C:H(15 ) 2. .. , .. , .. . « » (15 ) .. , .. , .. . .. , .. , .. . , ( 20 ) 3. .. , .. , .. . - (15 ) 4. .. , .. , .. , .. . Fe-Cr .. , .. , .. , .. , .. . - Al2O3 a-Si/Al2O3 .. , .. , .. , .. .

143

144 145

146

147

148

149

150

14

.. , .. , .. , .. , . . , .. . 151 .. , .. , .. . - - .. , .. . .. , .. , .. , V. Ovchinnikov. .. , .. , .. . .. , .. , .. , .. . , - .., ... .. , ... - .. , .. , .. , ., .. . MgO .. , .. , .. , . . CoSi2/CaF2/GaAs C.. , .. , .. , .. , .. . SiC, NiSb, ZnO Cu .. , .. , .. , .. , .. , .. . ,
15

152 153 154 155

156 157 158 159 160

161

162

.. , .. , .. , .. . .. , .. , .. , .. . - .. , .. , .. , .. , .. . , , .. , .. , .. . , .. , .. , .. , .. , .. , ... -MEIS .. , .. , .. . « »

163

164

165

166 167

168 169

16

I.

17

18

.. 1), .. 1), .. 2), T. Ikeda3), Y. Kanai3), T. Kambara3), Y. Iwai3) Y. Yamazaki3) 1) , , 2) , , 3) Atomic Physics Laboratory, RIKEN, Japan double guiding , 0,1 . , . double guiding , , .. . , . . , , , , , . , , , . . . , , double guiding . INTAS 061000012-8972.

19

.. , .. , .. . , . , . , , . . chan 0, , chan0 (, ). A(z), au Achan(nonopt) Achan(z) zopt Achan(opt) . A0 z/zopt , 0 1 2 3 4 , , Achan(z) (.. ) A0(z). A0(z) , . zopt, Achan(zopt)=0, , , .. (, , ). : HeH+ H2+, , , .

20

.. 1), .. 2), .. 2), .. 1) 1) , , 2) , . , , , , . , , . - . : Ti-H, Ni-H Pd-H. , , -. -. , (), (, ). - (q,) Im[--1(q,)] Pd-H. Pd , 2,5 7,5 . , , 2.7 3.5 . , (E ~ 1010 /) (L ~ 10-10 ) . , .. , . , . , , , .
21

- .. - , -, , , , . , . , , , . , ( ), , , , ( ) . , , , . , , . , .. , . . .

22

.. , . --, , , , . , , , . , /1/. , , , « » , 2 v > Z 2 e ( Z 2 - ). . * ( Z1 (v ) > Z 2 ). . , , . , . ( ) . . . , , , . , , 2 20 /n. 1. Faulkner R.A. //Phys. Rev. 1968. V.175, P.991.
23

.. , .. , .. , . , , , /1-3/. [4-5], , , (), , [6]. . , ( ). , 4 h, P0. . , (4 = 17900 ) P0/h, , Sm1.2Lu1.8Fe5O12 (4 = 1700 , h = 5.88 , P0/h = 0.5). =0.5°. . . (E)=k/En, k n . (>1°) 700 ( h = 0.41 , P0/h = 0.5) 100 ( h = 1 , P0/h = 10), - 1100. 1. 2. 3. 4. 5. 6. .., .. // , 1992. . 162, 9, . 2. .., .., .. // , 1982. .8, .16, . 970. .., .., .. // , 1991. .4, 8, .1521. .., .. // .XV . . 2001. ., 2001, .204. .. // . .230. .., .. .-.:,1980.-256.

24

1)

.. 1), .. 2) , . , 2) , . ,

. , , ( , . /1/). , . ( ) I (k ) K (k ) km ( , , z ) = Ceikz + im (a - ) m + ( - a ) m , I m (ka) K m (ka ) (., , /2/), k , z , m=0, ±1,.. , a . ' ' K m (ka) / K m (ka) = (k , ) I m (ka ) / I m (ka) , (k , ) - - ( ). , , , , , . 1. 2. Tomanek D. and Enbody R.J.. Science and Application of Nanotubes. - New York, Boston, Dordrecht, London, Moscow: Kluwer, 2002, p. 399 . . .: , 1978, .102.

25

240 .. , .. , .. « . .. » , . , -2 . /1/. 240 , () 0,5 65, 178 0,2 250 10-12 5·10-12 0,20є + 0,20є. , , . , 65 , . 178 , , , , . , 250 . 1. Lagutin A.E., Boyko E.B., Kamyshan A.S., Komarov F.F. // XX Russian Conference on Charged Particle Accelerators: Novosibirsk, Russia. - 2006. - http: // rupac2006.inp.nsk.su.

26

, .. , .. , .. , . , , . [1]. , . . , . , , . . ( 05-0216512). 1. .., .., .., // , , 2005, 3, . 83-87

27

.. , .. , .. , , , , - . /1/. , . . I,i+1 I,i-1 I 2.7, 4, 6 8108 / (2, , N2, Ne, Ar).
i,i+
5 4
8

1

i,
12

i-1

(a)

01

10

32

43 54

()

3

12
2 1 0

6 4

21 0 1
2 3 4 5 6 7 8

23
2

45
2 3 4 5 6

34
7 8
0

V, 108/

V, 108 /

. 1. () () 8108 / , i=0-5.

/2/ , , . 1. Pinho A.//Brazilian J. of Phys., 1993, V.23, 3, P. 219 2. .., ..// ....,2004,.68,3,.367

28

GUIDING .. , .. , , , , , . , . . , , , . , [1] . . , , , , . . INTAS 06-10000128972. 1. N. Stolterfoht, J.-H. Bremer, et al. //Phys.Rev.Lett. 2002. V.88. P.133201-

29

.. , .. , . --, /1,2/. : fQ (p, z ) / z = W (p ) f (p , z ) - W (p ) f (p , z ) +
c c Q + 1, Q l -1, Q Q +1 Q , Q -1 l , Q +1 Q

WQ

(p ) f

Q -1

(p , z ) - WQ

(p ) fQ (p , z ).

Y , 177 . , , , . , . , /3/ ( «») ( «»). , . , «» : l c fQ +1 (p, zC )/ fQ (p, zC ) = WQ ,Q +1 (p )/ WQ +1, Q (p ) . , ( ) . 1. 2. 3. Malyshevsky V.S.// Phys. Rev. 2005, v.B 72, p.094109. .., ..// , 2007,4, .1. Schubert M., et.al.// Nucl. Instr. And Meth. 2003, v.B 209, p. 224.

30

.. , .. , . --, . , , , . , , .. mB >> m A >> me , . - A + ( B + e ) B + ( A + e ) B A :

T = drA dre
(c) '

PA (A+e), R A = ( m ArA + me re ) /( mA + me ) . , , , . , .. , VAB (rA ) = 0 , - /1,2/. , ( ( A + e) + B ( B + e) + A ), : T = drA dre
(l )

e

' i ( p ArA - PA R A )

A (re - rA ) [VAe (re - rA ) + VAB (rA ) ] B (re ) ,
*

e

- i ( p'ArA - PA R A )

B (re ) [VBe (re ) + VAB (rA ) ] A (re - rA ) .
*

() . 1. 2. Brikmann H.C., Kramers H.A.// K. Wet. Amst. 1930, v.33, p.973. ., . . .: , 1951.

