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Laboratory 235. Equipment
IREE RAS. Research Activities

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Our Equipment

All our equipment mounted in the "100/1000" class clean room.

Sputtering load lock system VON ARDENNE LS 730S for thin-film deposition

Electron-beam microscope JEOL JSM-6460 with computer-controlled electron-beam steering system "Nanomaker" for nano-lithorgaphy

Optical microscope Olympus BX52 with digital video camera and digital imaging system (zoom up to 1500x)

Surface profiler KLA-TENCOR Alpha-Step 500 (up to 10A)

A set of equipment for the process of lithography (this zone has a class of purity "100")

Oven

Ultrapure water purification systems Millipore Milli-Q Academic A10

TPT HB02 Thermosonic Wedge Bonder
    Electrical measurement equipment:
  1. Cryostat Oxford Instruments HelioxAC-V (temperature range from 300mK to 300K)
  2. Vacuum pumping post
  3. Thermocontrollers
  4. Lake Shore Resistance Bridge Model 370 AC
  5. Switch
  6. Voltmeter
  7. Power supply

Millimeter and sub-millimeter wave spectrometer

Home | Staff | Activities | Publications | Collaborations | Equipment | Contacts
IREE RAS