Документ взят из кэша поисковой машины. Адрес оригинального документа : http://www.apo.nmsu.edu/arc35m/Instruments/ARCTIC/Development/ImagerPDR/GammaVacSPCeManual.pdf Дата изменения: Thu Dec 5 20:44:00 2013 Дата индексирования: Thu Feb 27 21:08:50 2014 Кодировка: Поисковые слова: m 8

SM ALL PUMP CONTROLLER (SPCe) USERS M ANUAL
PN 90 0 026, Rev E

ISO 90 01:20 08 Cer tified


GENER AL INFOR M ATION
The DIGITEL SPCe is an intelligent, programmable ion pump power supply, which features a LCD display and sof t-keys for navigation. It requires an ex ternal 24V DC power supply -- an ex ternal mains adapter is available to permit operation from 85 to 260V AC, 50 or 60 Hz. It is ј rack and 2u high with an optional half rack or full rack mount kit. The SPCe can be controlled t wo ways: direc tly from the front panel o r r e m o t e l y t h r o u g h s e r i al o r E t h e r n e t p o r t s . T h e s e r i al p o r t s u p p o r t s RS -232/422/485 protocols. Individual model specification information is located on our website at: www.gammavacuum.com WARNING: Do not use unauthorized par ts. Such par ts may compromise safet y. Contac t Gamma Vacuum with any questions.

Read this entire manual and follow installation instructions. Failure to do so may cause injur y and/or may void warrant y.

APPROVALS
Gamma Vacuum Small Pump Controllers (SPCe) are shown to meet the EEC Low-Voltage Directive and Electromagnetic Compatibilit y approvals: EN 61326 -1 EN 616326 -2-1 Low Voltage Directive 73/23/EEC

WARNINGS
WA R N I N G:
S H O C K H A Z A R D. C A N C AU S E I N J U RY O R D E AT H. R E M OV E P OW E R B E F O R E SERV I C I N G.

ALE R TE:

R I SQ U E D E C H O C . PEU T C AU S ER D ES B L ES SU R ES O U L A M O RT. R E T I R ER L A SO U RC E D'A L I M EN TAT I O N A VA N T L E S E R V I C E .

A DV E R T E N C I A :

P E L I G RO P O R D ESC A RGA . P U E D E C A U S A R L E S I с N O I N C LU S O L A M U E R T E. R E T I R E Y D E S CO N E C T E L A FU EN T E D E A L I M EN TAC I O N E L EC T R I C A , A N T ES D E P RO C E D E R A L S ERV I C I O D E R EPA R AC I с N, M A N T EN I M I EN TO O R E V I S I O N IN T ER N A .

AC H T U N G :

G EFA H R EL EK T R I SC H ER S C H L д G E. V E R L E T Z U N G S - O D E R L EB EN SG EFA H R . T R EN N EN S I E A L L E EL EK T R I SC H EN A N S C H Lэ S S E VO N D E R S PA N N U N GS V ER SO RG U N G B E VO R S I E A R B E I T E N A N D E M G ER дT AU S Fэ H R EN.

WA R N I N G :

H E AV Y O B J EC T. TO AVO I D M U S C L E S T R A I N O R B AC K I N J U RY, U S E L I F T I N G A I DS A N D P RO P E R L I F T I N G T EC H N I Q U ES W H EN R E M O V I N G O R R E P L A C I N G.

A LE R TE:

O B J E T LO U R D. P O U R E V ITER U N E TEN SION M U SCU L A I R E O U U N M A L D E D O S, U T I L I S E R D ES A I D ES E T D ES T EC H N I Q U ES D E L E VA G E A P P R O P R I E E S P O U R L'EN L E V EM EN T O U L E DEPL AC EM EN T.

A DV E R T E N C I A :

O B J E TO PES A D O. PA R A E V I TA R U N SO B R E- ES FU ER ZO M U SCU L A R O DA я O Fм S I CO, U T I L I Z E L A AY U DA D E EL E VA D O R ES Y T иC N I C A S A PRO PI A DA S PA R A EL M A N E J O D E O B J E TOS PES A D OS, CUA N D O LO T R A N S P O RT E, D E S P L A Z E O CO N S I D E R E REEM PL A Z A R LO.

AC H T U N G :

SC H W ER ES O B J EK T. Z U R V E R M E I D U N G VO N M USK EL ZERRU N GEN OD ER R э C K EN SC H д D EN B E I M T R A N S P O RT G E E I G N E T E H U B VO R- R I C H T U N G E N U N D H E B E T EC H N I K E N V E RW E N D E N .

WA R N I N G :

R E A D A N D U N D ER S TA N D O PER ATO R ' S M A N UA L B EFO R E U S I N G T H I S M AC H I N E. FA I LU R E TO FO L LOW O PER AT I N G I N S T R U C T I O N S CO U L D R ESU LT I N I N J U RY O R DA M AG E TO EQ U I PM EN T.

A LE R TE:

L I R E E T CO M P R E N D R E L E M A N U EL D'O PER AT I O N A VA N T D ' U T I L I S E R C E T T E M AC H I N E . N E PA S SU I V R E L ES I N S T RU C T I O N S D'O PER AT I O N PEU T C AU S ER D ES B L ES SU R ES O U D ES D EGAT S A L'EQ U I PEM EN T.

A DV E R T E N C I A :

L E A , ES T U D I E, Y EN T I EN DA B I EN L ES EN U N D V ER S T EH EN S I E E L M A N UA L D E O P E R AC I O N , D I E B ED I EN U N GS A N L EIT U N G A N T ES D E U S A R ES TA B E VO R S I E DA S G ER дT I N B E T R I EB M AQ U I N A R I A . U N A FA L L A P O R N E H M E N . FE H L B E D I E N U N G E N N O S EG U I R L A S I N S T RU CC I O N ES Kж N N EN Z U V ER L E T Z U N G EN O PER AT I VA S, PU D I ER A R ESU LTA R Fэ H R EN O D ER D I E AU SRэ ST U N G E N DA я O O P E R J U I CO D E L BESC H д D I G EN. EQ U I P O.

AC H T U N G :

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UNPACKING THE CONTROLLER
Inspect for any obvious damage
If the SPCe is damaged in any way, a claim should be filed with the carrier immediately and notification given to Gamma Vacuum. If equipment must be retuned for inspec tion or repair, obtain authorization from Gamma Vacuum prior to shipping. Contact Gamma Vacuum for authorization and return instruc tions.

INSTALL ATION
NOTES: The SPCe can be mounted in a standard 19 in. (48.3 cm) rack or used as a free-standing unit. Optional 19-in. Rack Adapter Kit (par t 310 057) and Half-Rack Adapter Kit (par t 360242) are available. When installing, make sure the rear power cord is accessible. Maintain a 2.52 in. (64 mm) clearance behind controllers for cable bend radius and proper air flow. Maintain a .125 in. (3 mm) gap bet ween ver tically mounted controllers. This gap is designed in the rack mount kit, and they can be mounted directly above or below each other. Position the control so that the power plug can be reached to disconnect power. CAUTION: This equipment uses a high voltage, detachable power supply cord. Do not r e p l a c e w i t h in a d e q u a t e l y r a t e d s u p p l y cords.

Check the equipment received
Ensure that all items shipped have been received. If any items are missing, notif y the carrier and Gamma Vacuum. Save all packaging material for inspection.