31

1)

.. 1), .. 2) , . , 2) , . --,

. /1-3/. /4/ , , «» «» , . . /5/. . /6/. . : , . . , «» «» . ( 06-08-00245) 1. 2. 3. 4. 5. 6. Betz H.D. //Rev. Mod. Phys. 44, 465, 1972. Shima K., Kuno N., Yamanouchi M. // Phys. Rev. A 40, 3557, 1987. Shima K., Kuno N., Yamanouchi M., Tawara H. // Atomic Data and Nuclear Data Tables 51, 173, 1992. Assmann W. Et. Al.// Phys. Rev. Lett. 83, 1759, 1999. .. // , 1959, . 36, . 1517 Andersen J.U., Gruner F., Ryabov V.A., Uguzzoni A. // Nucl. Instr. And Meth. In Phys. Res. B 193, 118, 2002.
32

7.

Zr-He .. 1),2) , .. 2), .. 2) , . , 2) , . ,

1)

. He, . . Zr He. Zr, Zr-He. /1/ Zr-He Zr : , . , , He Zr . . , He, , Zr. , He . . , He Zr , , ( -). , He Zr , Zr-He. , He . 1. Hohenberg P., hn W. // Phys. Rev.1964. V.B136, P.864.
33

U, Ni Be, C, Al, Ag, Au 40-200 / .. 1), .. 1), . 2), . 2), . 2) 1) , . , 2) , , , (, FRS GSI, ) () e, . . , , 40 200 /, , . 59 238 28 Ni , 92 U Be, C, Al, Ag Au Z 2 p 2 q meaan . : a, , , -, . /1-5/ 1%. , 2%, 1%. , . 1. 2. 3. 4. 5. Gauvin H, Bimbot R., Herault J., Kubica B. // Nucl. Instr. And Meth. 1990. B 47. 339-350. Maier M. // Ph.D. Thesis, University of Giessen, 2004. KnЖbel R. // Thesis, University of Giessen, 2004. Shima K., Kuno N., Yamanouchi Y., Tawara H. // At. Data Nucl. Data Tables. 1992. 51. 173-241. Weick H. // Ph.D. Thesis, University of Giessen, 2000.

34

..
1) 1) 2) 3)

, ..

2)

, . , 2) , . , 3) , . ,

(Ps) . Ps [1]. Ps [2-4] Ps [5]. Ps [6-9]. , , . . +- . [1-4] +- ( 3) .. Ps . Ps . . Ps , Ps . 1. 2. 3. 4. 5. 6. 7. 8. 9. G.V. Meledin, V.G. Serbo and A.K. Slivkov, JETP Lett. 13, 1971, 68 H.A. Olsen, Phys.Rev.D. 33, 1986, 2033. V.L. Lyuboshits, Yad.Fiz. 45, 1987, 682. E. Holvik, H.A. Olsen, Phys.Rev.D. 35, 1987 2124. V.M. Kolomiets, S.N. Fedotkin, Yad.Fiz. 56, 1993, 92. Yu.P. Kunashenko, Yu.L. Pivovarov, Yad.Fiz. 51, 1990, 627. G.I. Sandnes, H.A. Olsen, Phys.Rev.A 48, 1993, 3725. Yu.L.Pivovarov, Yu.P.Kunashenko, I.Endo, T.Isshiki, NIM B 145, 1998, 80. Yu.P. Kunashenko, NIM B 229, 2005, 219.

35

.. , . , , . , , ( ). . [1-3], . . , . 1. 2. 1. Kunashenko Yu. And Olsen H. A..//Theoretical Physics Seminar in Trondheim, Preprint No 18, 1994, p. 1-12. Olsen Haakon A. and Kunashenko Yu.P.// Phys.Rev.A, v. 56, n. 1, p. 527-537, 1997. .., Olsen H.A.// , 6 (1996) 20-25.

36

1) 2)

..1), ..2) () , . , , . ,

, , /1/. . . , /2/, . , , , . 1. 2. .. .. // , 2005, 4, c.14. .-. . .: . 1985, . 277

37

.. 1), .. 2), .. 3), .. 1) , . , 2) , . , 3) , . ,
3)

, , . , , . , . , . , 1 . , , , . , , /1/, , , , . , . , , , . , 1 .. (, ), 1 .., , . 10 .., 10.5 .. 1. .., ...//, 2004. 4 , .39.

38

1)

.. 1), .. 2) , , 2) , ,

, /1,2/ . , . , (Ez2) (Ez3) : 2 Ze2 2 e 2 ; 3Ze 2 3 3e 2 3 .
Ez 2 =-

+ 2+ + 2 + 2+ + EZ 3 =- r r RR r r R R2 . (.1) (1), (2), (3) (4) , -

, ( 0.75 /3/). , . , .2 : 1 , 2 300. , . , . . 1. .., .. // , 2003, 5, .59. 2. .., ..// , 2006, 5 ,.55. 3. Lykke K.R, Murray K.K, Lineberger W.C. // Phys. Rev. A, 1991, Vol. 43, No. 11, pp. 6104-6107.
39

.. , .. . ., , . , . , Eopt ( , , ). - (1-10 ) : Q = Qdt /de 10-2. [1,2] , () LiD dt(dd) de 10-100 . . - . . ( ) . , (E) = 0(E)D(E) «» 0(E) = S(E)/E D(E)<<1. , E, D(E)=1, (E) = 0(E) = S(E)/E. , O16 + O16 = S32 + Q=26 O+ Eopt 2E 2 . S- (SO16,O16 1028 *) , 1/n(Eopt) . , Q=Q/Eopt>10. 1. .., .. // , .7, 16, 1981, .981. 2. .., .. //, . 53, 9, 1983, . 1861.

40

- .., .. ., . , , . . , - , . , , . , . [1,2] , - ( ). , , , . - , «» . . , . - . «» ( , [3]) (, ). 1. 2. 3. .., ..//, 2006, 3, C. 93-97. .., .., ..//, 2006, 3, C. 98-107. Durnin J., Miceli J.J., Eberly J.H. Diffraction-free beams. // Physical Review Letters, 58. 1987. P. 1499-1501.

41

.. , .. . , . , . --, [1]. - . (, AH + , B + - B .. [2]). . : ( , ), . - . ( , 60 [3]) , ( ). 1. 2. 3. .., .. // , 1997, 6, . 11 13. .. . . , 1983, . 152 .. . . .: , 2001, . 148

42

.., .. ., . , - () . - , . . , : , ( ) ( ), , . , --. - (K+, Li+, Ca+, Mg+), . , . , : , . , . .

