Äîêóìåíò âçÿò èç êýøà ïîèñêîâîé ìàøèíû. Àäðåñ îðèãèíàëüíîãî äîêóìåíòà : http://www.apo.nmsu.edu/arc35m/Instruments/ARCTIC/Development/ImagerPDR/GammaVac3Sionpump_manual.pdf Äàòà èçìåíåíèÿ: Thu Dec 5 20:44:29 2013 Äàòà èíäåêñèðîâàíèÿ: Thu Feb 27 21:12:11 2014 Êîäèðîâêà: Ïîèñêîâûå ñëîâà: ï ï ï ï ï ï ï ï ï ï ï ï ï ï ï ï ï ï ï ï ï ï ï ï ï ï ï ï ï ï ï ï ï ï ï ï ï ï

ION PUMPS USERS M ANUAL
PN 90 0 013, Rev E

ISO 90 01:20 08 Cer tified


GENER AL INFOR M ATION
Gamma Vacuum ion pumps provide clean, contamination free operation and have long operating lives, with no moving par ts, no requirement for water cooling or liquid nitrogen for operation and lit tle energy consumption. They provide high pumping speeds and feature fast star ting and stabilit y. T h e r e a r e 29 s t a n d a r d m o d e l s o f i o n p u m p s in t h e 0. 2 L / S t o 120 0 L /S range available from Gamma Vacuum. Most pump sizes are available in dif ferential ion or conventional pumping configurations. All pumps are fully enclosed by pole pieces and stainless steel covers which cover the magnets and pumping pockets where appropriate. WARNING: Do not use unauthorized par ts. Such par ts may compromise safet y. Contac t Gamma Vacuum with any questions.

Read this entire manual and follow installation instructions. Failure to do so may cause injur y and/or may void warrant y.

MODELS
Small Pumps Low Profile Pumps Tall Profile Pumps
150T, 150T V 20 0T 250T 30 0T, 30 0T V 50 0T 60 0T V

Mini 10 0 L 3S 20 0 L 10S, 10ST, 10SW 30 0 L 20S 40 0 L , 40 0 L X 25S, 25SV T, 25SV W 60 0 L, 60 0 L X 40S 80 0 L X 45S 120 0 L X 75S

Individual model specification information is located on our website at: w w w.gammavacuum.com

APPROVALS
Gamma Vacuum ion pumps are shown to meet CE and TUV/NRTL approvals: EN 1012-2 EN 61010 -1 UL 61010 -1 C AN/CSA C22.2 No 61010 -1

WARNINGS
WA R N I N G:
G A M M A VA C U U M CO N T R O L U N I T S D ES I G N ED FO R I O N - PU M P O PER AT I O N A R E C A PA B L E O F D EL I V ER I N G 70 0 0 V D C U N D ER O PEN C I RCU I T O R LOW PR ES SU R E O PER AT I N G CO N D I T I O N S . F O R S A FE O PER AT I O N, T H E CO N T RO L U N IT A N D I O N PU M P S H O U L D H AV E A C O M M O N C H A S S I S CO N N EC TO R W H I C H I S T I ED TO T H E P OW ER SYS T EM G RO U N D.

ALE R TE:

L E S U N I T E S D E CO N T R O L E D E G A M M A VA C U U M P O U R L'O PER AT I O N D ES P O M PES I O N I Q U ES SO N T C A PA B L ES D E FO U R N I R 70 0 0 VO LT S CO N T I N U S DA N S U N C I RC U I T O U V E RT O U E N T R A VA I L L A N T S O U S B A S S E PR ES S I O N . P O U R O PER ER EN TO U T E S ECU R I T E, L' U N I T E D E CO N T RO L E E T L A POM PE I ON I QU E D O I V E N T AV O I R U N CO N N E C T E U R D E C H A S S I S E N CO M M U N Q U I E S T L I E A L A T ER R E D U SYS T EM E D'A L I M EN TAT I O N.

A DV E R T E N C I A :

L A S U N I DA D E D E CO N T R O L D E VAC ìO GA M M A D I S Eÿ A DA S PA R A L A O P E R AC I ñ N D E B O M B A S T I P O I ñ N I C A S, SO N C A PAC ES D E A LC A N Z A R 7,0 0 0 V D C B A J O O PER AC I O N D E C I RCU I TO A B I ERTO O EN CO N D I C I O N ES D E O P E R AC I ñ N A B A J A P R E S I ñ N . PA R A U N A O PER AC I ñ N FU ER A D E R I ESG O Y PEL I G RO, L A U N I DA D D E CO N T R O L Y L A B O M B A I ñ N I C A , D EB EN T EN ER U N CO N EC TO R CO M ç N A U N C H A S ì S E L C U à L ES TA R à A SU V E Z, EN L A Z A D O A L A T I E R R A D E L A FU E N T E D E P O D E R .

AC H T U N G :

GA M M A VACU U M ST EU ERG ER äT E Fý R I O N E N G E T T E R- P U M P E N Kæ N N EN H O C H SPA N N U N G EN B I S Z U 70 0 0 VO LT G L EI C H S PA N N U N G ER Z EU G EN B E I M H O C H VA K U U M - B E T R I E B O D E R O FFE N L I E G E N D E N A N S C H Lý S S E N . Fý R D E N SI CH ER EN B E TRI EB M USS EI N G EM E I N S A M ER SC H U T Z L E I T ER D I E G E H ä U S E VO N P U M P E U N D S T EU ERG ER äT M IT D EM SC H U T Z L E I T ER D ES N E T Z A N S C H LU S S E S V E R B I N D E N .