SAFET Y NOTICES
1. To avoid personal injur y, do no per form any installation or ser vice unless qualified to do so. Installation should be per formed by qualified, authorized personnel who have experience working with voltages greater than 50 volts. 2. Do not open the SPCe case under any circumstances. There are no ser viceable par ts inside the SPCe, and voltages over 50 0 0V are present. In the event that the SPCe requires at tention, return it to Gamma Vacuum. 3. Do not disconnect the high-voltage cable with the power on. Af ter turning of f the SPCe, allow at least one minute before disconnecting electrical equipment. 4. Do not operate the SPCe without a proper elec trical ground or near water. The SPCe may be damaged and its safet y reduced, if it is operated outside specifications. 5. In the event that this unit is not used in accordance with its intended purpose of controlling an ion pump, safet y and protection requirements are subjec ted to change and not specified by the manufacturer.

CAUTION: Remove all metal jewelr y prior to working with any potential electrical hazards.

Required Items
You will need the following items to install the controller: 1. A 3-wire, detachable, universal input power cable (included). 2. A high voltage (HV ) cable for each pump (ordered separately). 3. A safet y ground cable for each pump.

Installation Procedure
1. Place the controller in its location and secure as necessar y. 2. Connect the safet y ground cable to the pump and the safet y ground stud at the SPCe rear panel. 3. Connect the high voltage cable to the ion pump and the high voltage connector on the SPCe rear panel (J501). 4. If you have the optional SAFECONN feature, an additional connector is par t of the HV cable. Connect it to the SAFECONN connector (J401). 5. Verif y input voltage requirements, and then connect the detachable universal input power adapter cable to the input power receptacle on the SPCe rear panel. 6. Connect the power adapter mains cable to A /C power source.

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OPER ATION
Front Panel

High Voltage Operation (Quick Star t)
Prior to star ting the ion pump, confirm the following: The controller and connected ion pumps are grounded with a redundant grounding wire. The high voltage cable is at tached to the controller and the ion pump. The controller 's high voltage output has the correct output polarit y for the ion pump (positive voltage for diode pump and negative voltage for triode pump). Evacuate the Vacuum System 1. Rough pump down to 1x10 -4 Torr or less (the lower the bet ter). See R o u g h P u m p m a n u al f o r d e t a il s . 2. Ensure contaminants do not exist in the system. 3. If an ion pump is used or has been exposed to atmospheric pressure, it may be necessar y to bake the pump into the roughing pump to achieve the best pressure. See the Operation section in t h e P u m p m a n u al f o r d e t a il s . St a r tin g t h e I o n P um p 1. If the ion pump size has not been entered into the System Menu, enter the ion pump size. The SPCe will not star t until the ion pump size has been entered. 2. Press and hold High Voltage on the front panel for 1-2 seconds. Sto p pin g t h e I o n P um p Press High Voltage on the front panel to disable high voltage.

LED Indicators and LCD Display LEDs indicate the status of the main power, high voltage, and the set point. The LCD displays operation parameters, messages, and menu options. During ion pump operation, the screen displays voltage, current, and pressure. One of these three values is displayed larger than the other t wo; this can be changed by pressing the lef t and right arrow keys. Sof t Keys M ain Power: Turns on and of f the controller. High Voltage: Enables high voltage when pressed and held for 1-2 seconds. OK and arrow keys: Open and navigate the configuration menus, and commit changes. NOTE: Some keys may be disabled by a serial command when the controller is connec ted to a computer or terminal.

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DISPL AY MENU
Operation parameters, messages, and menu options are shown on the LCD display.

System Information Menu (Sys)

D i s p l a y D u r i n g I o n P u m p O p e r a t io n
When the ion pump is in operation, the SPCe displays voltage, current, and pressure.

Size The Size parameter must be set prior to high voltage operation. Set ting the correct pump size allows the controller to properly monitor power delivered to the ion pump and calculate pressure.

A c c e s sin g M a in M e n u S e t t in g s
The M ain menu categories are: System, Output, Supply, Communications, Serial, Ethernet, Configuration, Diagnostics, and SPC. To access and navigate the M ain menu: Press OK to access the M ain menu. Press the lef t and right arrow keys to navigate through the Main menu. Press the up and down arrow keys to navigate through the dropd ow n m e n u s . Press OK to select the highlighted menu item. Pressure is calculated using the following current-to-pressure calculation: Pressure = (0.066 x Amps x (5600/volts) x Units x Cal Factor) Pump Size

Amps = Current reading in Amps volts = Voltage reading in volts (SPCe is variable) Units = Conversion factor ( Torr = 1, mbar = 1.33, Pascal = 133) Cal Factor = MPCe/LPCe programmed calibration factor (t ypically set to 1) Pump Size = The size of the ion pump is liters per second (l/s) Units T h e U n i t s p a r a m e t e r ch a n g e s t h e d i s p l a y e d u n i t o f m e a s u r e m e n t f o r pressure. It can be changed to display in Torr, mBar, or Pascal. ( Torr is the default.)

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Setpoint On Point: The Setpoint relay will ac tivate when the pressure is equal to or above this pressure. Of f Point: The Setpoint will deac tivate when the pressure is equal to or below this pressure. The Of f Point pressure must be equal to or greater than the On Point. When the Of f Point value is set to 0.1e-10, the Of f Point value will be ignored, and once the Setpoint is ac tive, the Setpoint will remain active independent of the pressure thereaf ter. Error: The Setpoint will turn on when the SPCe has an error condition.

Cal Factor = MPCe/LPCe programmed calibration factor (t ypically set to 1) Pump Size = The size of the ion pump is liters per second (l/s)

High Voltage Output Menu (Output)

NOTE: If an asterisk (*) is present, a pump size has not been entered into the controller. Voltage The Voltage pa r an g e o f 3 0 0 0 default voltage default voltage rameter sets the output voltage. It can be set in the to 70 0 0 VDC. For ion pumps at 5 l/s or less, the is 50 0 0 VDC. For ion pumps larger than 5 l/s, the is 70 0 0 VDC.

NOTE: The default voltage for ion pumps at 5 l/s or less but with 5 K V feedthrough is 70 0 0 VDC.

Factor The calibration factor is a variable used in the current-to-pres calculation. The default value is one. Changing this value will a linear relationship with respec t to pressure. This set ting can changed, for example, when calibrating the SPCe pressure to known gague pressure.

s ur e have be a

Current The Current parameter sets the output current. The maximum current output is limited based on the size of the ion pump programmed into the controller. The default is 2 mA per l/s.

Pressure is calculated using the following current-to-pressure calculation: Pressure = (0.066 x Amps x (5600/volts) x Units x Cal Factor) Pump Size

Amps = Current reading in Amps volts = Voltage reading in volts (SPCe is variable) Units = Conversion fac tor ( Torr = 1, mbar = 1.33, Pascal = 133) 6


Foldback Voltage Feature With the Foldback feature enabled, the SPCe will reduce the voltage once a specified pressure is reached. The specified pressure can be set in the range of 1x10 -5 to 1x10 -12 Torr. The default is 9x10 -9 Torr. The Foldback voltage can be programmed in the range of 30 0 0V to 690 0V, done in 10 0V increments. The default voltage is 350 0V.

