ÈÑÒÈÍÀ

Krivtsun V.M.

Ñîàâòîðû: Ëîïàåâ Ä.Â., Ðàõèìîâà Ò.Â., Çûðÿíîâ Ñ.Ì., Êîâàëåâ À.Ñ., Âàñèëüåâà À.Í., Koshelev K.N., Ðàõèìîâ À.Ò., Malykhin E.M., Yakushev O.F., Çîòîâè÷ À.È., Bijkerk F., Dolgov A., Lee C.J. ïîêàçàòü ïîëíîñòüþ..., Áðàãèíñêèé Î.Â., Goedheer W.J., Astakhov D.I., IVANOV V.V., Bolshov M.A., Glushkov D., Âîëûíåö À.Â., Koshelev K., Êîâàëåâ A.C., Kuritsyn Y.A., Liger V.V., van Kaampen M.

8 ñòàòåé, 2 ïàòåíòà

Êîëè÷åñòâî öèòèðîâàíèé ñòàòåé â æóðíàëàõ ïî äàííûì Web of Science: 12, Scopus: 8

IstinaResearcherID (IRID): 468384

Äåÿòåëüíîñòü ñòèëü:  îáû÷íûé | ÃÎÑÒ | plain | abbrv | acm | alpha | amsalpha | amsplain | apalike | ieeetr | siam

• Ñòàòüè â æóðíàëàõ

  • 
    • 2015 Plasma probe characteristics in low density hydrogen pulsed plasmas
    • Astakhov D.I., Goedheer W.J., Lee C.J., Ivanov V.V., Krivtsun V.M., Zotovich A.I., Zyryanov S.M., Lopaev D.V., Bijkerk F.
    • â æóðíàëå Plasma Sources Science and Technology, èçäàòåëüñòâî Institute of Physics Publishing (United Kingdom), òîì 24, ? 5, ñ. 055018 DOI
  • 
    • 2014 Comparison of H 2 and He carbon cleaning mechanisms in extreme ultraviolet induced and surface wave discharge plasmas
    • Dolgov A., Lopaev D., Rachimova T., Kovalev A., Vasil?eva A., Lee C.J., Krivtsun V.M., Yakushev O., Bijkerk F.
    • â æóðíàëå Journal of Physics D - Applied Physics, èçäàòåëüñòâî Institute of Physics Publishing (United Kingdom), òîì 47, ? 6, ñ. 065205 DOI
  • • 2013 Space--time evolution of low-pressure H2 plasma induced by runaway photoelectrons produced by KrF laser pulse
    • Zotovich A., Volynets A., Lopaev D., Zyryanov S., Koshelev K., Krivtsun V., Astakhov D.
    • â æóðíàëå Bulletin of the American Physical Society, 66th Annual Gaseous Electronics Conference, òîì 58, ? 8
  • 
    • 2012 Removal of amorphous C and Sn on Mo:Si multilayer mirror surface in Hydrogen plasma and afterglow
    • Braginsky O.V., Kovalev A.S., Lopaev D.V., Malykhin E.M., Rakhimova T.V., Rakhimov A.T., Vasilieva A.N., Zyryanov S.M., Koshelev K.N., Krivtsun V.M., van Kaampen Maarten, Glushkov D.
    • â æóðíàëå Journal of Applied Physics, èçäàòåëüñòâî American Institute of Physics (United States), òîì 111, ? 9, ñ. 093304-093304 DOI
  • 
    • 2011 Loss of Hydrogen Atoms in H-2 Plasma on the Surfaces of Materials Used in EUV Lithography
    • Zyryanov S.M., Kovalev A.S., Lopaev D.V., Malykhin E.M., Rakhimov A.T., Rakhimova T.V., Koshelev K.N., Krivtsun V.M.
    • â æóðíàëå Plasma Physics Reports, èçäàòåëüñòâî Maik Nauka/Interperiodica Publishing (Russian Federation), òîì 37, ? 10, ñ. 881-889 DOI
  • 
    • 2005 Determination of the parameters of condensed media by the dual-wavelength differential absorption method
    • Liger V.V., Bolshov M.A., Kuritsyn Y.A., Krivtsun V.M., Zybin A.V., Niemax K.
    • â æóðíàëå Optics and Spectroscopy (English translation of Optika i Spektroskopiya), èçäàòåëüñòâî Optical Society of America (United States), òîì 99, ? 5, ñ. 816-827 DOI

• Ñòàòüè â ñáîðíèêàõ

  • • 2013 Comparison of H2 and He carbon cleaning mechanisms in extreme ultraviolet induced and surface wave discharge plasmas
    • Dolgov A., Lopaev D., Rachimova T., Kovalev A., Vasilyeva A., Lee C.J., Krivtsun V., Yakushev O., Bijkerk F.
    • â ñáîðíèêå arXiv preprint arXiv:1310.4057
  • • 2010 In-Line Plasma Cleaning of EUV Multilayer Mirrors
    • Malykhin E.M., Braginsky O.V., Kovalev A.S., Lopaev D.V., Rakhimov A.T., Rakhimova T.V., Vasilieva A.N., Zyryanov S.M., Koshelev K.N., Krivtsun V.M., Yakushev O.F.
    • â ñáîðíèêå Bulletin of the American Physical Society, 63rd Gaseous Electronics Conference & 7th International Conference on Reactive Plasmas, October4-8 2010, Paris, France, ñåðèÿ 7, ìåñòî èçäàíèÿ Paris, France, òîì 55

• Ïàòåíòû

  • • 2011 Lithographic apparatus and device manufacturing method
    • Àâòîðû: Ivanov V.V., Banine V.Y., Bleeker A.J., Koshelev K.N., Antsiferov P.S., Krivtsun V.M., Lopaev D.V.
    • #United States Patent 7872244, 18 ÿíâàðÿ
  • • 2009 LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
    • Àâòîðû: IVANOV V.V., BANINE V., BLEEKER A., KOSHELEV K.N., ANTSIFEROV P.S., KRIVTSUN V.M., LOPAEV D.V.
    • #WO2009018933, 13 ôåâðàëÿ