Äîêóìåíò âçÿò èç êýøà ïîèñêîâîé ìàøèíû. Àäðåñ îðèãèíàëüíîãî äîêóìåíòà : http://danp.sinp.msu.ru/Projects/Preprint_MEIS_End.pdf Äàòà èçìåíåíèÿ: Mon Dec 31 23:33:28 2001 Äàòà èíäåêñèðîâàíèÿ: Mon Oct 1 22:11:17 2012 Êîäèðîâêà:

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-MEIS :
­ 2007 ­ 3/802


537.9 538.975 P.N.Chernykh, G.A Iferov., V.S.Kulikauskas, V.S.Chernysh, N.G.Chechenin, V.Ya Chumanov, E-mail address: Vaclav@anna19.sinp.msu.ru , Chernykh-Pavel@yandex.ru , Chechenin@sinp.msu.ru EXPERIMENTAL FACILITY KG-MEIS OF SINP MSU: first results Preprint SINP MSU ­ 2007 ­ 3/802 Abstract For surface nano- and subnano-layers research in SINP MSU the experimental facility KGMEIS is created which consist of KG-500 accelerator and MEIS chamber, equipped by a toroidal electrostatic analyzer with a detector based on microchannel plates and special position-sensitive collector. The given experimental complex is designed for investigation of surface layers of samples with the depth resolution about one angstrom, using the Medium Energy Ion Spectrometry (MEIS), based on the Rutherford Backscattering Spectrometry (RBS). In the preprint the experimental facility is outlined, as well as a description and analysis of very first results obtained, using the facility.

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.10. - -MEIS CAMAC.

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. RUMP, SIMNRA . /20-23/, , , /24/. Hf .12 ~ 3,6 . TESA (2,4 ) (2 ) , ~ 1,77 . , . , HfO2 , , . , . . . Sb ~ 0,4 . - Au/Si, . Au ~ 0,5 .

.13. - 150 Si/Sb(4å)/SiO2/Si . Sb . Si.

20


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24


J.F. van der Veen, Surf. Sci. Rep. 5 (1985) 199. E. P. Gusev, H. C. Lu, E. Garfunkel, and T. Gustafsson, Surf. Sci. 352/354 (1996) 21. B.W.Busch and T.Gustafsson, Phys.Rev.B61 (2000) 16097. A. W. D. Denier van der Gon, R. J. Smith, J. M. Gay, D. J.O'Connor, and J. F. van der Veen, Surf. Sci. 227, 143 (1990). 5. B.W. Busch, T. Gustafsson, T.H. Viefhaus, C. Uebing, Surf.Sci. 463 (2000) 145. 6. S. Abo, S. Ichihara, T. Lohner, F. Wakaya, T. Eimori, Y. Inoue, M. Takai, Nuclear Instruments and Methods in Physics Research B237 (2005) 72. 7. D.P.Woodruff, Nuclear Instr. and Methods in Phys. Research B256 (2007) 293. 8. V.V. Afrosimov, R.N. Il'in, S.F. Karmanenko, A.A. Melkov, V.I. Sakharov, I.T. Serenkov, Thin Solid Films 492 (2005) 146. 9. M.-Y. Ho, H. Gonga, G. D. Wilk, B. W. Busch, M. L. Green, W. H. Lin, A. See, S.K. Lahiri, M. E. Loomans, Petri I. Raisanen, T. Gustafsson, Appl.Phys.Lett. 81 (2002) 4218. 10. S. Sayan, S. Aravamudhan, B. W. Busch, W. H. Schulte, F. Cosandey, G. D. Wilk, T. Gustafsson, E. Garfunkel, J.Vac.Sci.Technol.A20 (2002) 507. 11. T.Gustafsson, H.C. Lu, B. W. Busch, W. H. Schulte, E. Garfunkel, Nuclear Instr. and Methods in Physics Research B183 (2001) 146. 12. J.J. Chambers, B.W. Busch, W. H. Schulte, T. Gustafsson, E. Garfunkel et al., Appl.Surf.Sci. 181 (2001) 78. 13. W.Tsai, R.J.Carter, H. Nohira et al., Microelectronic Engineering 65 (2003) 259. 14. P.E.A. Alkemade, W.C. Turkenburg, W.F. van der Weg, Nuclear Instr. and Methods in Physics Research B28 (1987) 161. 15. W. H. Schulte, B.W. Busch, E. Garfunkel, T. Gustafsson, G. Schiwietz, P.L. Grande, Nuclear Instr. and Methods in Physics Research B183 (2001) 16. 16. P.L.Grande, G. Schiwietz, Phys.Rev A58 (1998) 3796. 17. A.A. Bednyakov, V.Ya. Chumanov, O.V.Chumanova, G.A. Iferov, V.S. Kulikauskas, I.I. Razgulyaev, Yu.N. Zhukova, Nuclear Instr. and Methods in Physics Research B115 (1996) 168. 18. S.W. Novak, C.W. Magee, T. Buyulimanli, Nuclear Instr. and Methods in Physics Research B242 (2005) 321. 19. http://www.ni.com/labview/ 20. L.R. Doolittle, Nuclear Instr. and Methods in Physics Research B9 (1985) 344. 21. M.Mayer, K.Arstila, K. Nordlund, E. Edelmann, J. Keinonen, Nucl. Instr. and Methods in Physics Research B249 (2006) 823; SIMNRA: Simulation of RBS, ERD and NRA spectra. Available at home page http://www.rzg.mpg.de/~mam/ 22. V. BohÀc, D. M. Shirokov, Nuclear Instr. and Methods in Physics Research B84 (1994) 497. 23. C.Jeynes, N.P. Barradas, P.K. Marriott, G. Boudreault, M. Jenkin, E. Wendler and R.P. Webb, J.Phys.D: Appl.Phys. 36 (2003) R97. 24. ., .. . .- «», 1989. 1. 2. 3. 4.

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-MEIS :

­ 2007 ­ 1/822

28.03.2007

26