WA R N I N G :

H I G H M AG N E T I C FI EL D. C A N C AU S E I M PL A N T ED H E A RT PAC EM A K ES A N D C A R D I OV E R T E R D EFI B R I L L ATO R S TO C E A S E O PER AT I O N. M A I N TA I N 12 I N C H S A FE D I S TA N C E FRO M I O N PU M P.

A LE R TE:

C H A M P M AG N E T I Q U E I N T E N S E. P E U T C A U S E R D ES PA N N ES D'O PER AT I O N SU R D ES PAC EM A K ER S E T D ES D EFI B R I L L AT EU R S C A R D I AQ U E S M A I N T E N I R U N E D I S TA N C E D E S ECU R I T E D E 3 0 C M A PA RT I R D E L A PO M PE.

A DV E R T E N C I A :

A LTO C A M P O M AG N è T I CO. EL A LTO C A M P O M AG N E T I CO G EN ER A D O PU ED E C AU S A R E L C E S E D E L A O P E R AC I O N D E M A RC A D O R ES D E PA SO Y D E S FI B R I L A D O R E S C A R D ì ACO S .

AC H T U N G :

S TA R K E M AG N E T I SC H E FEL D ER . H ER ZSC H R I T T- M AC H ER U N D D EFI B R I L L ATO R EN Kæ N N EN I N I H R ER FU N K T I O N B E E I N T R ä C H T I GT W E R D E N . M I N D ES TA B STA N D VO N 3 0 C M VO N D E R I O N E N G E T T E R P U M P E EI N H A LT EN.

WA R N I N G :

H E AV Y O B J EC T. TO AVO I D M U S C L E S T R A I N O R B AC K I N J U RY, U S E L I F T I N G A I DS A N D P RO P E R L I F T I N G T EC H N I Q U ES W H EN R E M O V I N G O R R E P L A C I N G.

A LE R TE:

O B J E T LO U R D. P O U R E V ITER U N E TEN SION M U SCU L A I R E O U U N M A L D E D O S, U T I L I S E R D ES A I D ES E T D ES T EC H N I Q U ES D E L E VA G E A P P R O P R I E E S P O U R L'EN L E V EM EN T O U L E DEPL AC EM EN T.

A DV E R T E N C I A :

O B J E TO PES A D O. PA R A E V I TA R U N SO B R E- ES FU ER ZO M U SCU L A R O DA ÿ O Fì S I CO, U T I L I Z E L A AY U DA D E E L E VA D O R E S Y T è C N I C A S A PRO PI A DA S PA R A EL M A N E J O D E O B J E TOS PES A D OS, CUA N D O LO T R A N S P O RT E, D ES PL A Z E O CO N S I D ER E R EEM PL A Z A R LO.

AC H T U N G :

SC H W ER ES O B J EK T. Z U R V E R M E I D U N G VO N M USK EL ZERRU N GEN OD ER R ý C K EN SC H ä D EN B E I M T R A N S P O RT G E E I G N E T E H U B VO R- R I C H T U N G E N U N D H E B E T EC H N I K E N V E RW E N D E N .

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C AU T I O N :

N OT FO R U S E W I T H FL A M M A B L E G A S E S .

AT TE NTION:

N E PA S U T I L I S ER AV EC D ES G A S I N FL A M M A B L E S .

P R E C AU C I O N :

N O D E B E U S A R S E CO N GA S E S FL A M A B L E S O I N FL A M A B L E S .

VOR SIC HT:

N I C H T G E E I G N E T Fý R D E N EI N S AT Z M I T B R EN N B A R EN GA S EN.

C AU T I O N :

B U R N H A Z A R D. A L L I O N R I S Q U E S D E B R U LU R E . PU M P SU R FAC ES A R E H OT TO U T ES L ES SU R FAC ES D U R I N G B A K E. D O N OT D E L A POM PE I ON I QU E TO U C H PU M P U N L ES S B A K E SO N T C H AU D ES PEN DA N T I S O FF A N D P U M P H A S L'E T U VAG E . N E PA S COO L ED. TO U C H ER L A P O M PE S AU F S I L'E T U VAG E ES T A R R E T E E T L A P O M P E R E F R O I D I E.

AT TE NTION:

P R E C AU C I O N :

PEL I G RO D E Q U EM A D U R A . TO DA S L A S S U P E R FI C I E S D E L A S B O M B A S I ñ N I C A S ES Tà N C A L I EN T ES D U R A N T E SU FU N C I O N A M I EN TO. N O TOQ U E L A B O M B A A M EN OS Q U E ES TA H AYA S I D O D ESCO N EC TA DA Y S E H AYA EN FR I A D O.

VOR SIC HT:

V ER B R EN N U N GSG EFA H R . D I E G E S A MT E O B E R FL äC H E D E R I O N EN G E T TER PU M PE W I R D B EI M A U S H E I Z E N S E H R H E I ú. N I C H T B E R ý H R E N B E VO R D I E H E I Z U N G AU SG ESC H A LT E T U N D D I E PU M PE A B G EK ý H LT I ST.

WA R N I N G :

H E AT ER S A R E CO N FI G U R ED FO R EI T H ER 10 0 -120 O R 20 0 -240 VO LT S, 16 A M P S M A X . V ER I F Y A PPRO PR I AT E CO N N EC TO R A N D VO LTAG E PR I O R TO CO N N EC T I O N. VO LTAG E O R CU R R EN T C A N C AU S E I N J U RY O R D E AT H. D I S CO N N E C T A L L P OW E R C O R D S B E F O R E S E R V I C I N G. 60 0 ° C W I R I N G R EQ U I R ED AT PU M P T ER M I N A L S.