Power Loss Recover (Auto HV ) The sof t ware contains a power loss recover y feature to restar t the system if the system was turned of f due to a power failure. Disabled (default option): If input power is disrupted, the controller will not power up when input power is restored. P r e s s u r e o r Cu r r e n t O u t p u t S e t t i n g ( M o n i t o r ) The SPCe can be monitored via the miscellaneous I/O por t (J1). This parameter determines the pressure or current output. Selectable values are: Pressure: Logarithmic Current: Logarithmic Current: 1VDC per 1nA Current: 1VDC per 10nA Current: 1VDC per 10 0nA Current: 1VDC per 1uA Current: 1VDC per 10uA Current: 1VDC per 10 0uA Current: 1VDC per 1mA Current: 1VDC per 10mA MidiVac Emulation The logarithmic output calculates the log base 10 of the measurement (current or pressure) and adds an of fset in make the voltage output positive. ( The Log base 10 of a than 1 is negative.) When logarithmic output is selec ted, must also be specified. The higher the of fset value, the h output. s el e c te d o r d e r to n um b e r l e s s an o f f s e t i gh e r t h e Enabled: If HV is on and input power is disrupted, the controller will power up and will turn on HV when input power is restored. If HV is of f and input power is disrupted, the controller will power up, but it will not turn on HV when input power is restored. Power: If the input power is disrupted, the controller will power up, but will not turn on the HV when input power is restored. This is independent on the HV on/of f state. Normally, when DC power is applied to the SPCe, the SPCe does not star t until the Power but ton is pressed. In the case where power loss recover y criteria are satisfied (see above), the SPCe will turn on when DC power is applied and star t high voltage.

High Voltage Enable (HVE) This parameter controls the high voltage on/of f via the HVE interlock signal. When enabled, the SPCe is controlled by a signal on the miscellaneous I/O por t (J1) connector. If the signal is High, high voltage will enable. Disabled (default option): Pin 8 on the J1 misc. I/O connector on the rear panel does not have a function. Intrlock: Pin (+3.3VDC t by the user, dis ab l e s H V 8 ser ves as the interlock o +12VDC) on this pin e b u t d o e s n o t t ur n o n H V o p e r a t i o n -- us e r c a n n o t function. Logic high n a b l e s H V t o b e t ur n e d o n automatically. Logic low turn on HV.

Supply Menu (Supply)

On/Of f: Pin 8 ser ves as the on/of f switch function. Logic high turns on HV. Logic low turns of f HV.

Arc Detection (Arc) Arc detection provides protec tion for the ion pump by lowering high voltage during arcing. The default set ting is of f. 7


B a t t e r y M o d e ( B a t t e r y) Disables or enables bat ter y mode. Disabled (default option): The input power voltage must be in the +22 to +26VDC range in order to run HV. Enabled: The input power voltage can be outside this range.

Address T h i s p a r a m e t e r i s u s e d t o s e t t h e S P C e s e r i al a d d r e s s . T h e d e f aul t value is 5.

Communications Mode (Comm)

Handshaking This parameter is used to set serial handshaking. The default value is set to disabled. R S Pr oto c ol This parameter allows protocol selec tion for remote communications. The available options are listed below.

Serial Parameters Menu (Serial)

Mode There are three user input modes to the SPCe. They are changed by selecting Mode on the Comm menu. Selec t the t ype of communication for the controller. Local: The controller only accepts change commands made via the keypad. The controller will accept read only commands via serial/Ethernet. It will not, however, accept write/change commands via serial/Ethernet. Remote: The controller will accept all serial and Ethernet commands. When remote mode is ac tivated, the keypad is locked. To unlock the keypad, press and hold down arrow key. Note, when keypad is unlocked, the communication mode is set to full. To lock the keypad, press and hold down arrow key or set communication mode to remote. Message "Keypad locked" is shown on the screen. Full: The controller will accept all commands from the keypad and serial/Ethernet.

S W Pr oto c ol T h i s p a r a m e t e r ch o o s e s t h e c o m m a n d s e t u s e d f o r r e m o t e commands.

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B a u d R a te ( B a u d) This parameter is used to set the serial baud rate of the SPCe. The default value is 11520 0.

D H C P & I P A d d r e s s ( A d d r) The SPCe is capable of acting as a DHCP (Dynamic Host Configuration Protocol) client. When enabled as a DHCP client, the SPCe will obtain needed net work information from a DHCP ser ver. When DHCP is disabled, the user may change the SPCe Ethernet address. Currently IP v4 is the only suppor ted format.

Parit y This parameter is used to set the parit y par t y check of the SPCe. The default value is None. S u b n e t M a s k( M a s k) When DHCP is disabled, the user may change the Ethernet subnet mask.

D a t a B it s This parameter is used to set the serial data bits of the SPCe. The d e f aul t v alu e i s 8 . D a t a a n d Sto p B it s This parameter is used to set the stop bits of the SPCe. The default value is 1. G a t e w a y (G a t e w y ) When DHCP is disabled, the user may change the SPCe Ethernet g a t ew a y a d dr e s s.

Ethernet Parameters Menu (Ethnt)

M AC Address (M AC) This screen shows the controller 's M AC address.

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Configuration Menu (Config)

Diagnostics Menu (Diag)

Contrast This function is used to adjust the contrast of the display. Use the arrow keys to adjust the screen contrast.

Zero Offset Calibrate Supply (Calibrate) Prior to operating an ion pump, the controller should be calibrated to account for electrical noise in the system. This provides a more accurate current measurement given all site-specific parameters that may be dif ferent than those obser ved during production. When initiated, the controller goes through the calibration steps on screen for reference. Click OK when calibration process is completed.

Pump N a m e This parameter allows the pump name to be changed. Use the up and down arrows to cycle through let ters, numbers, and symbols. Use the lef t and right arrow keys to move the selec tor. F ow l e r - N o r d h ei m Fie l d E mi s sio n A n a l y si s ( F E A ) Analy zing the emission current of an ion pump allows for more accurate pressure readings. This analysis is done using the FowlerNordheim method. Based on this calculation, the SPCe will recommend that a hi-pot be conducted on the ion pump.

LCD Timeout The SPCe's LCD back light can be dimmed to ex tend the life of the display. By enabling this parameter, the back light is dimmed af ter a specified amount of time has passed since the last key press. This feature is of f by default. High Pot (Hi Pot) T h i s f e a t u r e o p e r a t e s t h e i o n p u m p in a h i g h - p o t m o d e w h e r e the pump voltage can per form in the range of 10.5kV for hi-pot cleaning of an ion pump. The ion pump will at tempt to reach a preset voltage up to 10.5kV.

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Supply Jump Star t (Jump Mode) Enabling Jump Star t causes the SPCe to increase the voltage to the set value when initially star ting the ion pump. This causes the ion pump to potentially arc from cathode to anode, which creates elec trons within the ion pump. These elec trons star t the initial elec tron charge within the pump. This feature is useful when star ting smaller pumps that are ver y low in pressure when the pump is turned on (for example af ter a long turbo bake).

Events During operation, the SPCe records various vacuum events that occur (shor t circuit, excessive arcing, etc). These event are recorded and viewable. The event description, time, voltage, current, and pressure are recorded.

SPC

Update Firmware (Update) The SPCe firmware can be updated via serial cable or ethernet. The latest version of SPCe sof t ware is downloadable from w w w.gammavacuum.com. Reference Ser vice Bulletin 0 0.056.092 in that download for full details.

Technician Features ( Tech) This is the technician screen for the SPCe. High Resolution Mode: This mode can be enabled or disabled. Disabled is the default. When enabled, the pressure value coef ficient, also called significant, has additional digit, i.e. 1.57e10 vs. 1.5e-10. Fan Mode: This mode can be set to on or auto. When set to on, the fan is always on when HV is on. When set to auto, the fan is on when in pump star ting mode and not in pump running mode.

About This screen displays manufacturer, contact, and revision information.