43

- .. , . , , : -
2

, -

- . [1]. , = h Mv , ( ) , v . , NaCl (., , [2]), - ( , ) , . - (, ): , ( ) , , . . , , (. [2]), , , , , . . 1. 2. .. . .: , 1988. . 512 .. // , 2005, 4, . 72.

44

.. . .. « - , . , - , . , . , , . , . .

45

THE METRICS OF NATURAL COORDINATE SYSTEM FOR CHANNELING WITH A VARIABLE CURVATURE AND TORSION G. V. Kovalev School of Mathematics, University of Minnesota, Minneapolis, MN 55455, USA In the deformed crystals as well as in the accelerator's designs, it is convenient to use a `natural' coordinate system where the centre line of a deformed crystal potential or reference orbit of a beam is selected as principal curvilinear axis with length s along it (`natural' parameter) and two other axes (m, l) are transverse displacement from it: r = s t - m n( s ) - l b ( s ), | n |=| b |=| t |= 1. It is convenient to choose n, b along the direction of curvature and torsion of curved line of atomic row. This frame is used in 3-D curve theory. The orientation of unit vectors t , n , b varies as `natural' parameter s increases and they are defined from well known Frenet-Serret system: dt d s = ( s ) n , d n d s = - ( s ) t - ( s )b , d b d s = ( s ) n . Here (s ), (s ) are the curvature and torsion of the reference orbit. These equations give the most general expression for square of metric length in `natural' coordinate system.
dr
2

= (( 1 + m ( s ))2 + ( s )2 ( m 2 + l 2 ))( ds )2 + ( dm )2 + ( dl )2 +

+2 (s)( m dl - l dm ) ds . It contains the metric tensor, which is key tool for description the channeling particles in potential with variable curvature and torsion:

clear that the planar channeling does not cover all variety of cases of distorted potentials. For example, in the axial channeling the distorted axes can be twisted with constant or variable torsion and calculations should involve the metric element considered here. REFERENCES 1. 1. Ellison, J. A., in the book //Relativistic Channeling. Plenum, New York, 1987, Editors R. A. Carrigan and J. A. Ellison, p.79--88. Chun-xi Wong and Lee C. Teng, //Proceeding of the 2001 Particle Accelerator Conference, IEEE vol.1, Chicago, IL, p. 456-458.
46

g i, j 1 0 . 0 1 The well known case is the plane channeling where the torsion = 0 and the 2 2 2 2 2 metric is dr = ( 1 + m ( s )) ( ds ) + (dm ) + (dl ) (see e.g. /1/,/2/). It is
2

( 1 + m (s ))2 + ( m 2 + l 2 ) (s ) -l ( s ) = m ( s )

-l (s )

m ( s )

THE VOLUME CAPTURE IN STRUCTURES WITH VARIABLE CURVATURE G. V. Kovalev School of Mathematics, University of Minnesota, Minneapolis, MN 55455, USA The volume capture, as a pure classical effect, becomes possible due to curvature variation (`gradient capture') which was pointed out in the computer simulation /1/ and discussed in 80th 90th (see e.g./2/). The simple illustration of this is shown below where the right side of the curve y=Y(x) is occupied by negative potential U1 and a relativistic particle crosses the potential boundary at the angles 0 and 2 to the tangent lines. The tangent continuity of a particle's momentum gives the relation: +sin2 0 , sin2 =(1+)sin2 2 - , (1) sin2 = 3 1 +1 2 E| U1 | where the = 2 , ( U1 < 0 ) is the square of E - m2c 4 Lindhard's angle. When the curvature of boundary is constant, 1 = 2 , and (1) gives 0 =3 . Here is no volume capture. When the curvature continuously decreases the following condition can satisfy sin 2 2 . (2) That means that 3 ->0 and when 3 =0 particle is reflected from inner surface of boundary. This is the case of true volume capture. The angle 2 is connected with the curvature of boundary by equation:
2 = (s)ds - 1 . (3)
0 s
B

Substituting (3) in (2) and expanding sin 2 2 , the second condition (2) can be written as sB 2 E| U1 | (2a) (s )ds -1 E 2 - m2 c 4 . 0 Here, the right side is the Lindhard's angle. The equations (1) and (2a) contain some restrictions on behavior of curvature between two points A and B for different types of surfaces and give some important consequences.
2

2

REFERENCES 1. 2. Mannami M. et al. //Nucl. Instrum.. Meth. B33, 62, 1988. Taratin A. M. //Phys. Particles Nuclei,v29, N5, p. 437-462, 1998
47

.. , .. , , , . , , . , . .. , () , () . . . , . . , . , . , , . .. . . . (Vion, Zat) .

48

Ar17+ . . , . . , . , () () . , (RCE). ( ) (., , /1/ ). , RCE /2,3/. /4/, . - -. Ar17+ (390 /) (220) ( /2/). RCE , , - . 3. Okorokov. V. V. // . Proceedings of the 8-th Japan-Russia International Symposium on Interaction of Fast Charged Particles with Solids, Kyoto, Japan, 24-30 November 2002, Quantum Science and Engineering Center, Kyoto University, 2003 Azuma T., Ito T. et al. // Physica Scripta, 2001, T92, 61-64 Azuma T., Muranaka T., et al. // . Proceedings of the 8-th JapanRussia International Symposium on Interaction of Fast Charged Particles with Solids, Kyoto, Japan, 24-30 November 2002, Quantum Science and Engineering Center, Kyoto University, 2003 Pivovarov Yu.L. // Nucl. Instrum. And Meth. In Phys. Res. B145, 1998, 96-101
49

3. 3.

4.

450 .. , .. , .. , .. , . , /1/ .

2.4 . , I ( ) . ( ) , x/ax ; /2/, /3/. , - . PST STE, - . 1. 2. 3. Baurichter A., Biino C., ClИment M. et al. Channeling of high-energy particles in bent crystals Experiments at the CERN SPS // Nucl.Instr.Meth. in Phys.Res. B164-165. 2000. p.27-43. .., .. // . 1985, .55, .8, .1598-1604. Ivanov Yu.M., Petrunin A.A. et al. Volume reflection of a proton beam in a bent crystal //Physical Review Letters. 2006, PRL 97, 144801 p.1-4.
50

.. , .. , . , . , , . , -. /1/: (1) = m ( x 2 + y 2 ) D( x, y ), dt D( x, y ) -- , x y

d ( E

)

2

mx = -U x (x, y ) , my = -U y (x, y )

(2)

U , U = U ( x, y ) -- m -- , U x = x dx . , x = dt (2) () (1) ,

(E )2

2 Vmax 25 10

-4

,

Vmax -- . 1. .., .., // , 1998, 5, 5.