A LE R TE:

L ES EL EM EN T S C H AU FFA N T S S O N T CO N FI G U R E S P O U R 10 0 -120 O U P O U R 20 0 -240 VO LT S, 16 A M P S M A X . V E R I FI E R L E S CO N N E C T E U R S E T L ES VO LTAG ES AVA N T L A CO N N EC T I O N. VO LTAG E O U CO U R A N T P E U V E N T C AU S ER D ES B L ES SU R ES O U L A M O RT. D ECO N N EC T ER TO U S L ES CO R D O N S AVA N T L E S E R V I C E. C O N N E C T I O N S A 60 0 ° C N EC ES S A I R E AU N I V E A U D E L A P O M P E.

A DV E R T E N C I A :

LOS C A L EFAC TO R ES ES TA N D I E AU S H EI Z EL EM EN T E S I N D CO N FI G U R A D OS PA R A A M B OS G E E I G N E T Fý R D E N B E T R I E B 10 0 - 120 ñ 20 0 -240 VO LT S, M I T 10 0 -120 V O D ER 20 0 16 A M P M à X I M O. V ER I FI Q U E 240 V W EC H SEL SPA N N U N G, L A A P R O P I A DA CO N E X I ñ N Y M A X . 16 A M PER E. VO R VO LTA J E PR E V I O A L EN C H U FE D ER I N B E TRI EB N A H M E D I E Y PU ES TA EN M A RC H A U KO R R EK T E B E T R I EB S SPA N N U N G O PER AC I O N. U N I N CO R R EC TO S I C H ER S T EL L EN . EL EK T R I SC H E VO LTA J E O CO R R I EN T E, PU ED E S PA N N U N G EN O D ER ST Ræ M E C A U S A R DA ÿ O O I N C LU S O L A Kæ N N EN V ER L E T Z U N G EN M U ERT E. D ESCO N EC T E TO DA O D ER D EN TO D V ERU R S AC H EN. A L I M EN TAC I O N EL èC T R I C A T R EN N EN S I E A L L E EL EK T R I SC H EN A N T E S D E DA R S E R V I C I O D E A N S C H Lý S S E VO N D E R M A N T EN I M I EN TO, R EPA R AC I O N O S PA N N U N GS V ER SO RG U N G R E V I S I ñ N I N T E R N A . E L C A B L E A D O B E VO R S I E A R B E I T E N A N T I P O 60 0 ° C ES R EQ U ER I D O EN L A S D EM G ER äT AU SFý H R EN. T E R M I N AC I O N E S D E L A B O M B A . D I E K A B ELV ER B I N D U N G EN A N D E R P U M P E M ý S S E N Fý R EI N E T EM PER AT U R VO N 60 0 ° C GEEI GN E T SEI N.

AC H T U N G :

WA R N I N G :

R E A D A N D U N D ER S TA N D O PER ATO R ' S M A N UA L B EFO R E U S I N G T H I S M AC H I N E. FA I LU R E TO FO L LOW O PER AT I N G I N S T R U C T I O N S CO U L D R ESU LT I N I N J U RY O R DA M AG E TO EQ U I PM EN T.

A LE R TE:

L I R E E T CO M P R E N D R E L E M A N U EL D'O PER AT I O N A VA N T D ' U T I L I S E R C E T T E M AC H I N E . N E PA S SU I V R E L ES I N S T RU C T I O N S D'O PER AT I O N PEU T C AU S ER D ES B L ES SU R ES O U D ES D EGAT S A L'EQ U I PEM EN T.

L E A , ES T U D I E, Y EN T I EN DA B I EN EL M A N UA L D E O P E R AC I O N , A N T E S D E U S A R ES TA M AQ U I N A R I A . U N A FA L L A P O R N O S EG U I R L A S I N S T RU CC I O N ES O PER AT I VA S, PU D I ER A R ESU LTA R EN DA ÿ O O PER J U I CO D EL EQ U I P O.

A DV E R T E N C I A :

AC H T U N G :

L ES EN U N D V ER S T EH EN S I E D I E B ED I EN U N GS A N L EIT U N G B E VO R S I E DA S G ER äT I N B E T R I EB N E H M E N . FE H L B E D I E N U N G E N Kæ N N EN Z U V ER L E T Z U N G EN Fý H R E N O D E R D I E A U S R ý S T U N G BESC H ä D I G EN.

UNPACKING THE PUMP
Unpack the pump carefully
Do not remove or damage the protec tive plastic cover on the copper punch-of f tube, or the pump may be vented to atmospheric pressure. The pump should be kept under vacuum until it is ready to be installed.

Inspect for any obvious damage
If the pump is damaged in any way, a claim should be filed with the carrier immediately and notification given to Gamma Vacuum. If equipment must be retuned for inspection or repair, obtain authorization from Gamma Vacuum prior to shipping. Contact Gamma Vacuum for authorization and return instructions.

Check the equipment received
Ensure that all items shipped have been received. If any items are missing, notif y the carrier and Gamma Vacuum. Save all packaging material for inspection.