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DISPL AY MESSAGES
During operation, the SPCe may detec t and repor t a number of possible operating conditions. For example, the SAFECONN connector may become disconnected, the vacuum may fail, or the ion-pump may have a problem. These conditions are repor ted by the following messages on the display:

D is p l a y M e s s a g e
01: 02: 03: 04: 05: 06: 07: 10: 12: 19: 20 : 21: Cooldown Cycles > 3 Vacuum Loss Shor t Circuit E x c e s s Pr e s s ur e Pump Overload Supply Power > 50W Star t Under Voltage Pump is Arcing Thermal Runaway U n k n ow n E r r o r SAFE_CONN Intrlock H V E I n t e r l o ck

D i s p l a y M e a n in g
Too many cooldown cycles occurred during pump star ting. The voltage dropped below 120 0V while pump was running. Shor t circuit condition has been detected during pump star ting. Excessive pressure condition detected. Pressure greater than 1.0e- 04 Torr detected. (Obsolete star ting with version 1.15.03) Too much power delivered to the pump for the given pump size. Supply output power detected greater than 50W. The voltage did not reach 20 0 0V within the maximum pump star ting time of 5 minutes. Arcing detec ted. Significant drop in voltage detected during pump star ting. (Used internally for troubleshooting.) Safet y interlock connection is not detected. Check safe-conn connection. HVE interlock func tion is active on pin 8 on J1 misc i/o connector. To turn on HV, user must satisf y interlock (3.3VDC to 12VDC on pin 8 on J1 misc i/o connector). HVE on/of f func tion is active on pin 8 on J1 misc i/o connector. Logic high (3.3VDC to 12VDC on pin 8 on J1 misc i/o connector) turns on HV. Logic low turns of HV. Pump size is not set. Supply calibration has not been per formed. Required for accurate current/pressure readings. Supply calibration parameters are outside normal ranges. System reset will clear all parameters to f a c t o r y d e f aul t s . Supply internal temperature is past the threshold. Supply internal temperature too high. HV operation is disabled. Supply current is limited. The limit is set by programming the pump size or manually by the user. Internal data bus error detected. Supply HV control mechanism malfunctioning. On/Of f state is malfunctioning. Supply current control mechanism malfunctioning. Supply current measuring mechanism malfunctioning. Supply HV control mechanism malfunctioning. Voltage output level is malfunctioning. Supply voltage measuring mechanism malfunctioning. Internal boards polarit y mismatch. HV module missing. Input power voltage outside 22-26VDC range. HV operation disabled. When running in bat ter y mode, this restriction is of f.

or 21: HVE Signal Of f 22: Set Pump Size 23: Calibration Needed 24: Reset Required 25: 26: 27: 3 0: 31: 32: 33: 34: 35: 37: 37: 38: Temperature Warning Supply Over Heat Current Limited I n t e r n al B u s E r r o r H V C o n t r o l Er r o r Current Control Err Current Measure Err Voltage Control Err Voltage Measure Err HV Not Installed Input Voltage Error Input Voltage Error

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BACK PANEL OPER ATION

Pin 1 is the relay common, pin 2 is the normally closed, and pin 9 is the normally open contact.

Remote Hardware Option (J1)

Pin 11 is a T TL logic level output (with a 1K resistor in series for protection), which mimics the setpoint relay state. It is high whenever the set point relay is driven.

The SPCe can be controlled by using the miscellaneous I/O 15 -pin sub-d connector.

Pin Function #
1 2 3 4 5 6 7 8 S e t p o in t r e l a y c o m m o n S e t p o in t r e l a y N C GND GND -14V +14V +5V R e m o t e H V En a b l e (3.3 ­12V )

Pin #
9 10 11 12 13 14 15

Function
S e t p o in t r e l a y N O +14V S e t p o in t l o g i c o u t p u t Output current monitor H V e n a b l e m o ni t o r Output voltage monitor +14V

Output Current or Pressure (Pin 12) Pin 12 is a buf fered voltage output that is propor tional to the HV output current and can be used to monitor the HV current. The scaling factor defaults to 1V per 1mA out. This factor is scaleable from the front panel of the SPCe. Logarithmic Current (i) Examples: E xa m p l e 1 O f f s et = 8 Current = 2 X10 -8 (20nA) Step 1: Calculate the log of the current (Log (2 X10 -8) = -7.7) Step 2: Add the of fset value (-7.7 + 8 = 0.3 Volts = Vpin12) E xa m p l e 2 O f f s et = 8 Current = 5X10 -6 (5uA) Step 1: Calculate the log of the current (Log (5X10 -6) = -5.3) Step 2: Add the of fset value (-5.3 + 8 = 2.7 Volts = Vpin12) E xa m p l e 3 O f f s et = 7 Current = 2 X10 -8 (20nA) Step 1: Calculate the log of the current (Log (2 X10 - 8) = -7.7) Step 2: Add the of fset value (-7.7 + 7 = - 0.7 Volts, Vpin12 therefore = 0 and is at the bot tom of its range) Logarithmic Pressure (p) Examples E xa m p l e 1 Of fset = 10 Pressure = 1X10 -9 Torr/mbar/pascal Step 1: Calculate the log of the pressure (Log (1X10 -9) = -9) Step 2: Add the of fset value (-9 + 10 = 1 Volt = Vpin12) 13

Setpoint Relay (Pins 1,2,9, and 11) The setpoint relay is driven while either of the following t wo sets of conditions are true: 1. The SPCe unit is powered up. 2. The HV is enabled. 3. The output voltage is high enough for a valid pressure to be read. By default, this is greater than 2kV. 4. The calculated pressure is lower than the user-selec ted setpoint pressure. - OR 1. The SPCe unit is powered up. 2. The SPCe unit is in error mode. NOTE: There is a delay af ter turning on the HV until the SPCe considers the calculated pressure reading to be valid. This reading can take up to one minute. The setpoint relay will not be driven during this period.


E xa m p l e 2 Of fset = 11 Pressure = 6X10 -8 Torr/mbar/pascal Step 1: Calculate the log of the pressure (Log (6X10 ) = -7.2) Step 2: Add the of fset value (-7.2 + 11 = 3.8 Volts = Vpin12)
-8

SERIAL (J3) AND ETHERNET (J2) OPER ATION
E t h e r n e t Co n n e c t o r

High Voltage Monitoring (Pin 13) Pin 13 can be used to determine if the HV is enabled. to drive a relay or logic signals as required. When the pin 13 is pulled down to 0V and can sink 10 0mA . Wh disabled, pin 13 is pulled up to +14V through a 4K7 r

I t is d e s i gn e d HV is enabled, e n t h e H V is esistor.

V+ R1

Pin 13

A Telnet session may be established to por t TCP 23, allowing remote control of the SPCe in the same way as serial communications link. Once the Telnet session is established, commands may be issued in t h e fo r m a t : spc For example, to set the pump size to 120 0 using the command CMD_ HV_ SET_ PUMPSIZE, issue the following command in the Telnet session: spc 12 120 0 Unlike the serial command protocol, no opening tilde, no address field, and no checksum are required. It is impor tant that the command code be t wo digits. For example, command code 1 must be issued as 01.

Output Voltage Monitoring (Pin 14) Pin 14 is a buf fered voltage output that is propor tional to the HV output voltage and can be used to monitor the HV. The scaling fac tor is 1V per 1K V out.

Power Supplies
The following power supply pins are available on the misc. I/O connec tor. These power supplies are not protec ted and should be used with care. Do not at tempt to power the SPCe by connecting e x t e r n al p ow e r s u p p li e s t o t h e s e p in s . Pin 5 is connected to (approximately) ­12V. Pin 10, pin 6, and pin 15 are connec ted to (approximately) +12V. Pin 7 is connected to (approximately) +5V. Pin 3 and pin 4 are grounded. The +14V and ­14V supplies are regulated but not calibrated -- in prac tice they may var y over the range 12V to 15V or so. Do not draw more than 50mA from any of these supplies, and do not injec t significant levels of noise onto them. The +5V supply may range from +4.9V to +5.1V. Do not draw more than 10 0mA from this supply.

