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Vacuum Technology

Series 970
COLD CATHODE TRANSDUCER FAMILY
The 970 Series is a family of compact, low cost, general-purpose transducers that utilize from one to four sensors- cold cathode, MicroPiraniTM, and Piezo technologies. Combining these sensing technologies enables a wide measurement range from atmosphere to 10-8 Torr. In addition to its small size, broad range and lower cost, the 970 Series can be operated via digital communication or as an autonomous analog unit.

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Features & Benefits
transducer solution saving tool real estate surement range of 10-8 Torr to atmosphere (972B and 974B models), eliminating the need for multiple gauges in the 972B and 974B allows low auto cold cathode turn-on pressure (user programmable from 2x10-4 to 1x10-3 Torr) for enhanced reliability user ser viceable to decrease downtime and save external repair costs digital communication for ease of operation during pump down cycle for improved accuracy (972B and 974B models) of use and flexibility of design smoothed analog output that combines the individual sensor measurements control connectors available to match other vendors' gauges and facilitate an easy upgrade for easy set up

Applications
The Series 970 Transducers are compact, low cost measurement solutions for vacuum users operating within the pressure range of atmosphere to 10-8 Torr. The small size of the Series 970 transducers makes them ideal for system integrators looking to reduce footprint and enable miniaturization. Applications include:


Description
The Series 970 family consists of 3 models, the 971B, 972B and the 974B. 971B UniMag The 971B UniMag transducer offers a measurement range from 1x10-8 Torr to 5x10-3 Torr and is based on cold cathode inver ted magnetron sensor technology. The 971B is a cost effective solution for base pressure measurement and control. 972B DualMag The 972B DualMag transducer offers a measurement range from 1x10-8 Torr to atmospheric pressure and it combines cold cathode inver ted magnetron and MicroPirani thermal conductivity MEMS sensor technologies. The MicroPirani automatically controls the cold cathode sensor to ensure optimal ignition pressure. The MicroPirani offers 1-2 decades lower measuring range the cold cathode activation pressure gauge, reliability is improved and the ser vice interval extended. 974B QuadMag The 974B QuadMag offers a measurement range from 1x10-8 to 1500 Torr and combines cold cathode inver ted magnetron, MicroPirani and Piezo differential sensor technologies. The 974B has been specifically designed for pressure measurement within a vacuum loadlock. It has the capability to replace multiple pressure measurement devices on a loadlock with its absolute pressure measurement from atmosphere to 10-8 Torr and can reduce costs with a simplified loadlock design. The 974B can be used on loadlocks or any vacuum chamber atmospheric switching capabilities.

Interf ace
The Series 970 has RS232 or RS485 digital communication interface for setup of transducer parameters and to provide real time pressure measurement. All Series 970 transducers have an analog pressure output of 0.5VDC/decade that can be interfaced to external analog outputs and curves can be selected via the digital user interface. The Series 970 has up to three mechanical relays which can be used for process control, examples are interlocking valves or pumps. The Series 970 have standard 15 pin HD SUBD connector and an analog output voltage pressure signal of 0.5VDC/ decade. It can also emulate analog voltage outputs from a variety of other vacuum transducers. The emulation feature can be used to upgrade and replace other vendors' gauges in OEM applications without changing system software. Contact MKS technical suppor t for details.

Analog Output
971 972 974

Service
The user changeable cold cathode anode module and screen offers easy serviceability without disassembling of transducer electronics.

Sensor and transducer measurement ranges

Enclosure
The transducers are available with an optional IP54 (NEMA 3) rated enclosure.