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INITIAL CHECKOUT
Pre-Venting Procedure
Ion pumps are shipped under vacuum to ensure ultra high vacuum cleanliness and to demonstrate the vacuum integrit y of the ion pump. 1. Connect the high voltage cable to the ion pump. Use the supplied c a b l e o r a c a b l e w i t h t h e a p p r o p r i a t e m a t in g c o n n e c t o r f o r y o u r feedthrough.

any position with respect to the inlet flange. M8 mounting bosses are supplied on larger pumps for mounting purposes (use ISO 3266 compliant eye-bolts). NOTE: If the vacuum system is to be cycled of ten, it is recommended that an isolation valve be installed bet ween the ion pump and the vacuum chamber. 3. Several st yles of feedthrough connection systems are available, but SAFECONN connectors are standard. 4. To connect the SAFECONN connector, push the cable end connector onto the feedthrough and turn clock wise to lock in place.

2. Connect the high voltage cable to an ion pump controller with the correct polarit y. Connec t the SAFECONN SMB connector, if included.

5. At tach the other end of the cable to the 10 kV high voltage c o n n e c t o r m o u n t e d o n t h e r e a r o f t h e p ow e r s u p p l y ch a s s i s .

3. Enable high voltage on the ion pump controller. 4. The ion pump should star t immediately and follow the time, pressure, and current specifications recorded on the included cer tificate of conformance.

INSTALL ATION
1. Remove the blank-of f flange from the pump using dr y nitrogen as a venting gas. 2. Bolt the ion pump to the system using the bolt set from the blankof f flange. Pumps up to the size of the 40S many be cantilevered during operation. Given proper suppor t, other pumps can be mounted in

NOTE: Although the high voltage cable has a grounded shield, we r e c o m m e n d t h a t a s e p a r a t e w ir e b e c o n n e c t e d f r o m t h e p um p b o d y t o t h e s a f e t y g r o un d o n t h e r e a r o f t h e c o n t r o l unit chassis. The wire should have a ring lug or other c o n n e c t o r t h a t c a n b e in s e r t e d w i t h o n e o f t h e f l a n g e b o l t washers. 6. The power unit is power plug. This receptacle which receptacle is not equipped with a three prong grounding plug must be inser ted into a similar three-wire is a connection to system ground. If such a available, a separate ground must be provided.

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OPER ATION
G e n e r a l R e c o m m e n d a t io n s
Read the following recommendations before operating your ion pump: Ensure that the air and environment are free from contaminants. Hands should be gloved and free from oils. Use UHV practices w h e n w o r k in g w i t h i o n p u m p s . For bet ter star ting and pump down time, flush the system with dr y n i t r o g e n t o d e cr e a s e w a t e r v a p o r a n d n o b l e g a s q u a n t i t i e s . Check to see that the ion pump controller is properly connected and that the system is tightly sealed. To increase ion pump life and shor ten time to ultimate pressure, use the full ex tent of the roughing system and star t the ion pump at the lowest possible pressure.

P u m p S t a r t in g ( N o t I s o l a t e d )
T hi s p r o c e dur e i s us e d w h e n t h e i o n p um p i s s t a r t e d a f t e r e x p o s ur e to atmospheric pressure or any pressure above 2.5 x 10 -2 torr. If the pump is still under vacuum, see "Pump Star ting (Isolated)" on page 5. 1. Switch on the roughing pump and open the roughing valve. 2. On the ion pump controller, set the controller readout display to voltage. Set the ion pump controller switch to star t, if so equipped. 3. Switch on the ion pump controller when system pressure has reached 1 x 10 -4 torr (lower pressure is bet ter). 4. The controller should read 30 0 to 50 0 volts and slowly increase to full voltage (normally 50 0 0 to 70 0 0 volts). 5. Close the roughing valve when the controller reads 20 0 0 volts or greater. 6. When the controller reads 350 0 volts, set the power unit switch to run, if so equipped. To determine ion pump pressure, set the controller readout display to a current range, and calculate pressure by means of the current to pressure equation. NOTE: Gamma Vacuum ion pump controllers have a selection for pressure readout.

R o u g h P u m p in g
Rough pumping removes a high volume of gas load and achieves a pressure at which the ion pump will star t. The ion pump will star t quicker, achieve ultimate pressure faster, and last longer. CAUTION: Do not contaminate the ion pump with hydrocarbons f r o m o il s u s e d t o s e al m e ch a n i c al p u m p s . Rough pump the system af ter you install the ion pump on the system. Refer to the roughing pump manufac turer 's manual for instructions on roughing procedures, proper operation, and venting. Rough pumping must reduce system pressure to 1 x 10 -4 torr or lower.

P u m p S t a r t in g ( I s o l a t e d )
This procedure is used if the ion pump is under vacuum and isolated with a high-vacuum isolation valve. In this case, the ion pump is kept in operation while the remainder of the system is opened to atmosphere. 1. Check to see that the ion pump is operating properly. 2. Switch on the roughing pump and open the roughing valve. 3. On the ion pump controller, set the controller readout display to voltage. Set the ion pump controller switch to star t, if so equipped. 4. When system pressure has reached 1 x 10 -4 torr (lower pressure is bet ter), begin closing the roughing valve and opening the isolation valve. Do not let ion pump voltage drop below 30 0 0 volts. 5. When voltage is greater than 350 0 volts, with the isolation valve fully open and the roughing valve fully closed, place the ion pump controller switch to run, if so equipped.

