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A. N. Shatokhin, F. N. Putilin, M. N. Roumiantseva, A. M. Gas, kov
Hydrogen gas-sensitivity thin films of tin
oxide surfase doped platinum laser plasma with different structure and charge
composition
Abstract
Influence of structure and
charge composition of laser plasma Pt is investigated at the surface doping
thin filmsSnO2 on their resistive sensitivity to
hydrogen. The structure and charge composition of plasma changed as a function
of magnitudes and polarities of a potential(UD)
the inhomogeneous electrostatic field created between a target and plates of a
diaphragm, located in vacuum chamber outside of a zone of a dispersion of
plasma at radiation Kr–F-laser on a platinum target. Doping atUD>
0 calls increase sensitivity filmsSnO2 in some times
greater, than doping by quasineutral plasma(UD=0).
A films, doped atUD <0 with optimal on a
maxima sensitivity surface concentration Pt appear tolerant to change of a
gas-phase composition in a temperature range 50–600°C.
Copyright (C) Chemistry Dept., Moscow State University, 2002
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