Specifications

Series 971B Sensor Type Cold Cathode

Series 972B Cold Cathode / MicroPirani (MEMS Thermal Conductivity) 1 x 10-8 Torr to Atmosphere not available 1 x 10-8 Torr to Atmosphere not available Nitrogen 0° to 40°C (32° to 104°F) 85°C (185°F), non-operating RS485 or RS232 Pressure units, baud rate, address, factory default, user tag, RS485 test, gas correction; setpoint functions: value, hysteresis, direction, HV enable, protect, control setpoint, gas type Pressure reading and units, setpoint, transducer temperature, user tag, model, device type, serial number, firmware and hardware versions 0.5 VDC / decade 3 relays, SPST 1 A @ 30VAC/DC, resistive 9-30 VDC, 2 W
-3

Series 974B Cold Cathode / MicroPirani (MEMS Thermal Conductivity) / Piezo Differential (MEMS Diaphragm) 1 x 10-8 Torr to 1500 Torr -760 to +760 Torr 1 x 10-8 Torr to 1000 Torr -760 to +100 Torr Nitrogen 0° to 40°C (32° to 104°F) 85°C (185°F), non-operating RS485 or RS232 Pressure units, baud rate, address, factory default, user tag, RS485 test, gas correction; setpoint functions: value, hysteresis, direction, HV enable, protect, control setpoint, gas type Pressure reading and units, setpoint, transducer temperature, user tag, model, device type, serial number, firmware and hardware versions 0.5 VDC / decade 3 relays, SPST 1 A @ 30VAC/DC, resistive 9-30 VDC, 2 W
-3

Measuring Range Absolute Measuring Range Differential Set Point Range Absolute Set Point Range Differential Calibration Gas Operating Temperature Range Maximum Bakeout Temperature Digital Communications Controls

1 x 10-8 Torr to 5 x 10-3 Torr not available 1 x 10-8 Torr to 5 x 10-3 Torr not available Nitrogen 0° to 40°C (32° to 104°F) 85°C (185°F), non-operating RS485 or RS232 Pressure units, baud rate, address, factory default, user tag, RS485 test, gas correction; setpoint functions: value, hysteresis, direction, HV enable, protect, control setpoint, gas type Pressure reading and units, setpoint, transducer temperature, user tag, model, device type, serial number, firmware and hardware versions 0.5 VDC / decade 3 relays, SPST 1 A @ 30VAC/DC, resistive 9-30 VDC, 2 W 5 x 10 Torr to 10 ± 30% of reading
-8

Status

Analog Output (Absolute Pressure) Relays Relay Contact Rating Power Requirements Accuracy (Typical) Combined Absolute Repeatability (Typical) Combined Absolute Accuracy (Typical) Differential
1

5 x 10 Torr to 10 ± 30% of reading 10-3 to 100 ±5% of reading
-8

5 x 10-8 Torr to 10-3 ± 30% of reading 10-3 to 50 Torr ±5% of reading 50 to 1000 Torr ± 1% of reading 5 x 10-8 Torr to 10-3 ± 30% of reading 10-3 to 50 ±2% of reading 50 to 1000 Torr ± 1% of reading -10 to +10 Torr ±10% of reading -100 to -10 Torr ±8% of reading -760 to -100 Torr ±1% of reading +10 to 100 Torr ±5% of reading -760 to +10 Torr ±1% of reading ±0.1% of Full Scale (F.S. = 760 Torr) 1500 Torr Any 21 cm3 304 and 403 stainless steel, silicon, SiO2, SiN4, gold, Viton®, epoxy resin, ceramic, titanium 304 stainless steel 12.7 oz (360 g) EMC Directive 2004/108/EEC, EN-61326-1 Low Voltage Directive 73/23/EEC, EN-61010-1

5 x 10-8 Torr to 10-3 ± 30% of reading

5 x 10-8 Torr to 10-3 ± 30% of reading 10-3 to 100 ±2% of reading not available

not available

Repeatability (Typical) Differential Zero Stability (Typical) Differential Overpressure Limit Installation Orientation Internal Volume