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O n g oi n g O p e r a t i o n
Af ter the ion pump has star ted, it continues to reduce pressure in the system without fur ther at tention. NOTE: The ion pump can be kept in permanent operation. The ion pump controller should provide overload protec tion to turn of f the ion pump if system pressure rises above ion pump operating pressure. Other desirable features of an ion pump controller are: ion pump over-current protec tion s a f e t y in t e r l o ck s voltage, current, and pressure display analog outputs that correspond to ion pump voltage and current remote control on/of f setpoints -- relays that can interlock equipment and processes, or control bakeout by ion pump current or calculated pressure c o m p u t e r in t e r f a c e f o r r e m o t e o p e r a t i o n b y c o m p u t e r

Bakeout Procedure
Bakeout reduces high gas loads. Gamma Vacuum bakeout heaters heat ion pumps above 150 °C in free air (without covers or blankets). T h ey h e a t t h e i o n p u m p t o a h i g h e n o u g h t e m p e r a t u r e t o a d e q u a t e l y degas pump sur faces while preventing loss of magnetic flux In free air, element heater temperature is self-limiting: the ion pump and magnet temperatures are held to acceptable limits without a thermostat. If ion pumps are covered or insulated during bakeout, then the temperature of the ion pump should be thermostatically controlled. NOTE: When connecting heaters to a power source, ensure that power disconnects are readily available. Before You Begin During bakeout, monitor system pressure so that it does not exceed 1 x 10 -5 torr. It might be necessar y to switch the heaters of f periodically and allow pressure to drop, then switch the heaters back on as the gas load is reduced. WARNING: Heaters are ex tremely hot to the touch. To avoid severe injur y, isolate the pump so that no one is able to touch it.

Venting Procedure
To enhance system per formance: Minimize the time the ion pump is exposed to atmosphere. Use dr y nitrogen gas when venting the ion pump to atmospheric pressure. NOTE: If an isolation valve is included, close it (with ion pump in operation) before opening the system. When venting the system to atmosphere, ion pump current may rise. This is not a problem if pressure remains below 1 x 10 -6 torr. 1. Switch of f the ion pump controller. 2. Connect a source of clean dr y nitrogen to the up-to-air valve. 3. Open the up-to-air valve slowly to prevent dr y nitrogen from entering the system too quickly. 4. Open the roughing isolation valve, gradually. CAUTION: When venting, do not pressurize the ion pump or vacuum system above atmospheric pressure.

CAUTION: Temperatures above 350 °C can cause irreversible loss of magnetic field strength. W h e n o p e r a t in g t h e s y s t e m a t 3 5 0 ° C o r above, remove the ferrite magnets from the ion pump.

CAUTION: Heater must be wired to a disconnect and over-current protection device.

Bakeout Operation Procedure 1. Switch on the heaters. 2. Monitor system pressure until system is heat-soaked and system pressure begins to decline. 3. If bakeout temperatures near 250 °C, shut of f the ion pump and use an auxiliar y pump for bakeout. 4. Do not cut the bakeout period shor t. In most cases, a minimum of eight hours is recommended. Longer bakeout periods are of ten advisable. NOTE: In a few cases, the ion pump is so badly contaminated that bakeout is not suf ficient and it may be necessar y to use chemical cleaning, which is a dif ficult procedure. If this is the case, contact your local ser vice for details.

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MAINTENANCE
CAUTION: This equipment uses a high voltage, detachable power supply cord. Do not r e p l a c e w i t h in a d e q u a t e l y r a t e d s u p p l y cords.

Per formance Checks
The ion pump operates on the cold cathode discharge principle, so it does not include any moving par ts. The pump is a sealed trapping device and all gaseous material pumped is retained inside the pump in the form of solid-state compounds. For these reasons the pump requires only minimum maintenance to provide trouble-free operation for ex tended periods of time. O p e r a t io n C h e c k With the pump under vacuum, verif y as 1. Check that the ion pump control unit condition. (Refer to Control Unit user 2. Connect the high voltage connec tor t lead-through (ceramic insulator). follows: i s in p r o p e r o p e r a t in g manual.) o the ion pump high voltage

To determine whether ion pump current increase is due to an increase in system pressure or leakage current/field emission: 1. Place the system under vacuum suf ficient to produce an ion pump current of 1 mA or less. See "Rough Pumping" on page 5. 2. Switch of f the ion pump controller. 3. Remove the magnets from the ion pump (see "Magnetic Strength Check " on page 7). 4. Switch on the ion pump controller. Current should be negligible on the ion pump controller at full ion pump controller voltage. 5. If leakage current is present, maintenance may be required. NOTE: Leakage current causes errors in pump pressure reading, however, it does not necessarily af fect actual pumping speed. M a gn e tic St r e n g t h Ch e c k NOTE: To complete this process, you need a gaussmeter. Magnetic field strength is one factor that determines the pumping speed of the ion pump. The magnets are magnetized prior to assembly at the factor y, and there should not be a noticeable reduction in strength unless the magnets are heated above 350 °C or are badly damaged. To check field strength: 1. Remove a magnet assembly from one or more pumping elements. 2. Set the gap bet ween the assemblies at 1-1/2" (38 mm). Use a wooden spacer block where necessar y. 3. Check all components of the field in the gap. The field should be approximately 10 0 0 ­150 0 gauss depending on magnetic circuit design.

3. Turn on the control unit. Obser ve the decrease in current as the pump pumps itself down. Voltage should read 70 0 0 ± 10% and current of a few microamps af ter a shor t period of time. Leakage Current Check Total current in an ion pump is a combination of the following four currents: Discharge current is the sum of ion flow to/from the cathode plates, which consists of ion collisions with cathode plates and ions liberated from cathode plates. This current is almost propor tional to ion pump pressure. Secondar y electron current occurs when elec trons are ejected from cathode plates or ion pump walls by colliding ions. This current increases with increasing ion energy (operating voltage). Leakage current flows across a resistive element such as high voltage cable insulation, high voltage feedthrough, or insulating ceramics. This current increases as the ion pump ages when sput tered deposits coat the ceramic insulators with a conductive film. Field emission current is caused by a high voltage gradient. This current depends on the voltage, distance to adjacent sur faces, and the geometr y of the field emission point. Sharp edges and needle points exhibit higher emission currents because the electric field gradient is greater around them. 7


Troubleshooting Symptom
Pum p d o e s n o t p um p s y s t e m down.