51

.. . . , , [1] , , NaCl . , , () m p . , , , [2]. U (x ) = - U 0 ch 2 (x b ) , :

En = - (s - n

)2

2

2m p b 2 ,
2 .
p

n = 0,1,..., [s ] , s = - 1 + 1 + 8m p b 2U 0 2 m p = E0 c 2 = s 2 2 2 m
me = E[s ] c 2 = {s}2
2

b 2c

2
2

2m p b 2 c

m = E[s ]-1 c 2 = ({s} + 1)2 2 2m p b 2 c 2 [s ], {s}, b ( m e , m -

). , - E [s ]- 4 , .., ,

({} s

+2

)2

2

2m p b 2 c 2

({s} + 3)

2

2

2m p b 2 c 2 ,

- . . 1. 2. .. // , 2005, 4, . 72. .. . .: , 1988, . 512

52

II

53

54

.. , .. , .. , .. , .. , , . , () . , ., , /1,2 / , , . - () /3/. , (1-3 ), . (3.5-4 ), c=0.8 , m= 1 45 ~33 . , . , , . . . 50%. ( 05-02-17648), « », 3, 3.1 . 1. 2. 3. .. //. «». 1998. .41, 4, .26-31. .. . : , 2006. 201. .. . // «», 2001, .44, 3, .53-65.
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.. , .. - , , (), , ( ) /1/ , , ( 100 ) /2,3/. /1/, , -2 E . , E > 100 , /2/ = -( / E )[ - U (r )] (1) - , r , U (r ) - (). , . . , (1) () , . , (1) E (150 В 240) , , . . , /5/. , E . E > 500 . 1. 2. 3. 4. 5. .., .. . ., , 1987, 272 . Uggerhoj U.I. // Rev. Mod. Phys., 2005, V.77, No.4, P.1131. Baurichter A., Kirsebom K., Kononets Yu. V. et. Al. // Phys. Rev. Lett., 1997, V.79, P. 3415. .. // , 1993, . 103, . 1723. Khokonov M.Kh., Nitta H.// Phys. Rev. Lett., 2002, V.89, No.9, 094801.
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1)

, . 7 , , . . . . -. , , . , , ( ). , . , , . , , , .

58

, .. 1), .. 1), .. 1), .. 2), .. 2), .. 3), .. 3)
1)

, . , 2) , . , 3) Adelphi Technology Inc., San Carlos, USA

(4-15 ), . , . , 300400 W B4C 1.236nm, 1.486 nm 1.8 nm. Si 4-20 . 15 , 20 33 . , RUP2-581-TO-05.

59

.. 1), .. 1), .. 1), .. 2), .. 2), .. 3), .. 3) , . , 2) , . , 3) Adelphi Technology Inc., San Carlos, USA

1)

/1,2/. , , . -35 10-33 . -, Ta-CTa , . TaC-Ta, 1000, 500 1000A, . -20<<20 . /3/. , 04-02-17580. 1. 2. 3. Pfeiffer and T. Salditt, P. Hoghoj and I. Anderson, N. Schell, //,Physical Review B, 2000, V62, 24, p 16939 A. Jarre and T. Salditta, T. Panzner and U. Pietsch, F. Pfeiffer, //, Applied Physics Letters, V85, 2, p.161 V.V.Kaplin , V.V.Sohoreva, S.R.Uglov , O.F.Bulaev, A.A.Voronin, M.Piestrup, C.Gary, //arXiv.org/physics/0605051

60

. . , . . , . . - ( ), , () -. lm lv . 1 1 , p , - - , p = 4 ZNe 2 m .
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1, 1

p
lv = ( v ) 2 +

lv

-2

(

-2

)

-1

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(

+

2 p

2

)

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, 5,7 , L .. 1), .. 1), .. 2), .. 2), .. 3), .. 1), .. 1) 1) , . , , . , 3) , . ,

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Au C 38 .. .- , -, /1-2/ Au ( 38 ) ( 2 18 ). , ( ) (D) (Rp). , ~5% ( ) , , . , . . " " ( "" ). , ( ) . " " /3-5/, ( ) . . 1. 2. 3. 4. 5. Zhurkin E.E., Kolesnikov A.S. // Nucl. Instr. And Meth. 2003 V.B202 P.296. .., .., ... // , 2005, 3 . 51 Baranov I.A. et al. // Nucl. Instr. And Meth. 2002 V. B193 P.809. Baranov I.A. et al. // Nucl. Instr. And Meth 2006 V. B245 P.184. Baranov I.A. et al. // Proc. Int. Conf. "Desorption 2006", September 37/ 2006 Athens, Greece, Book of Abstracts, P01.
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.1. BeO- Be- , Al: 10 , He+ + Ar+ 89

.. , .. , .. , , . , . , . . , . SCATTER /1/. TRYDIN /2/, , . . 30% . . , , 5 1 7·1016 -2, 30% , 1.25 . 1. 2. 3. .., .. // , « ». 2002, 3-4, . 76. Moller W., Eckstein W. // Nucl. Instrum. Meth. Vol. B2, 1984. P. 814. R. Behrisch, G. Federici, A. Kukushkin, D. Reiter // J. Nucl. Mater. 313316 (2003) 388.

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.. 1), .. 1), .. 1), .2), .. 1), .2) 1) - , , 2) , , . «» , , , , , . . -8 CFC N11 . -8 , , . CFC N11 , . 200-250 , 1018 1021 D+/2. - . . . . , , . 5-15 , 100 , . , - , . . . , . , , , . .

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, [1-3]. [2] - . . InP GaAs 50 300° Ar+ 0,2 9 0,1 /2. [2] , . , . 10-20°. , . , GaAs (100) InP (100) Ar+ 5 0,95*1014 /2 ( 0,43 /2) 290 240°, . - [4]. 1. 2. 3.
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J.B.Malherbe Crit. Rev. in Solid State and Mat. Sci. 19(3) (1994), 127 .. . .., 70(6), (2006) 813-816. O.Wada, J.Phys.D, 17, (1984), 2429 V.G.Dubrovskii, G.E.Cirlin, I.P.Soshnikov, A.A.Tonkikh, N.V.Sibirev, V.M.Ustinov Phys.Rev. B 71 (20) (2005) Art. No. 205325
93

AL .. , . , Be Training Ltd, /1/ - Al(001) E 0 250 1500 . , /2-3/ . /4/ . , . .1.

L2 , 3 VV

( ) ..
2 1 0 0

1

31

45

59

90

120

2

(.)

(1)- (2)-

.1.