S e r i a l Co n n e c t o r

J3 is a 9-pin, female DE-9 connector used to route serial inter face signals. The default set ting is RS -232. Alternate configurations are RS - 485 (full or half duplex) and RS - 422. Specific OEM configurations may also be available upon request.

RS -232
RXD TXD GND 2 3 5

RS - 422
+R X -R X GND 3 7 5

R S - 4 85 Full Duplex Operation
+T X -T X GND +R X -R X 2 8 5 3 7

R S - 4 85 H a l f D u p l ex Operation
+T X /+R X -T X /- R X GND 2 8 5

NOTE: RS 422 is not bidirectional.

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Standard
Devices cannot send data until they have been addressed by the controlling computer. A t ypical command exchange for a device would be: 1. The computer sends a command. 2. Devices read the address. 3. When a device recognizes its address, it decodes the message and returns an acknowledgement to the computer, along with any data that was requested. The serial communications por t set tings such as number of data/star t/stop bits, parit y, etc. are defined subsequently. Ever y communications exchange bet ween the controlling computer and a Gamma Vacuum controller using the standard inter face consists of a command packet (sent by the controlling computer), and a response packet (returned by the remote controller). All charac ters in these packets are A SCII. All fields are separated by a space (not required bet ween the checksum and terminator). Hexadecimal numbers can be represented in either upper or lower case.

Cabling
The SPCe functions as a DTE (Data Terminal Equipment) device. When the controller is connec ted to another DTE device (such as a personal computer), a null modem serial cable is required to connec t the devices. The null modem cable swaps the signal and control lines so that receive and transmit are properly connected. The controller is equipped with a nine-pin female (DCE) D -sub connec tor protruding from the chassis rear.

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Command Packet Structure
The command packet is made up of at least five fields and contains information needed for a remote controller to per form a command. The minimum command packet (single command with no data) is 11 by tes long and consists of the following fields: 1 by t e 1 by t e

2 by t e s 1 by t e 2 by t e s 1 by t e 2 by t e s 1 by t e

Field

Size

Comment

1. START Character 1 charac ter (by te) A SCII character is `~' ( TILDA) Star t is the first by te in the command packet and tells remote controllers to star t decoding a message. It should be implemented as a #define, so it can be changed if necessar y. A s a #define, the character is rarely changed because it is hard coded into the SPCe. 2. ADDRESS 2 h e x ch a r a c t e r s Range 0 0 through FF This field should be filled in with the hexadecimal representation of the integer address of the controller. The range provides 255 unique addresses. Only 32 devices may reside on the same serial por t due to hardware loading limitations. 3. COM M AND CODE 2 h e x ch a r a c t e r s Range 0 0 through FF This field is one of 255 possible hexadecimal numbers, which is t ypically an index into a table of functions on the remote controller. Commands should be implemented as #defines with integers bet ween 0 and 255. The integer value must be conver ted into A SCII hex before placement into the command packet charac ter array. The command code must be t wo hex digits, even if the first is a zero. 4. DATA field(s) (optional) A s ne e de d ACSII printable characters only Data field(s) are for any commands that have a data value. For instance, a command to set a beam voltage in some unit would probably consist of a command to set the beam voltage, along with a value of beam voltage. If the command had more than one data value associated with it, such as set ting an X and a Y value in a unit, the command field could be followed by t wo data fields ( X and Y ) separated by a space bet ween them. All data must be sent in A SCII printable format (no binar y or "control" characters). There is no limit on the number or size of data fields. It is up to the remote unit designer to keep practicalit y in mind when determining these fields. A data field is not required for all commands. 5. CHECKSUM 2 h e x ch a r a c t e r s Computed checksum of packet The calculated checksum must have its value in A SCII hexadecimal notation. It is calculated by adding the decimal value of all characters in the packet (excluding star t, checksum, and terminator), and then dividing the result by 256. The integer remainder conver ted to t wo A SCII hex digits is the checksum. When a remote device receives a packet, the passed checksum is compared with a computed checksum, and if they do not match, the device discards the packet. 6. Terminator character 2 h e x ch a r a c t e r s A S C I I c a r r i a g e r e t ur n This field is an A SCII carriage return placed at the end of a command packet. This character is not the newline character " \n", but can be used in string assign statements as " \r ". There is not a space bet ween the checksum and terminator field. Command Packet Example Command to be sent is "0x01" - GET CONTROLLER MODEL Serial address of the controller is 5. Command packet "~ 05 01 0 0" where "" is return carriage character. Command packet in A SCII hexadecimal "7e 20 30 35 20 30 31 20 30 30 0 D" Response to "0x01" - GET CONTROLLER MODEL "05 OK 0 0 DIGITEL SPCe 46" Where "" is the return carriage character. NOTE: Command checksum is set to "0 0" to bypass the checksum field verification by the controller.

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Decoding the Command Packet
An SPCe operates in one of three modes: monitor, receive, and respond. Receipt of data is interrupt driven or other wise multiplexed, so other tasks are per formed by the unit 's microprocessor. When the controller receives a command packet, it continues monitoring for new commands while the current one is carried out. 1. MONITOR: The controller monitors serial data traf fic. When a "star t " character is detec ted, the controller changes to the RECEIVE MODE. 2. RECEIVE: Af ter receiving star t, the controller tests subsequent characters for a valid command packet. This mode must have a count down timer associated with it, which is a predetermined time for a valid command packet SPCe to be received. Fur thermore, if another star t charac ter is received while in this mode, (i.e. the first star t character was ac tually par t of a command packet for a dif ferent device) the controller responds by going back to the beginning of the RECEIVE mode with a fresh timer set ting. If a command packet is not received within the allowed time frame or if the checksum does not match, the timer is disabled, the packet is discarded, and the mode is reset back to MONITOR. Once a command packet is received, the mode changes to RESPOND. The only way the controller can get to a RESPOND is by receiving: a valid star t character followed by a space, a 2-by te hex value matching the controller 's address followed by a space, at least one 2-charac ter hex value command followed by a space, a 2-by te hex checksum matching the command packet 's actual checksum, and a carriage return terminator. 3. RESPOND: The controlling computer is in count-down timer mode waiting for a response from the SPCe. All controllers must respond within 50 0 milliseconds once a valid command has been received. A valid response could be an error code indicating that the controller is BUSY with a previous command or an acknowledging response packet. Af ter returning a response packet, the unit returns to MONITOR and executes the command. If the controlling computer needs to verif y that the last command was successful, it sends a command to the unit requesting status feedback.

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Response Packet
The response packet is made up of at least five fields an was either recognized and accepted (STATUS = "OK" ), a RESPONSE CODE that is used either to pass an error return of "OK". The minimum response packet (simple a by tes long.

2 by t e S 1 by t e 2 by t e s d contains information to let the controlling computer or an error condition occurred (STATUS = "ER"). The code (if STATUS = "ER"), or is available for each unit cknowledgment with no data) would consist of the foll 2 by t e s 1 by t e k n ow t h e minimum t o us e a s ow in g f i e l c o m m a n d r e qu e s t e d packet also contains needed for a STATUS ds, and would be 12 1 by t e

1 by t e

2 by t e s

NOTE: When a device responds to the controlling computer, that response has been requested and is expected by the computer. For this reason, a specific "star t " charac ter is not required in the response packet. The address of the responding unit is included in the packet, so the controlling computer can verif y it to make the data exchange easier to view on an A SCII terminal.