Possible Cause
1. 2. 3. 4. 5. 1. 2. 3. 4. 1. 2. 3. 4. Large leak in system. Gauge equipment or power unit malfunction. Pump has shor t circuit. M agnetic field strength low. Pump hot. Leak in system. Atmospheric contaminants on pump and system walls. Gassy material in system. Pump hot. Insuf ficient roughing vacuum. Leak in roughing system. Pump contaminated from hydrocarbon source. Pump contaminated with iner t gases.

Recommended Corrective Action
1. 2. 3. 4. 5. 1. 2. 3. 4. Leak check system, repair leak. Check gauge and/or power unit operation. Burn shor t out or return to factor y for repair. Check field strength, remagnetize if necessar y. Allow to cool to room temperature. Check system for leaks, repair. Use low temperature bakeout of system. Remove materials with high outgassing rate. Allow to cool to room temperature.

P u m p d ow n i s s l ow a n d b a s e p r e s s ur e hi g h e r t h a n previously.

Pump does not star t.

P u m p b e c o m e s h o t d u r in g star ting. P u m p b e c o m e s h o t d u r in g operation. Pump current rises to higher level than previously.

1. Insuf ficient roughing vacuum. 2. Leak in rouging system. 1. Pressure too high, has load too heav y for pump to handle. 1. System contaminated with atmospheric contaminants. 2. Pressure in system is higher. 3. Pump has developed high leakage current. 1. Pump magnets installed incorrectly. 2. Pump up to air.

1. Check roughing pump for correct operation, check roughing gauge. 2. Leak check roughing system, repair leak. 3. Use RGA to determine if oil is present. Pump requires chemical cleaning. 4. Rerough system with dr y N2 back fill. 1. Check roughing pump operation. 2. Leak check roughing system, repair leak. 1. Reduce gas load and/or clean system. 1. Use low temperature bakeout. 2. Reduce gas load, outgas system, remove gassy materials. 3. a. Burn out leakage paths. b. Replace insulators 1. Verif y magnets are installed correctly. 2. Confirm ion pump is not at atmospheric pressure.

Pump current shows zero but s y s t e m p r e s s u r e in d i c a t e s higher pressure.

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CORRECTIVE PROCEDURES
Leak Testing
T h e m o s t c o m m o n c au s e o f t h e s l ow p u m p d ow n a n d h i g h b a s e pressure in any vacuum system is a leak. Even an ex tremely small leak, which would be undetec table in a pressure system, can be ver y serious in an ultra-high vacuum system. Using a mass spectrometer or equivalent t ype leak detec tor, spray t h e o u t s i d e s u r f a c e o f t h e s y s t e m a t s u s p e c t e d l e a k p o in t s w i t h a probe gas through a fine muz zle. If a leak detec tor is not available, a l e s s d e s ir a b l e m e t h o d o f l e a k d e t e c t i o n i s t o m o n i t o r t h e p u m p current in conjunction with using a probe gas such as helium. Any leak should be fixed permanently. 3. Several applications of this technique may by necessar y. Be sure to allow the control unit to discharge completely bet ween each application. 4. If this procedure does not eliminate the leakage current, check the feedthrough for leakage as described in "Per formance Checks" on page 7. CAUTION: THESE CONTROL UNITS ARE C APABLE OF DELIVERING 70 0 0VDC UNDER OPEN CIRCUIT CONDITIONS. OBSERVE SAFET Y PREC AUTIONS LISTED IN " WARNINGS" ON PAGE 2. 5. If the feedthrough is not the cause of the leakage current, the pumping element ceramic insulators are the conduction path and should be replaced.

Low Temperature Bakeout
This procedure is ver y ef fec tive for improving the pumpdown s p e e d a n d b a s e p r e s s u r e o f a s y s t e m w h i ch d o e s n o t a p p e a r t o b e per forming as well as it has previously. The principal reason for decreased per formance is the contamination of the system or pump with atmospheric water vapor. T hi s w a t e r va p o r e n t e r s a n o p e n s y s t e m a n d a d h e r e s t o t h e s y s t e m walls. Although this contamination does not physically harm the pump or "load it up," it is not removed by subsequent roughing cycles and forms a significant additional gas source in the system, par ticularly in moist climates. To remove water vapor and restore proper operation: 1. Place the system under vacuum with the system sealed and the ion pump in operation. 2. Bake out temperatures of 20 0 °C to 250 °C are suf ficient to obtain pressures in the UHV range. Bakeouts at higher temperatures must be done into an auxiliar y pump since the pumping speed of an ion pump is ver y low at these temperatures due to the reduced field strength of the magnets at elevated temperatures. To prevent irreversible loss of magnetic field strength at temperatures above 350 °C, remove the magnets from the pump (see "M agnetic Strength Check " on page 7 ). If there are any non-metallic (for example, Viton) seals in the system, the bakeout should be limited to 150 °C. If the ion pump is equipped with a bakeout heater, use it in place of the heat lamps on the pump. 3. A djust the heat to prevent pressure in the system from rising above approximately 2 x 10 -5 torr. 4. Generally, an overnight bakeout of this sor t will be suf ficient, but longer bakeouts may be required for contaminated systems. This procedure may be repeated as many times as it provides beneficial results. In the majorit y of cases, it will greatly improve system per formance without additional work being required.

