1.0 INTRODUCTION

Back-illuminated CCDs with resolution greater than 4096 x 4096 elements, frame rates in excess of 10,000 frames per second, and noise lower than 3 electrons rms. have been independently demonstrated. Additionally, back-illuminated CCD cameras have been shown well suited for significant low light level imaging applications. However, the application of back-illuminated CCDs for night vision applications requires that all performance characteristics be optimized in a single manufacturable device. Unfortunately, there is a common tendency among manufacturers to optimize one CCD performance characteristic at the expense of others. Moreover, manufacturing methods employed for demonstrating one performance characteristic are often incompatible with the global performance parameters required of low light level imaging. To globally optimize CCD technologies for night vision imaging applications, the authors have developed a methodology of experimental design, process optimization, and absolute performance calibration. The goal of this effort is to develop superior back-illuminated CCD imagers, optimized for night vision applications, available in production level quantities, and procurable at cost effective prices.