Field

Size

Comment

1. ADDRESS of unit 2 h e x ch a r a c t e r s Range 0 0 through FF This field is filled in with the hexadecimal representation of the integer address of the unit. The range provides 255 unique addresses. The controlling computer will use this field to determine that the correct remote unit is responding. 2. STATUS T hi s f i e l d i s e r r o r c o n di command. 3. RESPONSE CODE 2 h e x ch a r a c t e r s Range 0 0 through FF For an error condition with an incoming command, this field returns an error number to the controlling computer. For non-error conditions, this field returns a status by te/word to the controlling computer, which is defined in the SPCE and can var y with the needs of individual commands within a unit, as well as var ying from unit to unit. Data must be in A SCII printable format. 4. DATA field(s) (optional) A s ne e de d ACSII printable characters only Data field(s) are used to respond to commands requesting data. For example, a command requesting the current voltage set ting in a unit would have the reading placed in a data field. Data must be in A SCII printable format. There is no limit on the number or size of data fields. Data is not required for all responses. 5. CHECKSUM 2 h e x ch a r a c t e r s Computed checksum of packet Checksum contains a simple computed checksum of the command packet. The value must be in A SCII hexadecimal notation. The checksum is calculated by adding the decimal value of all charac ters in this packet (including the space before the checksum field) and then dividing the result by 256 (base 10). The integer remainder conver ted to t wo A SCII hex digits is the packet checksum. When the controlling computer receives a response packet, the passed checksum is conver ted from the hex value to a binar y integer and compared with a computed checksum. If they are not the same, considers it an error, and repeats the last command. When qualified technicians are testing the remote unit using a dumb terminal this returned checksum value can be ignored. 6. Terminator character 2 h e x ch a r a c t e r s A S C I I c a r r i a g e r e t ur n This field is an A SCII carriage return placed at the end of a packet. This character is not the newline character " \n" which is actually an A SCII linefeed, but can be assigned using the " \r " designation in a string. There is not a space bet ween the checksum and terminator field. M N EMO N I C 2 A S C I I ch a r a c t e r s Either OK or ER made up of t wo A SCII charac ters and is either OK or ER. OK indicates success in recognizing the command. ER indicates an tion, which can mean that the command is invalid, or the remote unit received the command but is still busy with a previous Specific information about ER is repor ted in the RESPONSE CODE field.

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RS 232/422/485 General Commands H ex Description Command
01 02 07 FF MO D EL N U M B ER A description of the controller. VERSION Firmware revision level. M A S T E R R ES E T Executes a complete sof t ware reset. M A STER RESET (legacy) Executes a complete sof t ware reset (legacy MPC suppor t command). S E T A RC D E T EC T Enables/disables arc detec tion. G E T A RC D E T EC T Reads the current arc detec tion set ting. R E A D CU R R ENT Reads pump current. R E A D P R ES SU R E Reads pump pressure. RE AD VOLTAGE Reads pump voltage. GET SUPPLY STATUS R e a d s v a r i o u s c o n d i t i o n al m e s s a g e s displayed on the front panel. S E T P R ES S U N I T S Specifies the default pressure units. G E T PU M P S I Z E Reads pump size in liters per second. S E T PU M P S I Z E Sets pump size in liters per second. GET C AL FAC TOR R e a d s t h e c alib r a t i o n f a c t o r t h a t modifies pressure. SET C AL FAC TOR S e t s t h e c alib r a t i o n f a c t o r t h a t m o d i f i e s pressure. SET AUTO - RESTART Sets supply to automatically restar t on power up. GET AUTO RESTART R e a d s au t o r e s t a r t s t a t u s o f s u p p li e s . START PUMP Enables high voltage. STOP PUMP Disables high voltage. G E T SE TPO I NT Reads configuration of the set point.

Data Field

Response
D I G I T E L S P Ce DIGITEL FIR MWARE: X . X X

Data/Response Description

X . X X is the numerical revision level for m a j o r ch a n g e s N o r e s p o n s e d u e t o in i t i ali z a t i o n o f controller N o r e s p o n s e d u e t o in i t i ali z a t i o n o f controller

91 92 0A 0B 0C 0D

" YES" or "NO" " YES" or "NO" None or "1" None or "1" None or "1" None or "1" X . XE-X X A MPS X . XE-X X UUU XXXX Various 0.1E- 09 = HV OFF STATUS UUU is pressure units ( Torr, MBR, or PA) 0.1E-10 = HV OFF STATUS X X X X indicates the voltage In volts S e e D i s p l a y M e s s a g e s s e c t i o n o f t hi s manual U i s p r e s s ur e uni t s s s s s L /S U = T ( Torr), M (Mbar), P (Pascal) s s s s i s p um p s i z e s s s s i s p um p s i z e n.nn n.nn range is 0.0 0 ­ 9.99

0E 11 12 1D

U None or "1" ssss

1E

n.nn

n.nn range is 0.0 0 ­ 9.99

33

" YES" or "NO" " YES" or "NO" None or "1" None or "1" None or "1" N, E, X . XE-X X, Y.YE-Y Y, O N = S e t p o in t N u m b e r E = Enabled (1 = yes, 0 = no) X . XE-X X = On Pressure Y.YE-Y Y = Of f Pressure O = Setpoint On (1 = yes, 0 = no) N = S e t p o in t N u m b e r S = Supply (0 = Inactive, 1 = Supply 1) X . XE-X X = On Pressure Y.YE-Y Y = Of f Pressure

34 37 38 3C

3D

SE T SE TPO I NT Configures a specified set point.

N , S, X.X E-X X, Y.YE-Y Y

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H ex Description Command
44 LOCK KE YPAD E s t a b li s h e d R e m o t e M o d e a n d l o ck s t h e f r o n t p a n e l e x c e p t H V o f f a n d p ow e r keys. UNLOCK KE YPAD Unlocks all front panel keys. GET ANALOG MODE Reads the current/pressure analog output mode.

Data Field

Response

Data/Response Description

45 50

0-10 (7 is MPC only)

0 1 2 3

= = = =

Logarithmic pressure Logarithmic current Volts per 1.0uA Volts per 10.0uA

51

SET ANALOG MODE Sets the current/pressure analog output mode.

n

4 = Volts per 10 0.0uA 5 = Volts per 1.0mA 6 = Volts per 10.0mA 8 = Volts per 1.0 nA 9 = Volts per 10.0 nA 10 = Volts per 10 0.0 nA n = 0 -10, 7 is MPC only 0 = Logarithmic pressure 1 = Logarithmic current 2 = Volts per 1.0uA 3 = Volts per 10.0uA 4 = Volts per 10 0.0uA 5 = Volts per 1.0mA 6 = Volts per 10.0mA 8 = Volts per 1.0 nA 9 = Volts per 10.0 nA 10 = Volts per 10 0.0 nA " YES" or "NO" nnn nnn = new serial address (0 0 0 -255) n 0 1 2 = = = = 0 -2 dis ab l e d e n a b l e au t o H V r e s t a r t enable auto power recover y

61 62 68

69

IS HIGH VOLTAGE ON Indicates if the high voltage enabled S E T S E R I A L A D D R ES S Sets the controllers serial address. SET HV AUTORECOVERY Sets the power auto recover y mode. For Auto HV restar t, if HV is on and power interrupted, unit will power up and star t HV. For auto power, if HV was on and power interrupted, unit will power up only (does not star t HV ). GET HV AUTORECOVERY Displays the mode of Auto Recover y.

None or "1"

n

n

n 0 1 2

= = = =

0 -2 dis ab l e d e n a b l e au t o H V r e s t a r t enable auto power recover y

8F

SET_ FIR MWARE_UPDATE S e t s t h e S P C e t o f l a s h l o a d m o d e fo r firmware updates. SET COM M MODE Sets the communication mode to local, full, or remote. GET COM M MODE Returns the current communication mode.