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1. Allie G. Blanc E., Dufayard D.,Stern R. // Surface Science 1974. v.46, p.188. 2. Andersen S., Howie A. // Surface Science 1975. v.50, p.197. 3. Place J., Prutton M. // Surface Science 1979. v. 82, p.315. 4. .. // - . .: - , 2003, .58.
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.. 1) , .. 2) , . , , . ,
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- () , , SiO2 SiOX . ( Cameca ims-4f) , , . . SinOm+ (n = 1,2,3; m = 0,1,2), OH+, SiH+ SiOH+, Si+, O+, H+ . SiO2. - , /14/. 1 , .. . , , /2/. . . . , - , «» . , , . . 1. Richards R. //Mineralogical Magazine. 2003. V.67. P.129.
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ZnO
1)

.. 1), .. 1), .. 2) .- , -, 2) LLNL, Livermore, USA

ZnO, P+, PFn+ (n = 1...4) E = 1.3 / .... , , , , . (RBS/C). , P+ , . ZnO . , (PF4+) . ZnO , /1/. , , , , , , . , ZnO /1/. , ZnO. 06-08-00989 1. S.O. Kucheyev, J.S. Williams, C. Jagadish, J. Zou, Cheryl Evans, A. J. Nelson, and A. V. Hamza // Phys. Rev B 2003, v. 67, p 094115
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97

- Ar .. 1), .. 1), . 2) , . , 2) Inst. Fr Allgemeine Physik, Technische UniversitДt Wien, Wien, Austria

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/1/ . 4050 3600 , . , /2/, 4320 . . . /3/ --, , . 500 . . 1.30 /, 2.25 /, 0.28 /. , 0.05 /. , . . Beardmore K., Smith R., Nucl. Instr. And Meth. In Phys. Res. B 102, 1995, . 223-227 2. de Wijs G.A. et al., Synthetic Metals, 139, 2003, . 109-114 3. D.W. Brenner, Phys. Rev., B 42, 1990,. 9458
98

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ENERGY DISTRIBUTIONS OF SPUTTERED ATOMS OF SURFACE METAL NANOCLUSTERS BY LOW ENERGY IONS G.V.Kornich1), G.Betz2) Zaporozhye National Technical University, Zaporozhye, Ukraine Institut fur Allgemeine Physik, Technische Universitat Wien, Wien, Austria
1)

2)

An increase of activity of experimental and model researches of physical processes in nanodimensional clusters on different surfaces occurred during the last decade. Molecular dynamics simulations were performed for alone clusters, consisting of 13 and 75 Cu atoms, on a (0 0 0 1) graphite twolayer substrate, which consisted of 1584 and 3000 carbon atoms, respectively. Bombardment was simulated for Ar and Xe ions at impact energies of 100 eV and 400 eV as well as normal incidence. Energy distributions of sputtered particles from surface nanoclusters were qualitatively compared here with energy distributions of the linear cascade theory /1, 2/ for the flat surface of semi-infinite targets. The Tersoff potential with a cut-off radius of RI cf = 0.21 nm, splined to the Ziegler-Biersack-Littmark potential, was applied to the C-C interactions. A tight binding many body potential, directly connected to the Born-Mayer potential with a cut-off radius of R(Cu) cf = 0.55 nm, was used for the Cu-Cu interatomic interactions /3/. CCu interactions were simulated using a Lennard-Jones potential /4/ with R(Cu-C) cf = 0.375 nm. The CCu potential was splined to the Ziegler-Biersack-Littmark potential. Ion-Cu and ion-C interactions were simulated using only the purely repulsive Ziegler-BiersackLittmark potential with R(ion-target) cf = 0.5 nm. Details of the preparation of the substrate Cu cluster system are presented in /5/. From the simulations we found that the maxima of the energy distributions were for both cluster sizes under Ar bombardment and for larger cluster under Xe bombardment close to 2 eV, which agrees well with the theoretical prediction of UB/2, usually taken to be equal to 3.6 eV, the heat of sublimation of Cu /1, 2/. Only in the case of Xe bombardment for small clusters, there is strong indication that the maximum of the energy distribution has shifted close to 0 eV. Also the contribution of low energy sputtered Cu atoms to the energy distribution is more considerable in larger clusters as compared to small ones. REFERENCES 1. 2. 3. 4. 5. Thompson M.W., Phil. Mag., 18, 1968, . 377. Sigmund P., Phys. Rev., 184, 1969, . 383. Gades H., Urbassek H.M., Nucl. Instr. And Meth., B69, 1992 . 232. Dorfman S., Mundim K.C., D.Fuks, A.Berner, D.E.Ellis, J.Van Humbeeck, Mat. Sci. and Eng. C15, 2001, . 191. Kornich G.V., Betz G., Zaporojtchenko V., K.V.Pugina, Surf. Sci. 601, 2007, . 209.
99

- NI(110) .. , . , Be Training Ltd, , - /1-2/. /3/ L3 VV - Ni(110) 0=150. =85,5° (110). /4/. /4/ /3/. .1. L 3 VV (..)
2 1,5 1 0,5 0 0 0,8 1,25 2,4 3 5 6,33 8

(.)

.
.1.

L3 VV

( = 8 ) = 5,54 * 10

-2

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Al-, Ti-, Fe-, CuMo- Ar+ .. , .. , .. , .. - ( ), , , , . Sp() . Be, Al, Ti, Fe, Cu, Mo, W. Ar+ ( = E/ = 10 45 %, E ) = 5, 10 20 , 30 50 , 50 100, 1в10-6 . , Sp() Fe Cu = E/ = 10 40 % 40 45, W (.1). : 06-0808180-

.1. Sp() Be, Cu, W Ar+ = 10 , = 10 45 %

101

.. , .. , .. , .. , . , , , , /1/. . /2/, /1,3/. - . Cu3Au(100), GaP(100), GaAs(100) SiC(100) . (), , . Cu3Au(100) Ne+ E= 5 = 100, , - 0.7 -. , Cu 0.6 Au 0.5 - 0.4 - 0.3 . - 0.2 0.1 - 0.0 <110> <010> <100> 0 30 60 90 ( ) Cu3Au(100).
0

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.. , .. , , . /1/: , , .. , , . , , /2/ /3/ . /4/. . . , , . , /5/. , , , . . . 1. 2. 3. 4. 5. Waldeer K.T., Urbassek H.M.//Nucl. Instr. And Meth. 1987. V. B18. P. 518. .. // , 1943. .13, .323 . . .: , 1956. 431 . .. //, 2005. .75, .4, .11. Williams M.M.R.// Ann. Of Nucl. Energy. 1979. V.6. P.145.

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30 .. 1), .. 1), .. 2), .. 1), .. 1), .. 1), .. 2) 1) , , 2) «», , . , , . , . , -850 5103 /, -1300 5102/, -2000 -2500 40 /. (1018-1019 /2) Ar+, N2+ 30 , . , , /1,2/. , , Y -2500. , Y() , /3/, ( ) (Y~1/cos). 1. 2. 3. Harris P.J.F. // Phil. Mag. 2004. V. 84. P. 3159. .., .., .. . . 2007. 3. .1. .., .., .., . . 1994. 2. .33.

105

.. 1), .. 1), .. 2), .. 1), .. 1), .. 1), .. 3) 1) , , 2) «», , 3) , . , , , ( = 60) N2+ 30 (0001) -1 Ta - , T > Ta = 60 , T < Ta, Y (Y ~ 1/cos ) /1/. () . -1, , . 1 . T > Ta 200 ~ 30 . T > Ta ( = 60) , . Y() = 60 Y . RUMP , . Y() T > Ta , - /2/. 1. 2. .., .., .., .C. // . . 2006. .70. 6. . 820. . // . .: , 1998, 551 c.
106

- .. 1), .. 2), .. 2), .. 1) 1) - , . , - . .. , . ,

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, , , , . , , «», , , . , , , . - . (80%) (20%) 5,5·10-4 30 0,03 /. , , - . , , . - . , , , . , - .

