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TiTanTM ION PUMPS


TiTanTM ION PUMPS

TiTanTM ION PUMPS
Ion pumps are used in a wide variet y of high and ultra - high vacuum (UHV) environments. They can reach the lowest possible vacuum for an economical cost. In addition, ion pumps have some technical advantages over other technologies: · Vibration Free Operation · Low Operational Cost · Bakeable · Low Maintenance · Pressure Indication · Permanent Gas Capture · Radiation Tolerance · Long Operational Life · Non-contaminating Technology

SMALL ION PUMPS (MINI - 75S)
Small ion pumps come in a wide variet y of sizes and confi gurations. Gamma Vacuum maintains stock of the most common confi gurations for same - day deliver y. These pumps have the added advantage that they can be mounted in any o r i e n t a t i o n w i t h o u t a d d i t i o n a l s u p p o r t.

LOW PROFILE ION PUMPS (100L - 1200L X)
Low Profile ion pumps are under 12 in. (300 mm) high for standard confi gurations. Custom built to each order, the closed magnetic loop of these pumps reduces the stray magnetic fi eld created by the pump making these pumps ideal for any t ype of charged par ticle application.

TALL PROFILE ION PUMPS (150T V - 600T V)
Tall Profile ion pumps are designed for mounting in narrow locations and matching competitive dimensions. These pumps are built to order and designed to fi t into locations where a Low Profile ion pump might not fi t.


TiTanTM ION PUMPS

TiTanTM ION PUMP CHARACTERISTICS
Lifetime All Gamma Vacuum ion pumps are designed to operate for 45,000 ­ 50,000 hours at 1x10 -6 mbar. Lifetime increases linearly with decreased pressure. At 1x10 -9, for example, an ion pump can last for many years. Ultimate Pressure Ion pumps are capable of reaching pressures below 1x10 -10 mbar. Ultimate pressure of an ion pump is dictated by overall system c o n d i t i o ns a n d m a t e r i a ls . Vacuum Processing Ion pumps are shipped under vacuum at pressures less than 1x10 -10 mbar. Cer tifi cates of conformance are provided and record all leak check points and pump characteristic values. RGA scans can be provided upon request. Port Configurations Each ion pump can be confi gured with a variet y of pumping por t options. Additional por ts are available in most designs on the top, bot tom, or side and can accommodate TSP or non - evaporable get ter (NEG) modules. Feedthroughs Gamma Vacuum has standardized on the commercially available 10kV SHV feedhrough since 1996. For legacy purposes, alternate feedthroughs are available.

Heaters Integrated heaters can be added to ion p u m ps f o r e c o n o m ic a l a n d e f fi c i e n t b a k i n g .

Cables In addition to incorporating the SAFECONN interlock system, high voltage cables are made of fl exible silicone materials that are bakeable and have high radiation tolerance.

TiTanTM ION PUMP ELEMENTS
TiTanTM ion pump elements are "tuned" for specifi c pumping applications. Sur faces are chemically processed to remove potential sur face contaminants and provide maximum adhesion for extended lifetime. Ceramics are optimally shielded to reduce exposure to sput tered material. · TiTanTM CV (Conventional) ­ t wo titanium cathodes for high pumping speed of reactive gases. · TiTanTM DI (Dif ferential) ­ a titanium and tantalum cathode for maintained pumping speeds of reactive gases and long term s t ab ili t y o f no b l e g as e s . · TiTanTM TR ­ classic triode element for higher pressure operation


TiTanTM ION PUMPS
SP E CI F IC AT IO N S INLET FLANGE(S) DIMENSIONS mm (in.) (H x L x W, max) CO M P AT I B I L I TY

TiTanTM ION PUMPS

SPEED (l/s)

Weight, kg (lbs)

SPC

LPCe

MPCe

TSP

S M A L L I O N P UM P S
MINI
0.2 DN 16 (1.33 in.) 38 x 38 x 51 (1.5 x 1.5 x 2.0) 45 x 45 x 108 (1.8 x 1.8 x 4.3) 107 x 113 x 190 (4.2 x 4.4 x 75) 202 x 125 x 130 (8.0 x 4.9 x 5.1) 209 x 251 x 130 (8.2 x 9.9 x 5.1) 277 x 242 x 130 (10.9 x 9.5 x 5.1) 0.35 (0.8)

X

3S

2-3

DN 16 (1.33 in.)

0.35 (0.8)

X

10S

8 - 10

DN 35 (2.74 in.)

6 (13)

X

25S

15 - 20

DN 35 (2.75 in.) DN 35 (2.75 in.) DN 63 (4.5 in.) DN 35 (2.75 in.) DN 63 (4.5 in.) DN 100 (6 in.)

9 (20)

X

45S

30 - 40

16 (34)

X

X

75S

40 - 75

19 (42)

X

X

LOW PROFILE ION PUMPS
10 0L
80 - 100 DN 100 (6 in.) 325 x 325 x 128 (13 x 13 x 5) 325 x 413 x 233 (13 x 16 x 9) 325 x 413 x 337 (13 x 16 x 13) 325 x 413 x 413 (13 x 16 x 16) 508 x 413 x 233 (20 x 16 x 9) 325 x 513 x 513 (13 x 20 x 20) 508 x 413 x 336 (20 x 16 x 13) 508 x 413 x 413 (20 x 16 x 16) 537 x 513 x 513 (21 x 20 x 20) 29 (62)

X

X

20 0L

160 - 200

DN 150 (8 in.)

49 (108)

X

X

X

30 0L

240 - 300

DN 150 (8 in.)

66 (145)

X

X

X

40 0L

320 - 400

DN 150 (8 in.)

72 (159)

X

X

40 0L X

320 - 400

DN 150 (8 in.)

115 (253)

X

X

60 0L

480 - 600

DN 150 (8 in.)

103 (226)

X

X

60 0L X

480 - 600

DN 150 (8 in.)

115 (253)

X

X

80 0L X

640 - 800

DN 150 (8 in.) DN 150 (8 in.) DN 200 (10 in.)

124 (273)

X

X

120 0L X

960-1200

206 (452)

X

X

TALL PROFILE ION PUMPS
150T V
120 - 150 DN 100 (6") 338 x 247 x 231 (14 x 10 x 9) 345 x 450 x 231 (14 x 18 x 9) 525 x 450 x 305 (21 x 18 x 12) 32 (70)

X

X

X

30 0T V

240 - 300

DN 100 (6")

65 (143)

X

X

X

60 0T V

480 - 600

DN 100 (6")

109 (243)

X

X

GAMMA VACUUM
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