Delta-doped Imagers for UV and EUV Applications

Äîêóìåíò âçÿò èç êýøà ïîèñêîâîé ìàøèíû. Àäðåñ îðèãèíàëüíîãî äîêóìåíòà : http://www.stsci.edu/stsci/meetings/space_detectors/nikzad_figure_1.htm
Äàòà èçìåíåíèÿ: Wed Aug 29 23:50:21 2001
Äàòà èíäåêñèðîâàíèÿ: Sat Dec 22 20:11:16 2007
Êîäèðîâêà:
Ïîèñêîâûå ñëîâà: arp 220

Delta-doped Imagers for UV and EUV Applications - Figure 1

Figure 1

Figure 1. Cross section schematic of a delta-doped CCD. The epitaxially-grown delta-doped layer on the back surface of a thinned CCD places a high density of boron atoms approximately 0.5 nm below the silicon epilayer surface and protected by an oxide overlayer.