107

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SI+ . (1 1 02 ) « 30» SI+ 80 , 3·1014 В 1015 -2 j = 4,5 В 7,5 /2. , - AFM TMX-2100 "Accurex" , , SI+ . (50 ) -102. , si+ 1015 -2, . SI+ 1015 -2 , . -4 CuK1-. Ge <111>. ~ 4 .., SI+ 3·1014 -2 ~ 6 .., si+ 1015 -2 ~ 8 .. ±1 .. , (3,3 ± 0,3)·10-4. , , SI+: , , . , .

108

«» .. , .. - , , . , . , , , «» . «» (. . , ) SCATTER /1/ , . W , 5 10 10 , .1. . «» . , , , «» . 1. .., .. // , « », 3-4, C. 76-81, 2002. 77
5

109

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xn +1 = xn + yn +1 , yn +1 = yn + kxn ( xn - 1) + ( + xn ) yn , (1) - ( k 1 , , 10-5 ) (.[1]). (1) "in", "out", n E . S ( n ) = Const e
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HRTEM , SiO2, ~800-900o C. = 1100 InSb, 10-20 20-40 .

, InSb, Si.

113

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114

IV III , .. 1), .. 1), .. 2), .. 2), .. 2), .. 2) .- , .-, 2) - . .. , .-,

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(radiation defect engineering) /1/. ( ) . n- p-, 2,5 . ( ) . n- V , - ( V ). , . , n- , . 70 . . , . ( 07-02-00096). 1. Kozlovski V., Abrosimova V. Radiation Defect Engineering. World Scientific, 2005, 253 p.

115

GaAs p-n- .. 1), .. 2) 1) , . , - , . ,

2)

, . . p-n- . P-n- 10-12 16 -3 (1 - 2) 10 . Pb+Zn. , p-n-. , . pn- - , - . p-n, , . p-n-, , 60 , p-n-, , 500 . P-n-, , . , p-n-. p-n-, , , , , .

116

, .. , .. , .. , .. , .. , .. - - . .. , . , , , () . , /1/. ( ), () 700-900 . () , , , (). , Si, . () . . , Si , . ( -) /1/ , .. Ne+ Si Si , . , 1,5 . a-Si Si. , ( ). 1,5 Si, . 1. .., .., .. . // . .. . , 2004, .7, .17-27.

117

Ba1-xSrxTiO3/Si (100)
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, - , . Ba1xSrxTiO3. - - . (100). Ba1-xSrxTiO3/Si, . , Ba0.98Sr0.2TiO3, , . , , , , , . , , , , , . + + -, , . 420 . , , -, .

118

.. , .. , . , . [1]. , [2]. (), (100 , =1015-1017 -2). CrAln+, TiAln+, . [1, 2]. h0=4.40±0.11 - Al2O3, ( 0.55 0.9), CrAln+ TiAln+, [1]. , [3]. , , , 2.5-4.0 3.8-4.9 [1]. ~4.4 , . 1. 2. 3. .., . // , 2006, 3, .58. .., .., .// , 2001, .43, .2, .224. Orapunt F., O`Leary S. K. // Appl. Phys. Lett., 2004, v.84, no 4, P.523.

119

- ..1), ..2), ..1), ..1), ..1) 1) , , 2) , , - - . , , . /. , (100) Si, - . Ti o ( 10-2 ) 7. C Xe+ 10 20, 40 1014 3·1015 -2. / , / He+ E0=2.0 RUMP. , , , , , . Si, , , , , . Xe+ .

120

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() Al-Fe, Fe . Fe Al-Fe /1/. Al-0.3; 0.6 Fe (. %) () () . . RUMP. -3 -3. , . 0.5 2.0 . , Fe : (0,02-0,03 ) Fe, 0.7 Fe . Fe 31 %, . Fe. Fe 0.28 0.21 . %. Al-1.0 Zn, Al-5.0 Ge Al-3.2 Sb 67, 83 188 % /2-4/. 1. - .., .. // , 1999, 6, . 73. 2. - .., .., .. // , 2005, 1, . 59. 3. - .., .., .. // . , , 2006, 4, . 100. 4. - .., .. // , 2000, 4, . 99.
121

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, , [1]. . 2 7.8 , [2]. . x TiHx ZrHx, [3] . x, , , x. , x, 100 . 5365.2006.2 1. 2. 3. .., .., .., .., .. // . . 2006. .70. 8. . 1210. / .. , 1973. 200. .., .., .. .., .. // Book of Abstracts VIII International Conference "Hydrogen Materials Science and Chemistry of Carbon Nanomaterials". Sudak, Ukraine. 2003. P.386
122

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123

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. , , . 10-7 /1/. , . , , . , . , 65 125. positronfit LT9 /2/. . . . 1. Triftshauser W., Kogel G. // Phys.Rev.Letter, 1982.V48, 25, p.1741-1744. 2. J. Kansy// Nucl. Instrum. Meth. A, 1996, V374, Issue 2, p.235-244.
124

, .. , .. , .. , .. , . , () , . . . .. "". , , . , . , . , . , , , , , . (0,1-10 ), . , , «Micro Scratch Tester» CSEM Instruments Nano Hardness Tester (). , , . . . ( 51017 /2) . , , .
125

- .. , .. , , , , . , () , , , . , : . , . 3 . / =1.4 . - ( NT-206). , -7-14 -26, , , ~12 ~6% (7--14) ~31 ~17% (26) . (Rave) . -26 7--14 2 3 4 2 4 55, 0,70 7,72 2,83 3,62 1,84 48

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126

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127

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128

- TI-B-C
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, . , 1.5-2 . Ti, B [1], . Ti-B-C, , (TiB2) (B4C). 600 , Ar 1 150 є. , [2]. 0.1-3 . , , , , , 11 B(p;)8Be2 - , . , -. , . , 0.06-0.3 , . 06-03-90566. 1. 2. ... , : // . 2006. . 74. 12. . 875. .., ... // . 2003. 4. .26.
129

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130

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131

.. 1), .. 1), .. 2), .. 1), .. 2), .. 1), .. 1), .. 1) 1) « », , 2) , , ( ) , . . , . . , , , . 44% Ar, 34% CH2D2 22% D2. -- ( 2,3 , 2,3 ) . , 180, 240, 320 400 . 150300 . 300 ( 100 ). (24%) 125 . , 400 , , ~18%. . , .. . 350 , . 20%.

132

.. 1), .. 1), .. 2), .. 1), .. 1), .. 2) 1 « » 2) , , . . - 200 370 670 . , , . -- . : « » «». . 1618 % 46 % . , 67 %. 60 , 200 . D/Be 0,050 0,036 370 670 , 0,020 0,016 . , , . , . , .

