Документ взят из кэша поисковой машины. Адрес оригинального документа : http://nuclphys.sinp.msu.ru/school/s08/s08_26.pdf Дата изменения: Tue Nov 18 10:24:02 2008 Дата индексирования: Tue Oct 2 00:30:58 2012 Кодировка:

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The velocity distribution of the different size particles of the erosive laser plume at the Si target ablation have been measured experimentally. The influence of the mechanical separation method on the Si films surface quality and their inhomogeneity have been investigated. The Si thin films have been received by the pulse laser deposition (PLD) method. It was established that the mechanical separation method allows to exclude the hit of Si drops on the film in the deposition process.

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1. .., .., .., , 39, 4 (2006). 2. .., .., .., .., , 77, 127, (2007). 3. A.Gorbunov, A.Tselev, W.Pompe, Cross-beam laser deposition of ultrathin multilayer metal films, in 6th International Conference on Industrial Lasers and Laser Applicatins'98, V.Ya.Panchenko, V.S.Golubev, Editors, Proceedings of SPIE Vol. 3688, p. 351-358 (1999). 4. G.Calestani, A.Migliori, U.Spreitzer, S.Hauser, M.Fuchs, H.Barowski, T.Schauer, W.Assmann, K.-J.Range, A.Varlashkin, O.Waldmann, P.MЭller, and K.F.Renk. Ba-Ca-Cu oxycarbonate thin films, prepared by pulsed laser deposition: structure, growth mechanism and superconducting properties. Physica C, v. 312(3-4) , p. 225-232 (1999) . 5. .., .., .., ., .., ., .., , 33, 11 (2003). 6. .., .., . . .. . 2001. .31. 2. , 159-163.
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