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- , , [1-6]. , 2-, [7]. Si, InGaAs-, , , .
45.00 40.00 35.00 30.00 25.00 20.00 15.00 10.00 5.00 1.4 1.9 0.8 bar 2.4 0.3 bar 2.9 3.4

Normal deviation of temperature,

, /

. 1. - : . : 0.8 ; : 0.3 .

. 1 , « »[7] . : 0,8 ,


20 . .2,
High frequencies deviation of T*, 600...1900 Hz 6 , K 5 4 3 2 1 0 1.4 1.8 2.2 , / 2.6

0.8 bar 0.3 bar

. 2. - 600...1900 : . : 0.8 ; : 0.3 .

. 6, 8 10
4 3
ADC

5

1

2

6

. 2. ..




. , (1) (2) , .3, (3) (4). , , . - (5) (6). , . , . , . T* . -, , , Xorig . Xorig XHilb. XHilb Xarg, (. 4). : Xres, LN . . , 1- , 2- . 1- 2- . , [7], . .4, -, . Xarg. , , , , , .


LowThr eshold 30 = err Type1Num= 19

HighThresh old 72 = errType2Num= 1 20

SUM

v=2 /

10

0

0

20

40

60

80

100

PERIOD

ERR

0

0.85

1.7

2.55

3.4

4.25

5.1

5.95

6.8

7.65

8.5

9.35

10.2

11.05

11.9

12.75

13.6

14.45

15.3

16.15

17

TIME, sec
LowThr eshold 37.5 = err Type1Num= 56 High Threshold 90 = err Type2Num= 0 10

QUAN8 ITY T
6

v=1 , 6 /

4 2 0

0

20

40

60

80

PERIOD

ERRO

0

0.7

1.4

2.1

2.8

3.5

4.2

4.9

5.6

6.3

7

7.7

8.4

9.1

9.8

10.5

11.2

11.9

12.6

13.3

14

TIME

.4 .3 10 . ) 24 / ) 2 / ) 16 /


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1. P. Sforza, V. Santacesaria, «2 laser cutting: analytical dependence of the roughness of the cut edge on the experimental parameters and process monitoring» //Proceed. SPIE Laser Materials Processing: Industrial and Microelectronics Applications, E.Beyer; M. Cantello; A.V. La Rocca; L.D. Laude; F.O. Olsen; G. Sepold: Eds, vol. 2207, pp. 836-847 (1994) 2. Heyn H., Decker I., Wohlfahrt H. «Tools and requirements for in-process quality control in laser beam welding» //Proceed. SPIE Laser Materials Processing: Industrial and Microelectronics Applications, E. Beyer; M. Cantello; A. V. La Rocca; L. D. Laude; F. O. Olsen; G. Sepold:Eds, vol. 2207, pp.381-391 (1994) 3. A.F.H. Kaplan Theoretical Analysis of Laser Beam Cutting. Series: Berichte Aus Der Fertigungstechnik, Shaker Verlag GmbH: Aachen (2002) ISBN-13: 978-3-8322-08035 4. Kaplan, A. F. H, D. Schuocker and O. Wangler "Laser cutting: Fundamentals of the periodic striations and their on-line detection" //Lasers in Engineering, v 6, pp 103126, (1996). 5. Kaplan, A. F. H. und O. Wangler «Quality monitoring during laser beam cutting» //Laser und Optoelektronik, v 28, n 3, pp 68-74 (1996) (in German) 6. Leidinger D., A. Penz and D. Schuocker "Improved manufacturing processes with high power lasers" //Infrared Physics Technology, v 36, n 1, pp 251-266 (1995). 7. .., . «- » // . IX " , , " 24-25 2008 ., , .136-141 (2008).