Pump Shor t Circuits
On infrequent occasions, the pump may develop a shor t circuit af ter ex tended operation because a flake of deposited material is shor ting a cr o s s t h e p u m p e l e m e n t a n o d e - c a t h o d e u n i t s . 1. Check for shor ts by measuring resistance bet ween the feedthrough tip and the pump body. Resistance should be infinite. 2. If a shor t is indicated, turn on the control unit with the pump in the low micron range (10 -3 torr). 3. If several applications of this technique do not remove the shor t, let the pump up to atmosphere and repeat the procedure. See "Rough Pumping" on page 5 and the "Pump Star ting" sections on page 5. 4. If this procedure does not remedy the shor t, remove the pump from the system and remove and inspect the connector straps and pumping elements. Connect each pumping element individually to the control unit and check for shor ts by turning on the control unit. 5. Replace all ceramics. 6. Remove all loosely adhering material from the par t, including the pump envelope. 7. Degrease par ts and reassemble with new ceramics. 8. Vacuum flakes and loose material out of pump body. 9. Reassemble and turn on power supply at atmosphere to check for shor ts or leakage. CAUTION: THESE CONTROL UNITS ARE C APABLE OF DELIVERING 70 0 0VDC UNDER OPEN CIRCUIT CONDITIONS. OBSERVE SAFET Y PREC AUTIONS LISTED IN " WARNINGS" ON PAGE 2.

High Electrical Leakage
High leakage current does not appreciably af fec t the operation of the pump, but it does render the pump incapable of giving accurate pressure readings. However, pressure can be read by determining the total leakage current af ter removing the magnets, and subtrac ting this value from the total current drawn by the pump. To reduce electrical leakage: 1. Connect the Gamma Vacuum control unit to the ion pump. 2. With the pump pressure in the low micron range (10 -2 torr), turn on the control unit.

C h e mi c a l Cl e a n in g
In a few instances, a system and pump may be so badly contaminated by a source other than atmospheric contamination that a moderate bakeout is not suf ficient for improving per formance. In these cases, it may be necessar y to use chemical cleaning. This procedure is dif ficult and requires special equipment and chemicals. Gamma Vacuum provides this ser vice. Contact the factor y for details.

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WARR ANT Y & SERVICE
Ser vice
Cl e a nin g P r o c e d u r e Prior to any cleaning of the pump, the mains power should be disconnected. Once powered of f, use a 50% distilled water and 50% isopropyl alcohol solution to clean the entire unit. A sof t, non abrasive cloth will ensure no damage to the LCD screen and finish of the unit. S e r v ic e Re que s t s Upon notification, Gamma Vacuum will identif y the level of ser vice required. To assist in this process, please provide the following information in as much detail as possible: Par t Number S e r i al N u m b e r Detailed Description of the Vacuum System Hardware Detailed Description of the Vacuum System Process (gas species introduced, ultimate pressure, operational pressure) R e a s o n fo r S e r v i c e R e qu e s t Required Documentation To expedite this process, please for ward this information to ser vice@gammavacuum.com. D ir e c t S up p o r t Prior to recommending replacement par ts or ser vice at our facilit y, Gamma Vacuum can assist with general vacuum issues via e-mail or by telephone at no charge. It is our goal to have vacuum systems func tional with minimal time and financial investment. To do this, our ser vice technicians require as much information as possible about the vacuum system in need of suppor t. To assist in this process, please provide the following information in as much detail as possible: Par t Number S e r i al N u m b e r Detailed Description of the Vacuum System Hardware Detailed Description of the Vacuum System Process (gas species introduced, ultimate pressure, operational pressure) Reason for Suppor t Inquir y To expedite this process, please for ward this information to ser vice@gammavacuum.com or contac t our facilit y direc tly at the numbers below.

Warrant y
General Terms Gamma Vacuum warrants to the Buyer that the equipment sold is new equipment, unless previously stated, and is, at the time of shipment to Buyer from Gamma Vacuum, free from defects in material and workmanship. A s Buyer 's sole exclusive remedy under this warrant y, Gamma Vacuum agrees to either repair or replace, at Gamma Vacuum's option and free of par ts charge to Buyer, and par t or par ts which, under proper and normal conditions of use, prove to be defective within t welve (12) months from the date of receipt by buyer. A s expendable items may have a life time of less than one year, their warrant y is subject to reasonable ser vice and will be replaced as determined by Gamma Vacuum. All warrant y claims must be brought to the at tention of Gamma Vacuum within thir t y (30) days of failure to per form. This warrant y does not cover loss, damage, or defects resulting from transpor tation to the buyer 's facilit y, improper or inadequate maintenance by buyer, buyer supplied sof t ware or inter facing, unauthorized modifications of misuse, operation outside of environmental specifications for the equipment or improper site preparation and maintenance. I n - w a r r a n t y r e p a ir e d o r r e p l a c e m e n t p a r t s a r e w a r r a n t e e d o n l y f o r t h e r e m a in in g u n e x p ir e d p o r t i o n t h e t h e o r i g in al w a r r a n t y p e r i o d applicable to the par ts which have been repaired or replaced. Af ter expiration of the applicable warrant y period, the Buyer shall be charged at Gamma Vacuum's then current prices for par ts, labor, and transpor tation. Reasonable care must be used to avoid hazards. Gamma Vacuum expressly disclaims responsibilit y for any loss or damage caused b y t h e u s e o f i t s p r o d u c t s o t h e r t h a n in a c c o r d a n c e w i t h p r o p e r o p e r a t in g a n d s a f e t y p r o c e d u r e s . E XCEPT A S STATED HEREIN, GA M M A VACUUM M AKES NO WARR ANT Y, E XPRESSED OR IMPLIED (EITHER IN FAC T OR BY OPER ATION OF L AW ), STATUTORY OR OTHERWISE: AND, E XCEPT A S STATED HEREIN, GA M M A VACUUM SHALL HAVE NO LIABILIT Y FOR SPECIAL OR CONSEQUENTIAL DA M AGES OF ANY KIND OR FROM ANY C AUSE ARISING OUT OF THE SALE, INSTALL ATION, OR USE OF ANY OF ITS PRODUC TS. Statements made by any Gamma Vacuum, which of this warrant y shall not r e d u c e d t o w r i t in g a n d a person, including representatives of a r e i n c o n s i s t e n t o r in c o n f li c t w i t h t h e t e r m s be binding upon Gamma Vacuum unless pproved by an of ficer of Gamma Vacuum.