133

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134

- .. , .. , .. . .. , , - . - Mo3 W3. ( = 15 ) ( = 10151018 -2) () in situ (p = 10-8 ) Leybold LHS-10. - Mo 3d W 4f , . , . Mo3 Mo2 Mo (2 135

«» .. 1}, .. 1}, .. 1}, .. 1}, .. 1}, .. 1},.. 2}, .. 2}, .. 2} 1} , , 2} . . . , , - (), (). , , , , . () «» p «», p p , , . () He () -1, «» -1 ( ) 10000 28 42 . . 8000 Si 6000 x20 , C Ca 4000 . Fe O 2000 N C22H10O5N2. 0
0 200 400 600 800 1000

1016 /

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. , . K, Ti, Mn Ni, . , , , .

136

--
1)

.. 1), .. 1), M. Voelskow2) , . , 2) Institute of Ion Beam Physics and Material Research, Dresden, Germany

, . , -- (). He+ 1.7 Ge SiO2 290 , Ge+ 40 8в1015 -2, 60 , N2 30 500 1100 . , (100), \, 100 10%. , , . 700-1100 Ge . , Ge Ea3.4 , Ea=5.8 /1/. (Gei) Ci (DiCi) = DoiCoiexp(-3.37 /kT). 1. Minke M V and Jackson K A. Journ. Non-Cryst. Solids, 2005, v.351, c.2310.

137

.. 1), .. 2), .. 2), .. 3) 1) «», , 2) , , . .. , ,

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1988 - . , [1]. , , , , . () 1 , 1000 1 ! , 5 , , . - , ( ) . , . , , , , . , ( , , ..) . . . 1. I. Yamada. Nucl. Instr. And Meth. In Phys. Res., B99 (1995) P. 240243.
138

.. 1), .. 1), .. 1), .. 2) 1) , . , , . ,

2)

, , Cr-Ti-N . r-Ti-N (10-1 ). 3 (0,2 .% ). . 3 5 . 30-300 - . - . . v=0,05/ . , , , . rN TiN . . . , ( 200 ), ( ) ( 2,5 ) , .

139

121810 .. , .. , .. , .. , , (1 H2SO4, j= 10 /2) (= 120 , I= 5 , t= 15 ) 121810 . , 0,1, F = d/d, (. 1, 1-3). 77 .

. 1. 121810 (1), (2 10 , 3 15 j= 10 /2) (2, 3)

, 121810 ( ) . 0,1, F, (. 1, 2, 3). 121810 . .

140

- Al, Fe, Mo, Y ZrO2 .. , .. , .. , .. , .. , .. , .. - ( ), , . . , . . Al, Fe, Mo, Y 110 635 « » Ar+ ( 10 , 3,0 17,5 ). ( 20 , 350) 5000 . , - . : Fe Mo Al Y Zr -, , «» O2- . , «-», , , . , ( 1000 ) , 3 . , (Al, Fe, Mo, Y) 110 635 ( , ) .
141

.. , .. «» - , , , , , . , Sn Ed, ., , /1/. , . , TRIM.SP SRIM. Ar+ 30 N+ 15 . - , /2/. , Sn, Ar+ 30 Sn N+ 15 , Es/Ed /3/. , . , /2/ , , . 1. 2. 3. . . .:, 1971. 367 . .., .., .. . //. 2007. 3. .1. .., .. // . 2- - , 17-18 2003. .: «» - . .., 2003. .233.
142

- NC-TIC/A-C:H .. , .. , .. , , Y. Pei, D. Vainshtein, J.Th.M. De Hosson Materials Science Center, University of Groningen, Netherlands : , , , , , , .. - () () . , . nc-TiC/a-C:H, a-C:H TiC, . . sp3- sp2 .

143

« - » .. 1,2), .. 1), .. 1) , . , , . ,
1)

2)

, - , . (Ni, Co, Fe, Au) . : , , , , . () « ». Al, Ag, Ni, Ti, Cr, - . , , 20 200 . «» - (30% H+ 70% +) ~ 300 , 150 /2 60 . , ( , ). , , , , , . , , - , . , .

144

- .. 1,2), .. 1), .. 1) , . , , . ,
1)

2)

- , LiNbO3 , , . , /1/. - () , LiNbO3. LiNbO3 . LiNbO3 . LiNbO3 10100,5 3 , (Cu), . «» - (30% H+ 70% +) ~ 300 , 150 /2 60 . , . , > 30 /2 LiNbO3. , LiNbO3. , LiNbO3 1. .., ., // . 2006, . 48, . 10, . 1820.

145

, .. 1), .. 1,2), .. 1) , . , , . ,
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, (), . , , .. , , , . , , , , . . , . «». «3» Cr-, , . , -20 . , , -20 , , , . , -20. .

146

- .. , .. , .. . .. , . , /1/ o -2 600 500 c 40 17 ~10 , , . 17 -2 16 + 10 -10 , Ar . , . , 16 -2 Ar=(8-10).10 . , - Si3N4 . , 1100 ° . - , , , , , . . 1. 2. .., .., .., ..// , 2001, .120, . 3(9), . 637649. Bruel M. // Electron.Lett. 1995, v. 31, p. 1201.
147

Fe-Cr .. , .. , .. , .. - .. , . , Fe-Cr He+ /1/, Cr Fe. /2/, - , , , Fe-Cr, Cr + 4,36%, Fe-Cr, <110>, . , Cr , , , Fe. , . Cr Fe-(9, 11, 13) .% Cr He + c 30 450° 1в1019 1в1021 /2, , , Cr. Cr . , Fe-Cr Cr. 1. 2. .., .., .. // . ., ., . ., 2006, 3, . 23. Vincent E., Becquart B.C., Domain C. // J. Nucl. Mater. 2006, v.359, 3, p.227.
148

- Al2O3 a-Si/Al2O3 .. , .. , .. , .. , .. . .. , . , « Si », - . . - . - . Al2O3 (150 ) () a-Si/Al2O3 (3/7 , 17 ) - . Si+ = 100 31016 31017 -2 -200. Sb+ 21013 61016 -2 - «-3» 70 . = 500-1100 ° (2 ). «Solver Pro» (NTMMDT) . Al2O3 , . Si+ ( ) ( 1-2 ) 0.1-0.3 5107 -2. , , Al2O3. a-Si/Al2O3 ( 900 °) 1.4-3.7 50100 ~1010 -2. Sb+ ( ) . 61014 Sb+/2 , 900 1100 °, (20-40 ), 1-2 . -, , , . - .
149

.. , .. , .. , .. , . , , , V1 V2 . . , , . - . , V1 V2. . ( , , , ). , . , . , . (V < V1) (), V > 3 /c ( V1 = 5 /c) V >6 / ( V1 = 10 /c) , - .
150

.. 1), .. 1), .. 2), .. 2), .. 2) , .. 1) 1) , . , , , .

2)

, 1-0 -, «-5». «-5» - ( 200 /) 120 2, , , , , . , , . , ( 2,21018 /2) 120 . . . 12 135-140 , 60 , , 500 . , , . , , . . .

151

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3)

- . . , , , , . . -, - . , - 60% . 8 6. , . . . . . , . . , . , , , , - , .