D3

N

D4

N

N 0 1 2 N 0 1 2

is = = = is = = =

t h e mo d e L o c al R e m ot e Full t h e mo d e L o c al R e m ot e Full

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H ex Description Command
46 GET/SET SERIAL COM M Gets/Sets baud rate, parit y, data bits, and stop bits. If no parameters are specified, the current values are returned. GET/SET ETHERNET IP G e t s / S e t s E t h e r n e t I P a d dr e s s. I f n o parameters are specified, the current values are returned. GET/SET ETHERNET M A SK G et s/ S et s E t h e r n et m as k . I f no parameters are specified, the current values are returned. GET/SET ETHERNET GT W Y G e t s / S e t s E t h e r n e t I P g a t ew a y a d dr e s s. If no parameters are specified, the current values are returned. GET ETHERNET M AC Gets the Ethernet M AC address. SET COM M INTERFACE, Sets the communications inter face to RS232, RS422, RS485, RS485 (full duplex), Ethernet, or USB.

Data Field
N one or "B, P, D, S" (set mode)

Response
N one or "B, P, D, S" (get mode)

Data/Response Description
B P D S = = = = b au d r a t e parit y ("n", "e", "o") data bits ("7", "8") stop bits ("1", "2")

47

N one or "X . X . X . X" (set mode) N one or "X . X . X . X" (set mode) N one or "X . X . X . X" (set mode)

N one or " X . X . X . X " (get mode)

48

N one or " X . X . X . X " (get mode)

49

N one or " X . X . X . X " (get mode)

4A 4B

"X X:X X:X X:X X:X X:X X" N N 0 1 2 3 4 5 = = = = = = = Communication inter face RS232 RS422 RS485 RS485 (full duplex) E t h e r n et USB

4C

4D

INITIATE FE A Begins Fowler- Nordheim field emission analysis. GET FE A DATA Provides Fowler- Nordheim field emission analysis data.

N

"D/N, X . X,YE-Y, ZE-Z,WE-W "

Parameter N = s a m p l e n um b e r Response D = s a m p l e n um b e r N = t o t al n u m b e r o f s a m p l e s X = sample voltage Y = sample current Z=1/X W = log10( Y / X 2)

52 53

54

55

INITIATE HIPOT Begins hi-pot operation. GET/SET HIPOT TARGET "X X X X" Gets/Sets the target output voltage. If (set mode) no parameters are specified, the current values are returned. GET/SET FOLDBACK VOLTS "X X X X" Gets/Sets the foldback voltage. If no (set mode) parameters are specified, the current values are returned. GET/SET FOLDBACK PRES "X X X X" Gets/Sets the foldback pressure. If no (set mode) parameters are specified, the current values are returned.

"X X X X" (get mode)

X X X X = Target voltage

"X X X X" (get mode)

X X X X = Target voltage

"X X X X" (get mode)

X . XE-X X = Target pressure (set mode)

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C R C C h e c k su m E x a m p l e
T h e c o m m a n d t o b e s e n t t o t h e uni t i s 0x01 ­ CMD_ SYS _ MODEL. Full command is: `~ 01 01 X X' + carriage return, where X X is an unknown checksum at this time. NOTE: This command assumes the unit address is set to 1. 1. To calculate command checksum, add decimal values of all characters in the packet, excluding star t, checksum, and terminator. Divide result by 256 and the integer remainder conver ted to t wo A SCII hex digits is the checksum for the command. Characters space 0 1 space 0 0 space Value (Decimal) 32 48 49 32 48 49 32 Total = 290 Value (Hex) 0x 20 0x30 0x31 0x 20 0x30 0x31 0x 20 Total = 0x122

6. Example in decimal, take 1352 mod 256 and result is 72, which conver ted to hex is 0x48. This is the response checksum. Example in hex, take 0x548 mod 0x10 0 and result is 0x 48. This is the response checksum.

S e r i a l Co m m a n d E x a m p l e s
For example, the following strings represent valid commands and checksums, and could be sent by simply t yping them into a terminal. Do not t ype the "" quotes and the spaces are significant. These assume unit address is set to 1. E xa m p l e 1 Command - CMD_ SYS _ MODEL, 0x01 Tx ­ "~ 01 01 22" + carriage return. R x ­ "01 OK 0 0 DIGITEL SPCe 48" + carriage return E xa m p l e 2 Command - CMD_ HV_ RE AD_CURRENT, 0x0A Tx ­ "~ 01 0A 32" + carriage return R x ­ "01 OK 0 0 1.0 E-13 A MPS 91" + carriage return E xa m p l e 3 Command CMD_ HV_ RE AD_ PRESSURE, 0x0 B Tx ­ "~ 01 0 B 33" + carriage return R x ­ "01 OK 0 0 1.0 E-11 TORR A 5" + carriage return E xa m p l e 4 Command CMD_ HV_ RE AD_VOLTAGE, 0x0C Tx ­ "~ 01 0C 34" + carriage return R x ­ "01 OK 0 0 70 0 0 A 2" + carriage return

2. Example in decimal, take 290 mod 256 and result is 34, which conver ted to hex is 0x 22. This is the command checksum. Example in hex, take 0x122 mod 0x10 0 and result is 0x 22. This is the command checksum. 3. The command to be sent to the unit is, `~ 01 01 22' + carriage return. 4. The unit will respond with, '01 OK 0 0 DIGITEL SPCe 48' 5. To verif y checksum for the response, per form similar calculations, Characters 0 1 sp O K sp 0 0 sp D I G I T E L sp S P C e Value (Decimal) 48 49 32 79 75 32 48 48 32 68 73 71 73 84 69 76 32 83 80 67 101 32 Total = 1352 Value (Hex) 0x30 0x31 0x 20 0x4F 0x4B 0x 20 0x30 0x30 0x 20 0x44 0x49 0x47 0x49 0x54 0x45 0x4C 0x 20 0x53 0x50 0x43 0x65 0x 20 Total = 0x548 22

Serial/Ethernet Communications Utilit y Tool
A communications utilit y tool can be downloaded from our website at www.gammavacuum.com. This tool allows for connectivit y testing using the Ethernet and serial communications connections of the SPCe or other DIGITEL controllers. Commands can be sent and responses read for verification of remote operation packets.

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WARR ANT Y & SERVICE
Ser vice
NOTE: More power and current are required to star t p um p s o r p um p s s t a r t e d a t hi g h e r p r e s s ur e s . e x t e n t o f a v a il a b l e r o u g h p u m p in g b e f o r e s t a pump to ex tend the pump's lifetime, improve pressure, and give the most accurate current Cl e a nin g P r o c e d u r e Prior to any cleaning of the SPCe, the m disconnected. Once powered of f, use a 50% isopropyl alcohol solution to clean abrasive cloth will ensure no damage to the unit. l ar g e r i o n Use the full r t in g a n i o n s y s t e m ul t im a t e r e a d in g s .

