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PFn+ .. 1), .. 2) 1) "-", -, 2) , -, (100) Si P+, F+, PFn+ (n = 1...4) E = 2.1 /... , , , , . (RBS/C). , PFn+ , (P+ F+), , PFn+ . . PF4+ , , , , . , , , , .. () . , , /1/, /2/, PFn+. 1. 2. Titov A.I., Azarov A.Yu., Nikulina L.M., Kucheyev S. O. // Phys. Rev. B, 2006, v. 73, p. 064111. Thompson D.A. // Radiat. Eff. 1981, v. 56, p. 105.


GaN PFn+ .. 1), .. 2), .. 3) 1) "-", -, 2) , -, 3) LLNL, Livermore, USA GaN (RT) P+, PFn+ (n = 1...4) E = 1.3 / ... , , , , . RBC/C. .1 , 1.0 (a) + GaN , 10 cm P GaN , 1 0.8 2 5 0.6 7 15 0.4 : 0.2 , 0.0 + 1.0 (b) GaN PF4 , 10 cm /1/. 0.8 0.3 0.6 0.6 1.5 2.1 0.4 4.5 , 0.2 , 0.0 0 20 40 60 80 100 0.4-0.5. Depth, nm GaN .1 RT /1/. GaN RT P+ (a) , .. .
15 -2 15 -2

Relative disorder

Relative disorder

1. Kucheyev S.O., Williams J.S., Jagadish C., Zou J., Li G., Titov A.I. // Phys. Rev B, 2001, v. 64, p. 035202


.. , .. , , , /1/, , , . /2/ Cu Cu Ar (200 ). , 0 500 , , (.1).

. 1. Cu75

1. 2. Behrisch R., Eckstein W. // Nucl. Instr. and Meth. B, 1993, v. 82, p.255 Haile J.M. Molecular Dynamics Simulation ­ Elementary Methods. New York: Wiley-Interscience, 1992, p. 386


.. 1), .. 2), .. 1), .. 1) , , 2) "", ,
1)

Y -1 N2+ 30 0 80 (0001). 1018 ­ 1019 /2. . , , , , . = 400, , , , . , .. , . , .. , -1, . Y(), , /1/, .. Y~ 1/cos . = 400 Y() = 60. , , , . 1. Borisov A.M., Eckstein W., Mashkova E.S. //J. Nucl. Mater. 2002, v. 304. p. 15.


NixPdy .. 1), .. 2), .. 2), ..1), .. 1) . .. , , 2) , ,

1)

, Ni5Pd, NiPd NiPd5 Ar+ 3 10 . Ar+ 0,2 mA/2 . Be Al -8 () He+ 1,5 LEO1455VP Roentek. YPd/YNi , () . , Ni5Pd NiPd , NiPd5 ­ . YPd/YNi () , , . NixPdy, -. - Ar+ 3 . , YPd/YNi NiPd3 NiPd5. - . NixPdy, /1/, , . 1. .., .., .., .. // XXXII . - .: . -, 2002, . 3191.


Cu(111) .. , .. , .. - , -, /1,2/ u(111) CuN AuN (N=1-55) E/N=(0.1-1)/. , () (N) (E/N) . , , , . c N ( E/N) , c N . /3,4/. (" ") " ", . , " " (clearing the way effect), /5,6/. . "" . 1. 2. 3. 4. 5. 6. Zhurkin E., Kolesnikov A.S.// Nucl. Instrum. and Meth. in Phys. Res.B. 2003, v. B202, p. 296. .., .., ..// , 2005, 3, . 51 Kimura K., Oota Y., Nakajima K. et al.// Nucl. Instrum. and Meth. in Phys. Res. B, 2003, v. 211, p.206 Andersen H.H., Johansen A., Olsen M., Touboltsev V.S.// Nucl. Instrum. and Meth. in Phys. Res. B, 2003, v. 212, p. 56. Shulga V.I. and Sigmund P.// Nucl. Instrum. and Meth. In Phys. Res. B, 1990, v. 47 p. 236 Shulga V.I.// Nucl. Instrum. and Meth. In Phys. Res. B, 1991, v.58, p. 422.