152

.. 1) , .. 2) , , , . ,
1)

2)

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.. 1), .. 1), .. 1), V. Ovchinnikov 1) , . --, 2) Helsinki University of Technology, Helsinki, Finland
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/1-2/ () . - , . - /3-4/. Si . - , , ( 1 ) , , . . p-Si, (MCz). (100) Si (525 , B, > 1 , 2 < 10 ppm, - Okmetic Oyi, ) (7,57,5 2), (50 , 1,51015 /2). 30 Ar (800 ). Na n-- . : 1,6 ( 0,3 , -Si), DO 0,6 2/ ( , DO -Si 0,015 2/). , . , Na Si . 1. 2. 3. 4. .. // . 2005. 1. . 105. .., .. // . 2001. 5. . 74. Harkonen J, Tuovinen E. et al. // Physica Scripta. 2004. V. T114. P. Fretwurst E., Adey J. et al. // Nucl. Instr. And Meth. 2005. V. A 552. P. 7.
154

1)

. 1), .. 2), .. 1) , . , 2) , . --,

, . ( ). , 1013 /2. , , , , ( ). . . : , , , , , , , , ( 06-08-00245)

155

, .. , .. , .. , .. . .. , . , /1,2/ . (), H. , . , , , . P, Sb, B. . 90Y-90Sr. , ( , H , DLTS), (V2-O-C; V2; V-O; V-B), . , n-Si p-Si ( P B) , (P Sb) . , , , -, «» (P, B). , , . ( 06-02-96321 06-02-96316). 1. 2. Tetelbaum D.I., Kurilchik E.V., Latisheva N.D. // Nuclear Instruments and Methods in Physics Research B, 1997, 127/128, 153. .., .. . // , 2006, 48, 2, 262.

156

.., .. , . , /1/ . ( , ..) . (., , /2/). , , , . . . /1/ : , , . , , . /3/ , ~100 . , . /3/, 30 1 ~ 1000 0 C . SiO2 ( --). 1. 2. 3. .., .. // . 2007, 4 ( ) .., .., .. // , 1996, .15, 6, .3 .., .. . // . 2004, 5, .40

157

- .. , .. , . , /1/, - , , . , , . - , . , . /2/ , 5-10 , 10-20 %, . , , /3/, - , . , Ie. , . . . . , , , . - /2/. 1. 2. 3. .. .. - .- .: , 1977, .324. .., .., . // . 1992. 4, .61. ..// IV . , 2005, . 94.
158

MgO .. , .. , .. , . , .. , . , ( ) MgO. d = 100 500 е c . , , "" MgO (). MgO MgO MgO . . 150 е 150 е , 8,2 8,5 , 5,1 Eg, 7,2 7,5 , 1 0,8 , е 4,21 , % 75 80

(D = 1015 -2) MgO , d = 5 10 е [1]. 20 25 е. Mg 8 10 е, 5 10 е. , Mg/MgO. W Mg . = 1000 1100 . Mg MgO. 1. Tashmukhamedova D.A., Umirzakov B.E., Tashatov A.K. Uzbek journal of physics. V.2, 1, 2000. P. 38

159

CoSi2/CaF2/GaAs .. , .. , .. , . , . , CoSi2/CaF2/GaAs (.).

. CoSi2/CaF2/GaAs.

CaF2 (a = 5,46 е) GaAs (a = 5,63 е) . CaF2 CaBa-F2, CaF2 0 = 1,0 , 1000 . ~100 120 е. Ca0,6Ba0,4F2, ~ 5,60 е. , , .

160

SiC, NiSb, ZnO Cu C.. 1), .. 2), .. 3), .. 4), .. 3) 1) , , 2) . , , 3) , , 4) , , - () (SiO2) () 130, 60 3-5 . - (, Nanoscope IIIa, ) . () He+ -- 2,3 , .
SiC:6H (0001) SiC:6H (0001) SiC:6H (0001) NiSb (0001) NiSb (0001) NiSb (0001) NiSb (0001) ZnO (0001) Cu (111) Cu (110) Cu (100) 3/2 1/0 SiO2 , 130 , 60 , 3-5 SiO2 SiO2 SiO2 SiO2 SiO2 Nt, (1015) /2 27,71 19,34 4,89 36,45 32,35 14,23 13,21 6,35 11,61 15,51 10,80 Ra, , 1.555 1.992 0.309 0.389 0.321 0.419 0.089 0.111 0.087 0.1055 0.098 0.122 0.072 0.088 0.101 0.124 0.5679 0.7031 -

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161

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, «-», . , «- » 10-20 . - . - -, , 3 . . 10-3 200-1000є. . - 600є. - ZrN . , , , 600є, . 800є 5,5 4,0 . 1000є 2,0 , 1,6 , . , - 200є. 06-193.
162

.. 1), .. 1), .. 2), .. 2) 1) , . , 2) , . , , . -, 3. : (/ /) . - /1/. ~15/2 /1/. , , , . 0,22,0 . , . ( 20 ), , . (Ti, Cr, N) - -Fe. 2 . , . , , , . 1. .., .., .., .., .., .., .., .. // , 2006. . 16, 2, . 123-131.
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- . . 1), . . 1) , . . 2), . . 3) 1) , . , 2) , . , 3) , . , /1-2/. () «-» /2/. - « - », . 4 ( (100)) . . , 3 . /2/. , , , 15 /2, 10-15 , . , . . , . 1. 2. . ., . ., . ., . . - / - .: , 2001, - 528 . . ., . ., . ., . ., . ., . . . // 2005, 2. c. 36-41.

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, , .. , .. , .. , .. , .. , . , /1/. . - Zr,Mo,Ti,Cr 156 . 670-1270 K. , 200 100 . . . ( 43 ) (Ti-Zr)N, (Zr-)N c . , ZrN, TiN, (Ti-Zr)N, (Zr-)N. Cr2N, 2N (Cr-)2N r Mo. . , (, , ) (Ti-Zr)N, (Zr-)N , , (Cr-)2N . 1. Uglov V.V., Anishchik V.Mkhodasevich., V.V., Prikhodko Zh.L., Zlotski S.V., Abadias G., Dub S.N. Structural characterization and mechanical properties of Ti-Zr-N coatings, deposited by vacuum arc// Surface and Coatings Technology. 2004. V. 180-181. P. 519-525.
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- , .. , .. , .. , , , (), (~100 ), , , 20 /2. (), () () . - , - , [1]. - ( ) . , . ( .) () , - . , , . , . , . 1. Uglov V.V. etc. // V International conference plasma physics and plasma technology, Minsk, Belarus, September 18-22, 2006, P.563-566.

166

-MEIS .. , .. , .. , .. , .. , .. , , - - , 500 MEIS, . 1, , -

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167

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168

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101

. .. .. Betz G. De Hosson J.Th.M. Ikeda . Iwai Y. Kanai Y., Kambara T. Kornich G.V. Kovalev G.V. Ovchinnikov V. Pei Y. Vainstein D. Voelskow M. Yamazaki Y. 92 102

102 99 143 19 19 19 19 99 46, 47 154 143 143 137 19
177

XVII ... : .., ..., .., .. , .. ..

178