1

not available not available 1500 Torr Any 21 cm
3

not available not available 1500 Torr Any 21 cm
3

1

Materials Exposed to Vacuum

304 and 403 stainless steel, Viton®, epoxy resin, ceramic, titanium 304 stainless steel 12.7 oz (360 g) EMC Directive 2004/108/EEC, EN-61326-1 Low Voltage Directive 73/23/EEC, EN-61010-1

304 and 403 stainless steel, silicon, SiO2, SiN4, gold, Viton®, epoxy resin, ceramic, titanium 304 stainless steel 12.7 oz (360 g) EMC Directive 2004/108/EEC, EN-61326-1 Low Voltage Directive 73/23/ EEC, EN-61010-1

Electronic Casing Weight (with NW25 KF Flange) CE Certification

1

Note: Accuracy and repeatability are typical values measured with Nitrogen gas at ambient temperature after zero adjustment.


Ordering Inf ormation
Description Cold Cathode Transducer Model 971B UniMag 972B DualMag 974B QuadMag Flange NW25 KF 2 ¾" CF NW40 KF Interface RS232 RS485 Analog Out Standard MKS Connector Relays SUBD SUBD SUBD SUBD 15pinHD 15pinHD 15pinHD 15pinHD male/no relay male/3 relays male/3 relays/Dual Aout (piezo differential) - 974B only male/3 relays/Dual Aout (Absolute) - 972B/974B only 2 3 4 5 0 2 4 PDR900-12-US 100013620 100013671 970B-Anode 970B-CELLKIT 100014515 100014520 0 1 2 2 7 9 971B972B974BCode

Enclosure Sealing Standard/Viton® sealing IP54/Viton Standard/Viton sealing/display Accessories PDR900 Single Channel Controller, RS232/485, US Power Cord Cable, PDR900 to 970, 10 ft (3M), RS232 Cable, PDR900 to 970, 10 ft (3M), RS485 Replacement Cold Cathode Anode Module Anode Screen and Front Screen NW25KF Centering Ring with 4µm Filter and Viton O-ring* NW40KF Centering Ring with 4µm Filter and Viton O-ring*

* Recommended on inlet flange of 972B/974B to protect sensors from par ticulates when used in harsh environments. Other filter sizes available upon request. Ordering Code Example: 971B-21030 = NW25, RS232, standard analog output, Sub D 15 pin HD male, 3 relays, Viton.

Dimensions

Pin Outs
SubD 15 pin HD male/3 relays
PIN 1 PIN 5

PIN 6 PIN 11

PIN 10 PIN 15

Flange NW 25 KF NW 40 KF 2 3/4'' CF

A 3.78 (96) 3.86 (98) 4.49 (114)

1 2 3 4 5 6 7 8

-

RS485 (-) / RS232 transmit RS485 (+) / RS232 receive Power (+) Power (-) Analog Output (+) Analog Output (-) Relay #1 NO Relay #1 Common

9 10 11 12 13

Relay #1 NC Relay #2 NC Relay #2 Common Relay #2 NO Relay #3 NC (971B only cold cathode enable) 14 - Relay #3 Common 15 - Relay #3 NO

-

Global Headquarters
2 Tech Drive, Suite 201 Andover, MA 01810-2449 Tel: 978.645.5500 Tel: 800.227.8766 (in USA) Web: www.mksinst.com
Series 970 - 8/12 © 2009 MKS Instruments, Inc. All rights reser ved.

Vacuum Technology
HPS® Products 5330 Sterling Drive Boulder, CO 80301 Tel: Tel: 303.449.9861 800.345.1967 (in USA)

Denmark ApS
Ndr. Strandvej 119G DK-3150 Hellebaek Denmark Tel: +45 4492 9299 Email: mksdenmark@mksinst.com

MKS products provided subject to the US Expor t Regulations. Diversion or transfer contrar y to US law is prohibited. Specifications are subject to change without notice. mksinstTM and MicroPiraniTM are trademarks of MKS Instruments, Inc., Andover, MA. Viton® is a registered trademark of E.I. Dupont, Co., Wilmington, DE.