Warrant y
General Terms Gamma Vacuum warrants to the Buyer that the equipment sold is new equipment, unless previously stated, and is, at the time of shipment to Buyer from Gamma Vacuum, free from defects in material and workmanship. A s Buyer 's sole exclusive remedy under this warrant y, Gamma Vacuum agrees to either repair or replace, at Gamma Vacuum's option and free of par ts charge to Buyer, and par t or par ts which, under proper and normal conditions of use, prove to be defective within t welve (12) months from the date of receipt by buyer. A s expendable items may have a life time of less than one year, their warrant y is subject to reasonable ser vice and will be replaced as determined by Gamma Vacuum. All warrant y claims must be brought to the at tention of Gamma Vacuum within thir t y (30) days of failure to per form. This warrant y does not cover loss, damage, or defects resulting from transpor tation to the buyer 's facilit y, improper or inadequate maintenance by buyer, buyer supplied sof t ware or inter facing, unauthorized modifications of misuse, operation outside of environmental specifications for the equipment or improper site preparation and maintenance. I n - w a r r a n t y r e p a ir e d o r r e p l a c e m e n t p a r t s a r e w a r r a n t e e d o n l y f o r t h e r e m a in in g u n e x p ir e d p o r t i o n t h e o r i g in al w a r r a n t y p e r i o d applicable to the par ts which have been repaired or replaced. Af ter expiration of the applicable warrant y period, the Buyer shall be charged at Gamma Vacuum's then current prices for par ts, labor, and transpor tation. Reasonable care must be used to avoid hazards. Gamma Vacuum expressly disclaims responsibilit y for any loss or damage caused b y t h e u s e o f i t s p r o d u c t s o t h e r t h a n in a c c o r d a n c e w i t h p r o p e r o p e r a t in g a n d s a f e t y p r o c e d u r e s . E XCEPT A S STATED HEREIN, GA M M A VACUUM M AKES NO WARR ANT Y, E XPRESSED OR IMPLIED (EITHER IN FAC T OR BY OPER ATION OF L AW ), STATUTORY OR OTHERWISE: AND, E XCEPT A S STATED HEREIN, GA M M A VACUUM SHALL HAVE NO LIABILIT Y FOR SPECIAL OR CONSEQUENTIAL DA M AGES OF ANY KIND OR FROM ANY C AUSE ARISING OUT OF THE SALE, INSTALL ATION, OR USE OF ANY OF ITS PRODUC TS. Statements made by any Gamma Vacuum, which of this warrant y shall not r e d u c e d t o w r i t in g a n d a person, including representatives of a r e i n c o n s i s t e n t o r in c o n f li c t w i t h t h e t e r m s be binding upon Gamma Vacuum unless pproved by an of ficer of Gamma Vacuum.

a in s p ow e r s h o ul d b e 50% distilled water and the entire unit. A sof t, non the LCD screen and finish of

S e r v ic e Re que s t s Upon notification, Gamma Vacuum will identif y the level of ser vice required. To assist in this process, please provide the following information in as much detail as possible: Par t Number S e r i al N u m b e r Detailed Description of the Vacuum System Hardware Detailed Description of the Vacuum System Process (gas species introduced, ultimate pressure, operational pressure) R e a s o n fo r S e r v i c e R e qu e s t Required Documentation To expedite this process, please for ward this information to ser vice@gammavacuum.com. D ir e c t S up p o r t Prior to recommending replacement par ts or ser vice at our facilit y, Gamma Vacuum can assist with general vacuum issues via e-mail or by telephone at no charge. It is our goal to have vacuum systems func tional with minimal time and financial investment. To do this, our ser vice technicians require as much information as possible about the vacuum system in need of suppor t. To assist in this process, please provide the following information in as much detail as possible: Par t Number S e r i al N u m b e r Detailed Description of the Vacuum System Hardware Detailed Description of the Vacuum System Process (gas species introduced, ultimate pressure, operational pressure) Reason for Suppor t Inquir y To expedite this process, please for ward this information to ser vice@gammavacuum.com or contac t our facilit y direc tly at the numbers below.

Gamma Vacuum may at any time discharge its warrant y as to any o f i t s p r o d u c t s b y r e f u n d in g t h e p u r ch a s e p r i c e a n d t a k in g b a ck t h e products.

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Warrant y Claims Upon notification, Gamma Vacuum will investigate Warrant y Claims. To initiate a Warrant y Claim, please contac t Gamma Vacuum or a representative of Gamma Vacuum direc tly. To assist in this evaluation, please provide the following information in as much detail as possible: Par t Number S e r i al N u m b e r Detailed Description of the Vacuum System Hardware Detailed Description of the Vacuum System Process (gas species introduced, ultimate pressure, operational pressure) Detailed Reason for the Warrant y Claim To expedite this process, please for ward this information to to ser vice@gammavacuum.com.

R e t u r n in g M a t e r i a l
Re t ur n Pr o c e dur e In the event a product requires ser vice, exchange, or return, a Return Material Authorization (R M A) number must be obtained from Gamma Vacuum prior to shipment. R M A numbers can be obtained by calling Gamma Vacuum tollfree. The R M A process will be expedited if any of the following information can be provided: O r i g in al P u r ch a s e O r d e r N u m b e r Gamma Vacuum Sales Order Number Product Order Number and/or Produc t Description P r o d u c t S e r i al N u m b e r All products received for repair or replacement shall be prepaid. Items not labeled with an R M A number will be accepted; however substantial delay in processing may result. A standard restocking fee may apply. NOTE: Prior to issuance of an R M A , the required documents must be submit ted to Gamma Vacuum. R e q ui r e d D o c u m e n t a t i o n During a lifetime of system operation, it is possible that cer tain contaminants, some of which could be hazardous, may be introduced into the vacuum system, thus contaminating the c o m p o n e n t s . P l e a s e c o m p l e t e t h e fo r m o n t h e n e x t p a g e t o i d e n t i f y any known hazardous substances that have been introduced into the vacuum system. This will enable us to evaluate your equipment and determine if we have the facilities to make the repair without risk to employee health and safet y. Return, repairs, or credit will not be authorized until this form has been signed and returned. NOTE: Prior to returning any materials, Gamma Vacuum must issue an R M A . The R M A number should be clearly labeled on all shipping information and packages.

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RETURN M ATERIAL AUTHORIZ ATION FOR M
Thank you for taking the time to complete this form. Please complete this form and return to Gamma Vacuum in electronic format (Adobe PDF format [.pdf ] preferred), or via fax. Digital signatures are acceptable. A s sign e d R M A : Your Reference: CONTACT INFOR M ATION Name: E-mail Address: Phone: Fax: Website: COM PANY INFOR M ATION Company Name: Date: Address:

RETURN INFOR M ATION Type of Product: I o n Pum p Ion Pump Controller Other H a s N ot B e e n E x p os e d H a s B e e n E x p os e d Warrant y Claim S e r v i c e R e qu e s t S h ip p in g E r r o r Evaluation Other Par t Number: Description: S e r i al N u m b e r : Original P u r ch a s e O r d e r : Your Reference:

Contaminant Status*: Claim Status:

Reason for Return:

A dditional Information:

Signature of Cer tif ying Official: Name and Title of Cer tif ying Official:

* Contaminants to vacuum systems are defined as: any substance that, because of its proper ties, is not compatible with ultra-high vacuum (U H V ) operation. Some of these are: silicon (in the form of silicones), sulfur, cadmium, fluorine and chlorine. Contaminants have been determined by vapor pressure cur ves and/or proper ties that are detrimental to the operation of U H V produc ts. ** Hazardous substance means a chemical or substance, or mix ture of chemicals or substances, which:

is regulated by the Federal Occupational Safet y and Health Administration under Code of Federal Regulations, title 29, par t 1910, subpar t Z; is either toxic or highly toxic, an irritant, corrosive, a strong oxidizer, a strong sensitizer, combustible, either flammable flammable, dangerously reac tive, pyrophoric, a carcinogen, a teratogen, a mutagen, a reproductive toxic agent, or th according to generally accepted documented medical or scientific evidence, may cause substantial acute or chronic p or illness during or as a direc t result of any customar y or reasonably foreseeable accidental or intentional exposure to substance. (Common examples: arsenic, cadmium, gallium, cesium, mercur y, radiation, etc.) o r e x t r e m e ly at other wise, ersonal injur y the chemical or

2915 133rd Street West, Shakopee, M N 55379 Phone: 952- 445 - 4841 Fax: 952- 445 -7615 E-mail: info@gammavacuum.com Website: w w w.gammavacuum.com 25