Gamma Vacuum may at any time discharge its warrant y as to any o f i t s p r o d u c t s b y r e f u n d in g t h e p u r ch a s e p r i c e a n d t a k in g b a ck t h e products.

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Warrant y Claims Upon notification, Gamma Vacuum will investigate Warrant y Claims. To initiate a Warrant y Claim, please contac t Gamma Vacuum or a representative of Gamma Vacuum direc tly. To assist in this evaluation, please provide the following information in as much detail as possible: Par t Number S e r i al N u m b e r Detailed Description of the Vacuum System Hardware Detailed Description of the Vacuum System Process (gas species introduced, ultimate pressure, operational pressure) Detailed Reason for the Warrant y Claim To expedite this process, please for ward this information to to ser vice@gammavacuum.com.

R e t u r n in g M a t e r i a l
Re t ur n Pr o c e dur e In the event a product requires ser vice, exchange, or return, a Return Material Authorization (R M A) number must be obtained from Gamma Vacuum prior to shipment. R M A numbers can be obtained by calling Gamma Vacuum tollfree. The R M A process will be expedited if any of the following information can be provided: O r i g in al P u r ch a s e O r d e r N u m b e r Gamma Vacuum Sales Order Number Product Order Number and/or Product Description P r o d u c t S e r i al N u m b e r All products received for repair or replacement shall be prepaid. Items not labeled with an R M A number will be accepted; however substantial delay in processing may result. A standard restocking fee may apply. NOTE: Prior to issuance of an R M A , the required documents must be submit ted to Gamma Vacuum. R e q ui r e d D o c u m e n t a t i o n During a lifetime of system operation, it is possible that cer tain contaminants, some of which could be hazardous, may be introduced into the vacuum system, thus contaminating the c o m p o n e n t s . P l e a s e c o m p l e t e t h e fo r m o n t h e n e x t p a g e t o i d e n t i f y any known hazardous substances that have been introduced into the vacuum system. This will enable us to evaluate your equipment and determine if we have the facilities to make the repair without risk to employee health and safet y. Return, repairs, or credit will not be authorized until this form has been signed and returned. NOTE: Prior to returning any materials, Gamma Vacuum must issue an R M A . The R M A number should be clearly labeled on all shipping information and packages.

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RETURN M ATERIAL AUTHORIZ ATION FOR M
Thank you for taking the time to complete this form. Please complete this form and return to Gamma Vacuum in electronic format (Adobe PDF format [.pdf ] preferred), or via fax. Digital signatures are acceptable. A s sign e d R M A : Your Reference: CONTACT INFOR M ATION Name: E-mail Address: Phone: Fax: Website: COM PANY INFOR M ATION Company Name: Date: Address:

RETURN INFOR M ATION Type of Product: I o n Pum p Ion Pump Controller Other H a s N ot B e e n E x p os e d H a s B e e n E x p os e d Warrant y Claim S e r v i c e R e qu e s t S h ip p in g E r r o r Evaluation Other Par t Number: Description: S e r i al N u m b e r : Original P u r ch a s e O r d e r : Your Reference:

Contaminant Status*: Claim Status:

Reason for Return:

A dditional Information:

Signature of Cer tif ying Official: Name and Title of Cer tif ying Official:

* Contaminants to vacuum systems are defined as: any substance that, because of its proper ties, is not compatible with ultra-high vacuum (U H V ) operation. Some of these are: silicon (in the form of silicones), sulfur, cadmium, fluorine and chlorine. Contaminants have been determined by vapor pressure cur ves and/or proper ties that are detrimental to the operation of UH V produc ts. ** Hazardous substance means a chemical or substance, or mix ture of chemicals or substances, which:

is regulated by the Federal Occupational Safet y and Health Administration under Code of Federal Regulations, title 29, par t 1910, subpar t Z; is either toxic or highly toxic, an irritant, corrosive, a strong oxidizer, a strong sensitizer, combustible, either flammable flammable, dangerously reac tive, pyrophoric, a carcinogen, a teratogen, a mutagen, a reproductive toxic agent, or th according to generally accepted documented medical or scientific evidence, may cause substantial acute or chronic p or illness during or as a direc t result of any customar y or reasonably foreseeable accidental or intentional exposure to substance. (Common examples: arsenic, cadmium, gallium, cesium, mercur y, radiation, etc.) o r e x t r e m e ly at other wise, ersonal injur y the chemical or

2915 133rd Street West, Shakopee, M N 55379 Phone: 952- 445 - 4841 Fax: 952- 445 -7615 E-mail: info@gammavacuum.com Website: w w w.gammavacuum.com 12