Head: Sergey I.Dorozhkin

Tel.: 2-82-61, e-mail: dorozh@issp.ac.ru

Main research directions:

1. Structurization of multilayer thin-film metal-, semiconductor- and dielectric-based heterostructures.
2. Improvement of existing and development of novel techniques of optical and electron nanolithography.
3. Fabrication of experimental thin film nanostructures.

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