... For SIMS (Secondary Ion Mass Spectrometry) analysis, a solid surface is bombarded by primary ions of some keV energy. ... The subsequent mass analysis of the emitted ions provides detailed information on the elemental and molecular composition of the surface. ... Extremely short ion pulses with a duration below . ... By rastering a fine-focussed ion beam over the surface, like an electron beam in an electron microprobe, mass resolved secondary ion images (chemical maps) can be obtained...